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    • 3. 发明申请
    • Method for fabricating low-defect-density changed orientation Si
    • 制造低缺陷密度变化取向Si的方法
    • US20060154429A1
    • 2006-07-13
    • US11031142
    • 2005-01-07
    • Joel de SouzaKeith FogelJohn OttDevendra SadanaKatherine Saenger
    • Joel de SouzaKeith FogelJohn OttDevendra SadanaKatherine Saenger
    • H01L21/336
    • H01L21/26506H01L21/2022
    • The present invention provides a method for forming low-defect density changed-orientation Si by amorphization/templated recrystallization (ATR) processes in which regions of Si having a first crystal orientation are amorphized by ion implantation and then recrystallized into the orientation of a template layer having a different orientation. More generally, the invention relates to the high temperature annealing conditions needed to eliminate the defects remaining in Si-containing single crystal semiconductor materials formed by ion-implant-induced amorphization and templated recrystallization from a layer whose orientation may be the same or different from the amorphous layer's original orientation. The key component of the inventive method is a thermal treatment for minutes to hours in the the temperature range 1250-1330° C. to remove the defects remaining after the initial recrystallization anneal. The invention also provides a low-defect density changed-orientation Si formed by ATR for use in hybrid orientation substrates.
    • 本发明提供一种通过非晶化/模板化再结晶(ATR)工艺形成低缺陷密度变化取向Si的方法,其中具有第一晶体取向的Si区域通过离子注入而非晶化,然后再结晶成模板层的取向 具有不同的方向。 更一般地,本发明涉及消除由离子注入诱导的非晶化形成的含Si单晶半导体材料中剩余的缺陷所需的高温退火条件和从取向可以相同或不同的层的模板化再结晶 非晶层的原始方向。 本发明方法的关键组分是在1250-1330℃的温度范围内进行数分钟至数小时的热处理,以去除在初始再结晶退火之后残留的缺陷。 本发明还提供了一种用于混合取向基板的ATR形成的低缺陷密度变化取向Si。
    • 9. 发明申请
    • METHOD FOR FABRICATING LOW-DEFECT-DENSITY CHANGED ORIENTATION Si
    • 用于制造低密度变化方位的方法Si
    • US20080057684A1
    • 2008-03-06
    • US11873928
    • 2007-10-17
    • Joel de SouzaKeith FogelJohn OttDevendra SadanaKatherine Saenger
    • Joel de SouzaKeith FogelJohn OttDevendra SadanaKatherine Saenger
    • H01L21/425
    • H01L21/26506H01L21/2022
    • The present invention provides a method for forming low-defect density changed-orientation Si by amorphization/templated recrystallization (ATR) processes in which regions of Si having a first crystal orientation are amorphized by ion implantation and then recrystallized into the orientation of a template layer having a different orientation. More generally, the invention relates to the high temperature annealing conditions needed to eliminate the defects remaining in Si-containing single crystal semiconductor materials formed by ion-implant-induced amorphization and templated recrystallization from a layer whose orientation may be the same or different from the amorphous layer's original orientation. The key component of the inventive method is a thermal treatment for minutes to hours in the the temperature range 1250-1330° C. to remove the defects remaining after the initial recrystallization anneal. The invention also provides a low-defect density changed-orientation Si formed by ATR for use in hybrid orientation substrates.
    • 本发明提供一种通过非晶化/模板化再结晶(ATR)工艺形成低缺陷密度变化取向Si的方法,其中具有第一晶体取向的Si区域通过离子注入而非晶化,然后再结晶成模板层的取向 具有不同的方向。 更一般地,本发明涉及消除由离子注入诱导的非晶化形成的含Si单晶半导体材料中剩余的缺陷所需的高温退火条件和从取向可以相同或不同的层的模板化再结晶 非晶层的原始方向。 本发明方法的关键组分是在1250-1330℃的温度范围内进行数分钟至数小时的热处理,以去除在初始再结晶退火之后残留的缺陷。 本发明还提供了一种用于混合取向基板的ATR形成的低缺陷密度变化取向Si。
    • 10. 发明申请
    • Quasi-hydrophobic Si-Si wafer bonding using hydrophilic Si surfaces and dissolution of interfacial bonding oxide
    • 使用亲水硅表面的准疏水Si-Si晶片结合和界面结合氧化物的溶解
    • US20060154442A1
    • 2006-07-13
    • US11031165
    • 2005-01-07
    • Joel de SouzaJohn OttAlexander ReznicekDevendra SadanaKatherine Saenger
    • Joel de SouzaJohn OttAlexander ReznicekDevendra SadanaKatherine Saenger
    • H01L21/46
    • H01L21/187H01L21/76251
    • The present invention provides a method for removing or reducing the thickness of ultrathin interfacial oxides remaining at Si—Si interfaces after silicon wafer bonding. In particular, the invention provides a method for removing ultrathin interfacial oxides remaining after hydrophilic Si—Si wafer bonding to create bonded Si—Si interfaces having properties comparable to those achieved with hydrophobic bonding. Interfacial oxide layers of order of about 2 to about 3 nm are dissolved away by high temperature annealing, for example, an anneal at 1300°-1330° C. for 1-5 hours. The inventive method is used to best advantage when the Si surfaces at the bonded interface have different surface orientations, for example, when a Si surface having a (100) orientation is bonded to a Si surface having a (110) orientation. In a more general aspect of the invention, the similar annealing processes may be used to remove undesired material disposed at a bonded interface of two silicon-containing semiconductor materials. The two silicon-containing semiconductor materials may be the same or different in surface crystal orientation, microstructure (single-crystal, polycrystalline, or amorphous), and composition.
    • 本发明提供一种在硅晶片接合之后去除或减少残留在Si-Si界面处的超薄界面氧化物的厚度的方法。 特别地,本发明提供了一种去除在亲水性Si-Si晶片接合之后残留的超薄界面氧化物以产生具有与通过疏水性接合实现的性能相当的特性的结合Si-Si界面的方法。 约2至约3nm的界面氧化物层通过高温退火(例如1300°-1330℃退火1-5小时)被溶解掉。 当粘合界面处的Si表面具有不同的表面取向时,例如当具有(100)取向的Si表面被结合到具有(110)取向的Si表面时,本发明的方法被用于最好的优点。 在本发明的更一般的方面中,类似的退火工艺可用于去除设置在两个含硅半导体材料的键合界面处的不期望的材料。 两种含硅半导体材料在表面晶体取向,微结构(单晶,多晶或无定形)和组成上可以相同或不同。