专利快速检索-快速检索全球专利，免费商用专利数据库-IPRDB

1. 发明申请

US20080067603A1 THIN FILM TRANSISTOR ARRAY PANEL AND METHOD OF MANUFACTURE 有权
标题翻译：薄膜晶体管阵列和制造方法
公开(公告)号：US20080067603A1
公开(公告)日：2008-03-20
申请号：US11696097
申请日：2007-04-03
申请人： Jong-Hyun Choung , Hong-Sick Park , Joo-Ae Yoon , Jeong-Min Park , Doo-Hee Jung , Sun-Young Hong , Bong-Kyun Kim , Won-Suk Shin , Byeong-Jin Lee
发明人： Jong-Hyun Choung , Hong-Sick Park , Joo-Ae Yoon , Jeong-Min Park , Doo-Hee Jung , Sun-Young Hong , Bong-Kyun Kim , Won-Suk Shin , Byeong-Jin Lee
IPC分类号： H01L21/00 , H01L29/76
CPC分类号： H01L27/1288 , H01L27/1214
摘要： A method of manufacturing a thin film transistor array panel, including: forming gate lines on a substrate; forming a gate insulating layer on the gate lines; forming semiconductor layers on the gate insulating layer; forming data lines and drain electrodes on the semiconductor layers; depositing a passivation layer on the data lines and the drain electrodes; forming a first photoresist layer including a first portion and a second portion that is thinner than the first portion on the passivation layer; forming a first preliminary contact hole exposing the data lines by etching the passivation layer by using the first photoresist layer as a mask; removing the second portion of the first photoresist; forming a first contact hole by expanding the first preliminary contact hole and opening portions by etching the passivation layer by using the first portion of the first photoresist layer as a mask; depositing a conductor layer; and forming pixel electrodes in the opening portions and a first contact assistant member in the first contact hole by removing the first photoresist layer and the conductor layer located thereon.
摘要翻译：一种制造薄膜晶体管阵列面板的方法，包括：在衬底上形成栅极线; 在栅极线上形成栅极绝缘层; 在所述栅极绝缘层上形成半导体层; 在半导体层上形成数据线和漏电极; 在数据线和漏电极上沉积钝化层; 形成第一光致抗蚀剂层，其包括比钝化层上的第一部分更薄的第一部分和第二部分; 通过使用第一光致抗蚀剂层作为掩模，形成通过蚀刻钝化层而暴露数据线的第一预接触孔; 去除第一光致抗蚀剂的第二部分; 通过使用第一光致抗蚀剂层的第一部分作为掩模，通过蚀刻钝化层来扩展第一预接触孔和开口部来形成第一接触孔; 沉积导体层; 以及通过去除位于其上的第一光致抗蚀剂层和导体层，在开口部分中形成像素电极和第一接触孔中的第一接触辅助部件。

2. 发明授权

US07776633B2 Thin film transistor array panel and method of manufacture 有权
标题翻译：薄膜晶体管阵列面板及其制造方法
公开(公告)号：US07776633B2
公开(公告)日：2010-08-17
申请号：US11696097
申请日：2007-04-03
申请人： Jong-Hyun Choung , Hong-Sick Park , Joo-Ae Yoon , Jeong-Min Park , Doo-Hee Jung , Sun-Young Hong , Bong-Kyun Kim , Won-Suk Shin , Byeong-Jin Lee
发明人： Jong-Hyun Choung , Hong-Sick Park , Joo-Ae Yoon , Jeong-Min Park , Doo-Hee Jung , Sun-Young Hong , Bong-Kyun Kim , Won-Suk Shin , Byeong-Jin Lee
IPC分类号： H01L21/00
CPC分类号： H01L27/1288 , H01L27/1214
摘要： A method of manufacturing a thin film transistor array panel, including: forming gate lines on a substrate; forming a gate insulating layer on the gate lines; forming semiconductor layers on the gate insulating layer; forming data lines and drain electrodes on the semiconductor layers; depositing a passivation layer on the data lines and the drain electrodes; forming a first photoresist layer including a first portion and a second portion that is thinner than the first portion on the passivation layer; forming a first preliminary contact hole exposing the data lines by etching the passivation layer by using the first photoresist layer as a mask; removing the second portion of the first photoresist; forming a first contact hole by expanding the first preliminary contact hole and opening portions by etching the passivation layer by using the first portion of the first photoresist layer as a mask; depositing a conductor layer; and forming pixel electrodes in the opening portions and a first contact assistant member in the first contact hole by removing the first photoresist layer and the conductor layer located thereon.
摘要翻译：一种制造薄膜晶体管阵列面板的方法，包括：在衬底上形成栅极线; 在栅极线上形成栅极绝缘层; 在所述栅极绝缘层上形成半导体层; 在半导体层上形成数据线和漏电极; 在数据线和漏电极上沉积钝化层; 形成第一光致抗蚀剂层，其包括比钝化层上的第一部分更薄的第一部分和第二部分; 通过使用第一光致抗蚀剂层作为掩模，形成通过蚀刻钝化层而暴露数据线的第一预接触孔; 去除第一光致抗蚀剂的第二部分; 通过使用第一光致抗蚀剂层的第一部分作为掩模，通过蚀刻钝化层来扩展第一预接触孔和开口部来形成第一接触孔; 沉积导体层; 以及通过去除位于其上的第一光致抗蚀剂层和导体层，在开口部分中形成像素电极和第一接触孔中的第一接触辅助部件。

3. 发明申请

US20050062046A1 Thin film array panel and manufacturing method thereof 有权
标题翻译：薄膜阵列面板及其制造方法
公开(公告)号：US20050062046A1
公开(公告)日：2005-03-24
申请号：US10902251
申请日：2004-07-29
申请人： Sung-Man Kim , Young-Goo Song , Hyang-Shik Kong , Dong-Hyun Ki , Seong-Young Lee , Joo-Ae Yoon , Jong-Woong Chang
发明人： Sung-Man Kim , Young-Goo Song , Hyang-Shik Kong , Dong-Hyun Ki , Seong-Young Lee , Joo-Ae Yoon , Jong-Woong Chang
IPC分类号： G02F1/1333 , G02F1/1345 , G02F1/1362 , G02F1/1368 , G09F9/30 , H01L21/77 , H01L21/84 , H01L27/01 , H01L27/12 , H01L27/32 , H01L29/45 , H01L29/49 , H01L29/22
CPC分类号： H01L27/016 , G02F1/13458 , G02F1/136227 , H01L27/12 , H01L27/1244 , H01L27/1248 , H01L27/1288 , H01L27/3244 , H01L29/456 , H01L29/4908
摘要： A thin film array panel is provided, which includes: a plurality of signal lines including contact parts for contact with an external device; a plurality of thin film transistors connected to the signal lines; an insulating layer formed on the signal lines and the thin film transistors; and a plurality of pixel electrodes formed on the insulating layer and connected to the thin film transistors, wherein the insulating layer includes a contact portion disposed on the contact parts of the signal lines and having a thickness smaller than other portions and the contact portion of the insulating layer includes an inclined portion having an inclination angle smaller than about 45 degrees.
摘要翻译：提供一种薄膜阵列面板，其包括：多条信号线，包括用于与外部装置接触的接触部分; 连接到信号线的多个薄膜晶体管; 形成在信号线和薄膜晶体管上的绝缘层; 以及形成在所述绝缘层上并连接到所述薄膜晶体管的多个像素电极，其中所述绝缘层包括设置在所述信号线的接触部分上并具有小于其它部分的厚度的接触部分，并且所述接触部分绝缘层包括具有小于约45度的倾斜角度的倾斜部分。

4. 发明授权

US07888678B2 Thin film array panel and manufacturing method thereof 有权
标题翻译：薄膜阵列面板及其制造方法
公开(公告)号：US07888678B2
公开(公告)日：2011-02-15
申请号：US12724843
申请日：2010-03-16
申请人： Sung-Man Kim , Young-Goo Song , Hyang-Shik Kong , Dong-Hyun Ki , Seong-Young Lee , Joo-Ae Yoon , Jong-Woong Chang
发明人： Sung-Man Kim , Young-Goo Song , Hyang-Shik Kong , Dong-Hyun Ki , Seong-Young Lee , Joo-Ae Yoon , Jong-Woong Chang
IPC分类号： H01L29/04
CPC分类号： H01L27/016 , G02F1/13458 , G02F1/136227 , H01L27/12 , H01L27/1244 , H01L27/1248 , H01L27/1288 , H01L27/3244 , H01L29/456 , H01L29/4908
摘要： A thin film array panel is provided, which includes: a plurality of signal lines including contact parts for contact with an external device; a plurality of thin film transistors connected to the signal lines; an insulating layer formed on the signal lines and the thin film transistors; and a plurality of pixel electrodes formed on the insulating layer and connected to the thin film transistors, wherein the insulating layer includes a contact portion disposed on the contact parts of the signal lines and having a thickness smaller than other portions and the contact portion of the insulating layer includes an inclined portion having an inclination angle smaller than about 45 degrees.
摘要翻译：提供一种薄膜阵列面板，其包括：多条信号线，包括用于与外部装置接触的接触部分; 连接到信号线的多个薄膜晶体管; 形成在信号线和薄膜晶体管上的绝缘层; 以及形成在所述绝缘层上并连接到所述薄膜晶体管的多个像素电极，其中所述绝缘层包括设置在所述信号线的接触部分上并具有小于其它部分的厚度的接触部分，并且所述接触部分绝缘层包括具有小于约45度的倾斜角度的倾斜部分。

5. 发明授权

US07732266B2 Thin film array panel and manufacturing method thereof 有权
标题翻译：薄膜阵列面板及其制造方法
公开(公告)号：US07732266B2
公开(公告)日：2010-06-08
申请号：US12172701
申请日：2008-07-14
申请人： Sung-Man Kim , Young-Goo Song , Hyang-Shik Kong , Dong-Hyun Ki , Seong-Young Lee , Joo-Ae Yoon , Jong-Woong Chang
发明人： Sung-Man Kim , Young-Goo Song , Hyang-Shik Kong , Dong-Hyun Ki , Seong-Young Lee , Joo-Ae Yoon , Jong-Woong Chang
IPC分类号： H01L21/00
CPC分类号： H01L27/016 , G02F1/13458 , G02F1/136227 , H01L27/12 , H01L27/1244 , H01L27/1248 , H01L27/1288 , H01L27/3244 , H01L29/456 , H01L29/4908
摘要： A thin film array panel is provided, which includes: a plurality of signal lines including contact parts for contact with an external device; a plurality of thin film transistors connected to the signal lines; an insulating layer formed on the signal lines and the thin film transistors; and a plurality of pixel electrodes formed on the insulating layer and connected to the thin film transistors, wherein the insulating layer includes a contact portion disposed on the contact parts of the signal lines and having a thickness smaller than other portions and the contact portion of the insulating layer includes an inclined portion having an inclination angle smaller than about 45 degrees.
摘要翻译：提供一种薄膜阵列面板，其包括：多条信号线，包括用于与外部装置接触的接触部分; 连接到信号线的多个薄膜晶体管; 形成在信号线和薄膜晶体管上的绝缘层; 以及形成在所述绝缘层上并连接到所述薄膜晶体管的多个像素电极，其中所述绝缘层包括设置在所述信号线的接触部分上并具有小于其它部分的厚度的接触部分，并且所述接触部分绝缘层包括具有小于约45度的倾斜角度的倾斜部分。

6. 发明申请

US20090014727A1 THIN FILM ARRAY PANEL AND MANUFACTURING METHOD THEREOF 有权
标题翻译：薄膜阵列及其制造方法
公开(公告)号：US20090014727A1
公开(公告)日：2009-01-15
申请号：US12172701
申请日：2008-07-14
申请人： Sung-Man Kim , Young-Goo Song , Hyang-Shik Kong , Dong-Hyun Ki , Seong-Young Lee , Joo-Ae Yoon , Jong-Woong Chang
发明人： Sung-Man Kim , Young-Goo Song , Hyang-Shik Kong , Dong-Hyun Ki , Seong-Young Lee , Joo-Ae Yoon , Jong-Woong Chang
IPC分类号： H01L29/04 , H01L21/336
CPC分类号： H01L27/016 , G02F1/13458 , G02F1/136227 , H01L27/12 , H01L27/1244 , H01L27/1248 , H01L27/1288 , H01L27/3244 , H01L29/456 , H01L29/4908
摘要： A thin film array panel is provided, which includes: a plurality of signal lines including contact parts for contact with an external device; a plurality of thin film transistors connected to the signal lines; an insulating layer formed on the signal lines and the thin film transistors; and a plurality of pixel electrodes formed on the insulating layer and connected to the thin film transistors, wherein the insulating layer includes a contact portion disposed on the contact parts of the signal lines and having a thickness smaller than other portions and the contact portion of the insulating layer includes an inclined portion having an inclination angle smaller than about 45 degrees.
摘要翻译：提供一种薄膜阵列面板，其包括：多条信号线，包括用于与外部装置接触的接触部分; 连接到信号线的多个薄膜晶体管; 形成在信号线和薄膜晶体管上的绝缘层; 以及形成在所述绝缘层上并连接到所述薄膜晶体管的多个像素电极，其中所述绝缘层包括设置在所述信号线的接触部分上并具有小于其它部分的厚度的接触部分，并且所述接触部分绝缘层包括具有小于约45度的倾斜角度的倾斜部分。

7. 发明申请

US20100171121A1 THIN FILM ARRAY PANEL AND MANUFACTURING METHOD THEREOF 有权
标题翻译：薄膜阵列及其制造方法
公开(公告)号：US20100171121A1
公开(公告)日：2010-07-08
申请号：US12724843
申请日：2010-03-16
申请人： Sung-Man Kim , Young-Goo Song , Hyang-Shik Kong , Dong-Hyun Ki , Seong-Young Lee , Joo-Ae Yoon , Jong-Woong Chang
发明人： Sung-Man Kim , Young-Goo Song , Hyang-Shik Kong , Dong-Hyun Ki , Seong-Young Lee , Joo-Ae Yoon , Jong-Woong Chang
IPC分类号： H01L33/08 , H01L33/16
CPC分类号： H01L27/016 , G02F1/13458 , G02F1/136227 , H01L27/12 , H01L27/1244 , H01L27/1248 , H01L27/1288 , H01L27/3244 , H01L29/456 , H01L29/4908
摘要： A thin film array panel is provided, which includes: a plurality of signal lines including contact parts for contact with an external device; a plurality of thin film transistors connected to the signal lines; an insulating layer formed on the signal lines and the thin film transistors; and a plurality of pixel electrodes formed on the insulating layer and connected to the thin film transistors, wherein the insulating layer includes a contact portion disposed on the contact parts of the signal lines and having a thickness smaller than other portions and the contact portion of the insulating layer includes an inclined portion having an inclination angle smaller than about 45 degrees.
摘要翻译：提供一种薄膜阵列面板，其包括：多条信号线，包括用于与外部装置接触的接触部分; 连接到信号线的多个薄膜晶体管; 形成在信号线和薄膜晶体管上的绝缘层; 以及形成在所述绝缘层上并连接到所述薄膜晶体管的多个像素电极，其中所述绝缘层包括设置在所述信号线的接触部分上并具有小于其它部分的厚度的接触部分，并且所述接触部分绝缘层包括具有小于约45度的倾斜角度的倾斜部分。

8. 发明授权

US07411216B2 Thin film array panel and manufacturing method thereof 有权
标题翻译：薄膜阵列面板及其制造方法
公开(公告)号：US07411216B2
公开(公告)日：2008-08-12
申请号：US10902251
申请日：2004-07-29
申请人： Sung-Man Kim , Young-Goo Song , Hyang-Shik Kong , Dong-Hyun Ki , Seong-Young Lee , Joo-Ae Yoon , Jong-Woong Chang
发明人： Sung-Man Kim , Young-Goo Song , Hyang-Shik Kong , Dong-Hyun Ki , Seong-Young Lee , Joo-Ae Yoon , Jong-Woong Chang
IPC分类号： H01L29/04
CPC分类号： H01L27/016 , G02F1/13458 , G02F1/136227 , H01L27/12 , H01L27/1244 , H01L27/1248 , H01L27/1288 , H01L27/3244 , H01L29/456 , H01L29/4908
摘要： A thin film array panel is provided, which includes: a plurality of signal lines including contact parts for contact with an external device; a plurality of thin film transistors connected to the signal lines; an insulating layer formed on the signal lines and the thin film transistors; and a plurality of pixel electrodes formed on the insulating layer and connected to the thin film transistors, wherein the insulating layer includes a contact portion disposed on the contact parts of the signal lines and having a thickness smaller than other portions and the contact portion of the insulating layer includes an inclined portion having an inclination angle smaller than about 45 degrees.
摘要翻译：提供一种薄膜阵列面板，其包括：多条信号线，包括用于与外部装置接触的接触部分; 连接到信号线的多个薄膜晶体管; 形成在信号线和薄膜晶体管上的绝缘层; 以及形成在所述绝缘层上并连接到所述薄膜晶体管的多个像素电极，其中所述绝缘层包括设置在所述信号线的接触部分上并具有小于其它部分的厚度的接触部分，并且所述接触部分绝缘层包括具有小于约45度的倾斜角度的倾斜部分。

你已经成功收藏专利！

检索式保存成功!

IPRDB

热门服务

关于我们

友情链接

联系方式