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    • 2. 发明授权
    • Method for replicating periodic nonlinear coefficient patterning during
and after growth of epitaxial ferroelectric oxide films
    • 在外延铁电氧化膜生长期间和之后复制周期性非线性系数图案的方法
    • US5654229A
    • 1997-08-05
    • US430005
    • 1995-04-26
    • Florence E. LeplingardJohn J. KingstonRoss D. BringansDavid K. ForkRobert G. WaartsDavid F. WelchRandall S. Geels
    • Florence E. LeplingardJohn J. KingstonRoss D. BringansDavid K. ForkRobert G. WaartsDavid F. WelchRandall S. Geels
    • G02F1/37G02F1/355H01S3/109H01L21/20
    • G02F1/3558Y10S117/918
    • A method for providing an nonlinear, frequency converting optical QPM waveguide device by growing a first ferroelectric oxide film or layer on a second ferroelectric layer or medium wherein, in first and second embodiments, respectively, the second layer is initially provided with a periodic nonlinear coefficient pattern or a periodic pattern comprising a seed layer. During the growth of the first layer, the periodic pattern formed in the second layer, is replicated, transformed or induced into the first layer resulting in a plurality of substantially rectangular prismatic-shaped domains in the first layer having the periodic nonlinear coefficient pattern status based upon the periodic patterning of the second layer. In a third embodiment, the periodic nonlinear coefficient pattern may be introduced into the first layer after completion of its growth, and the periodic nonlinear coefficient pattern status of the first layer, at the interface between the first and second layers, is transposed or migrated into the second layer forming a plurality of substantially rectangular prismatic-shaped domains in the second layer having the periodic nonlinear coefficient pattern status of the first layer. In the first and second embodiments, the optical QPM waveguide is the first layer and in the third embodiment, the optical QPM waveguide is the second layer.
    • 一种用于通过在第二铁电层或介质上生长第一铁电氧化物膜或层的非线性频率转换光QPM波导器件的方法,其中在第一和第二实施例中,第二层分别开始提供周期性非线性系数 图案或包括种子层的周期性图案。 在第一层的生长期间,形成在第二层中的周期性图案被复制,变换或诱导成第一层,从而在第一层中形成多个具有基于周期性非线性系数模式状态的基本上矩形的棱柱形结构域 在第二层的周期性图案化时。 在第三实施例中,周期性非线性系数模式可以在其生长完成之后被引入第一层,并且第一层和第二层之间的界面处的第一层的周期性非线性系数模式状态被转置或迁移 所述第二层在所述第二层中形成具有所述第一层的周期性非线性系数图案状态的多个基本上矩形的棱柱形域。 在第一和第二实施例中,光QPM波导是第一层,在第三实施例中,光QPM波导是第二层。