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    • 1. 发明授权
    • Wafer support structure for a wafer backplane with a curved surface
    • 具有弯曲表面的晶片背板的晶片支撑结构
    • US5804042A
    • 1998-09-08
    • US488063
    • 1995-06-07
    • John FerreiraTatsuo OnozakiHiroichi Ishikawa
    • John FerreiraTatsuo OnozakiHiroichi Ishikawa
    • C23C14/50C23C16/458C30B25/12C30B31/14H01L21/687C23C14/34
    • H01L21/68721C23C14/50C23C16/4585C30B25/12C30B31/14H01L21/68728H01L21/6875
    • The wafer support structure is used with a movable backplane having a curved upper surface which is moved between a wafer access position and a wafer process position to clamp a wafer against a clamping structure during processing. A guide ring surrounds the backplane and a floating ring is spring-mounted on the guide ring by flat, elongated lift springs. RF bias springs are positioned on top of the floating ring along with wafer support pins which support a wafer above the curved backplane surface. When the backplane is moved toward the clamping structure to clamp the wafer, the RF bias springs make electrical contact with a portion of the clamping structure, and the clamping structure acts against the floating ring to flex the lift springs and lower the floating ring such that the wafer is transferred to the backplane surface to be clamped against the clamping structure. When the wafer is clamped, the support pins are out of contact with the wafer. The wafer is stably supported by the support pins over the backplane surface during access of the wafer and is securely clamped between the backplane and clamping structure away from the wafer support during processing of the wafer. A filler ring around the backplane reduces formation of a secondary plasma.
    • 晶片支撑结构与具有弯曲上表面的可移动背板一起使用,其可在晶片访问位置和晶片工艺位置之间移动,以在处理期间将晶片夹紧在夹持结构上。 引导环围绕背板,并且浮动环通过平坦的细长提升弹簧弹簧安装在引导环上。 RF偏置弹簧与支撑在弯曲背板表面上方的晶片的晶片支撑销一起位于浮动环的顶部。 当背板朝向夹持结构移动以夹紧晶片时,RF偏置弹簧与夹持结构的一部分电接触,并且夹紧结构抵抗浮环以弹性升降弹簧并降低浮环,使得 将晶片转移到背板表面以夹紧夹紧结构。 当晶片被夹紧时,支撑销与晶片脱离接触。 在晶片访问期间,晶片被支撑销稳定地支撑在背板表面上,并且在晶片的处理期间被牢固地夹紧在背板和夹紧结构之间远离晶片支撑。 背板周围的填充环减少二次等离子体的形成。
    • 5. 发明申请
    • Nightlight, led power supply circuit, and combination thereof
    • 夜灯,LED电源电路及其组合
    • US20070002570A1
    • 2007-01-04
    • US10519782
    • 2003-07-01
    • Michael SouzaWilson BrunkhurstJohn FerreiraAnthony PacittoJenkin HuaJoseph DiorioMehmet Tanacan
    • Michael SouzaWilson BrunkhurstJohn FerreiraAnthony PacittoJenkin HuaJoseph DiorioMehmet Tanacan
    • F21V19/02
    • H01R24/68F21S8/035F21V14/06F21V15/01F21V17/02F21V23/0442F21Y2115/10H01R13/6658H01R33/09H01R35/04H01R2103/00
    • In one embodiment, the present invention pertains to a night light assembly which plugs directly into an electrical wall receptacle to provide a beam of light that can be directed along different paths. The assembly comprises a housing having a plug with projecting blade contacts for insertion into a wall receptacle and a light sensor for automatically controlling the activation and de-activation of the lamp of the nightlight. A cover member rotatably supported by the housing includes a lens, a low wattage lamp, a support member, and a lamp retaining member. The low wattage lamp in the cover assembly is coupled, via sliding contacts, to the blade contacts in the base housing. This arrangement allows the cover and the lamp to be rotated as a unit relative to the base housing without limitation. The lamp retaining member is non-rotatably coupled to the cover and is rotatably engaged by a retaining member fixed to the housing member. The longitudinal axis of the low wattage lamp located in the lamp retaining member is aligned along the rotational axis of the lens in the cover to permit both direct and reflected light to pass through the lens in the cover without being obstructed by the base of the lamp. The disclosed assemblage is a new improved nightlight of simple design which provides increased light and can be manufactured and sold at relatively low cost. The low wattage lamp used in the nightlight can be either an incandescent bulb or a light emitting diode (LED) such as an ultrabright white LED either as a single bulb or a cluster of 2 or more bulbs. A photo sensitive circuit can be provided to automatically energize the incandescent bulb or the LED during low light conditions. When an LED is use as the light source, the LED is energized by a new improved power supply that is both simple in design and more efficient in operation than the standard power supply circuit used for LED's.
    • 在一个实施例中,本发明涉及一种夜灯组件,其直接插入电壁插座以提供可沿不同路径引导的光束。 组件包括具有插头的壳体,该插头具有用于插入壁插座的突出的叶片触点和用于自动控制夜灯灯的激活和去激活的光传感器。 由壳体可旋转地支撑的盖构件包括透镜,低瓦数灯,支撑构件和灯保持构件。 盖组件中的低功率灯通过滑动触点联接到基座壳体中的叶片触点。 这种布置允许盖和灯相对于基座旋转作为一个单元而不受限制。 灯保持构件不可旋转地联接到盖并且通过固定到壳体构件的保持构件可旋转地接合。 位于灯保持构件中的低瓦数灯的纵向轴线沿着盖中的透镜的旋转轴线对准,以允许直接和反射光通过盖中的透镜而不被灯的基座遮挡 。 所公开的组合是简单设计的新的改进的夜灯,其提供增加的光并且可以以相对低的成本制造和销售。 在夜灯中使用的低瓦数灯可以是白炽灯泡或发光二极管(LED),例如超亮白色LED,作为单个灯泡或2个或更多个灯泡的群集。 可以提供光敏电路以在低光条件下自动激发白炽灯泡或LED。 当使用LED作为光源时,LED通过与LED使用的标准电源电路相比设计简单,操作更有效的新型改进电源供电。