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1. 发明申请

US20090219686A1 GAS EJECTOR, ELECTRONIC DEVICE, AND GAS-EJECTING METHOD 失效
标题翻译：气体喷射器，电子装置和气体喷射方法
公开(公告)号：US20090219686A1
公开(公告)日：2009-09-03
申请号：US10595975
申请日：2005-02-02
申请人： Hiroichi Ishikawa , Tomoharu Mukasa
发明人： Hiroichi Ishikawa , Tomoharu Mukasa
IPC分类号： H05K7/20 , F28D21/00
CPC分类号： H05K7/20172 , F04F7/00 , H01L23/467 , H01L2924/0002 , H01L2924/00
摘要： A gas ejector capable of effectively dissipating heat generated from a heater while inhibiting noise generation as little as possible, an electronic device equipped with the gas ejector, and a gas-ejecting method are offered. A gas ejector (1) according to the present invention includes a vibrator (25) and ejects gas in a form of a pulsating flow such that vibration of the vibrator allows sound waves respectively generated upon ejection of the gas ejected from nozzles (23) and (24) to deaden out each other. Also, a control section (20) optimizes the frequency of the vibrator (25), hence, by increasing the gas ejection quantity as much as possible while inhibiting noise generation, heat of a heater is effectively dissipated.
摘要翻译：一种气体喷射器，其能够有效地散发由加热器产生的热量，同时抑制尽可能少的噪声产生，配备有气体喷射器的电子设备和气体喷射方法。根据本发明的气体喷射器（1）包括振动器（25）并且以脉动流的形式喷射气体，使得振动器的振动允许分别在从喷嘴（23）和（24）相互锁定。此外，控制部（20）优化振动器（25）的频率，因此通过在抑制噪声产生的同时尽可能地增加气体喷射量，有效地消散加热器的热量。

2. 发明授权

US06248448B1 Anti-reflection film 有权
标题翻译：防反射膜
公开(公告)号：US06248448B1
公开(公告)日：2001-06-19
申请号：US09283795
申请日：1999-04-01
申请人： Barret Lippey , Hiroichi Ishikawa
发明人： Barret Lippey , Hiroichi Ishikawa
IPC分类号： B32B1706
CPC分类号： G02B1/113 , Y10T428/31786 , Y10T428/31855
摘要： An anti-reflection film having high electrical conductivity and high anti-reflection effect over a wide frequency range despite its simplified structure. The anti-reflection film has two mutually neighboring layers which are deposited directly or via a hard coating layer on a supporting layer. A first layer of the layers that is closer to a supporting layer is formed of an electrically conductive material capable of absorbing light, while the remaining second layer is formed of a material having a refractive index not higher than 2.0. If the first layer has the refractive index and the extinction coefficient for a shorter wavelength &lgr;v of n v and k,v respectively, and the refractive index and the extinction coefficient for a longer wavelength &lgr;r of nr and kr, respectively, nv is larger than nr and kv is smaller than kr (nv>nr and kv
摘要翻译：尽管其结构简单，但是在宽频率范围内具有高导电性和高抗反射效果的抗反射膜。抗反射膜具有两个彼此相邻的层，它们直接或通过支撑层上的硬涂层沉积。更靠近支撑层的层的第一层由能够吸收光的导电材料形成，而剩余的第二层由折射率不高于2.0的材料形成。如果第一层分别具有nv和k，v的较短波长lambdv的折射率和消光系数，并且nr和kr的较长波长lambdr的折射率和消光系数分别大于nr 并且kv小于kr（nv> nr和kv

3. 发明授权

US08325477B2 Vibrating device, jet flow generating device, electronic device, and manufacturing method of vibrating device 失效
标题翻译：振动装置，喷流发生装置，电子装置及振动装置的制造方法
公开(公告)号：US08325477B2
公开(公告)日：2012-12-04
申请号：US11911179
申请日：2006-02-27
申请人： Hiroichi Ishikawa , Norikazu Nakayama , Takuya Makino , Tomoharu Mukasa , Hiroyuki Ryoson
发明人： Hiroichi Ishikawa , Norikazu Nakayama , Takuya Makino , Tomoharu Mukasa , Hiroyuki Ryoson
IPC分类号： G06F1/20
CPC分类号： G06F1/203 , F04F7/00 , H01L2924/0002 , H05K7/20172 , Y10T29/49002 , H01L2924/00
摘要： Provided is a vibrating device which can generate efficient vibrations in a vibrating member and efficiently apply vibrations to a gas, a jet flow generating device in which the vibrating device has been implemented, and an electronic device in which the jet flow generating device has been implemented. A jet flow generating device 10 has a vibrating device 15 including a frame 4, and actuator 5 mounted on the frame 4, and a vibrating member 3 supported on the frame 4 by an elastic supporting member 6. The vibrating member 3 has a side plate 3b formed on the perimeter portion of a disc-shaped vibrating plate 3a, for example. Vibration of the vibrating member 3 applies vibrations to air within chambers 11a and 11b, whereby gas can alternatingly be blown from nozzles 2a and 2b.
摘要翻译：提供一种能够在振动部件中产生有效的振动并且有效地对气体施加振动的振动装置，已经实现了振动装置的喷流产生装置以及已经实现了喷射流产生装置的电子装置。喷射流产生装置10具有包括框架4的振动装置15和安装在框架4上的致动器5以及通过弹性支撑构件6支撑在框架4上的振动构件3.振动构件3具有侧板 3b形成在盘状振动板3a的周边部分上。振动构件3的振动对室11a和11b内的空气施加振动，从而可以从喷嘴2a和2b交替地吹送气体。

4. 发明授权

US08033324B2 Jet flow generating apparatus, electronic apparatus, and jet flow generating method 失效
标题翻译：射流生成装置，电子装置和喷流生成方法
公开(公告)号：US08033324B2
公开(公告)日：2011-10-11
申请号：US10982283
申请日：2004-11-03
申请人： Tomoharu Mukasa , Kazuhito Hori , Hiroichi Ishikawa , Kanji Yokomizo , Norikazu Nakayama
发明人： Tomoharu Mukasa , Kazuhito Hori , Hiroichi Ishikawa , Kanji Yokomizo , Norikazu Nakayama
IPC分类号： F28F7/00 , H05K5/00
CPC分类号： F04F7/00 , F04D33/00
摘要： A jet flow generating apparatus that suppresses noise as much as possible and effectively radiates the heat generated by a heat generating member, an electronic device that is equipped with the jet flow generating apparatus, and a jet flow generating method are provided. According to the present invention, a jet flow generating apparatus comprises a plurality of chambers each having an opening and each containing a coolant, a vibrating mechanism for vibrating the coolant contained in each of the plurality of chambers so as to discharge the coolant as a pulsating flow through the openings, and a control unit for controlling the vibration of the vibrating mechanism so that the sound waves generated by the coolant discharged from the plurality of chambers weaken each other.
摘要翻译：一种喷射流产生装置，其能够尽可能地抑制噪声，并有效地散发由发热部件产生的热量，配备有喷射流产生装置的电子装置以及喷流生成方法。根据本发明，喷射流产生装置包括多个室，每个室具有开口并且各自包含冷却剂;振动机构，用于振动包含在多个室中的每个室中的冷却剂，以便将冷却剂作为脉动排出流过开口的控制单元，以及用于控制振动机构的振动的控制单元，使得由多个室排出的冷却剂产生的声波彼此相互相互抵消。

5. 发明授权

US07793709B2 Jet generating device and electronic apparatus 有权
标题翻译：喷气发生装置和电子装置
公开(公告)号：US07793709B2
公开(公告)日：2010-09-14
申请号：US11379508
申请日：2006-04-20
申请人： Tomoharu Mukasa , Kazuhito Hori , Hiroichi Ishikawa , Kanji Yokomizo , Takuya Makino , Norikazu Nakayama
发明人： Tomoharu Mukasa , Kazuhito Hori , Hiroichi Ishikawa , Kanji Yokomizo , Takuya Makino , Norikazu Nakayama
IPC分类号： F24H3/06
CPC分类号： H02K33/18 , H01L2924/0002 , H01L2924/00
摘要： A jet generating device includes a vibrating member which vibrates gas, a driving unit which drives the vibrating member, and a housing which has a first opening and a first chamber connected to the first opening and containing the gas. The housing supports the vibrating member, and is such that, of sounds generated as a result of vibrating the vibrating member, the sound having a maximum noise level has a predetermined frequency. In addition, the housing discharges the gas as pulsating gas through the first opening as a result of driving the vibrating member.
摘要翻译：喷射发生装置包括振动气体的振动部件，驱动振动部件的驱动部，以及具有与第一开口连接并容纳气体的第一开口和第一室的壳体。壳体支撑振动构件，并且使得由于振动构件振动而产生的声音，具有最大噪声电平的声音具有预定频率。此外，作为驱动振动部件的结果，壳体通过第一开口将气体作为脉动气体排出。

6. 发明授权

US5352248A Pyrometer temperature measurement of plural wafers stacked on a processing chamber 失效
标题翻译：堆叠在处理室上的多个晶片的高温计温度测量
公开(公告)号：US5352248A
公开(公告)日：1994-10-04
申请号：US869465
申请日：1992-04-15
申请人： Hiroichi Ishikawa , Michael S. Kolesa
发明人： Hiroichi Ishikawa , Michael S. Kolesa
IPC分类号： H01L21/205 , G01J5/00 , G01J5/04 , G01J5/08 , H01L21/00 , H01L21/02 , H01L21/302 , H01L21/3065 , H01L21/677 , H01L21/306
CPC分类号： H01L21/67115 , G01J5/0003 , G01J5/0007 , G01J5/02 , G01J5/0275 , G01J5/08 , G01J5/089 , H01L21/67167 , H01L21/67184 , H01L21/6719 , H01L21/67248 , Y10S414/139 , Y10S438/908 , Y10T29/41
摘要： A method of measuring and controlling the temperature of articles stacked in parallel in a chamber. A pyrometer is positioned outside of a chamber and directed, either directly or with mirrors, through a window in the chamber wall so that only energy from wafers removed from the ends of the stack is received by the pyrometer. The pyrometer is inclined at an angle so that substantially all energy from the opposite side of the stack and reflected through spaces between facing parallel pairs of wafer surfaces will have been reflected a large number of times by the wafers before entering the pyrometer. Thus, regardless of the emissivity or transmissivity of the wafers, the energy incident upon the pyrometer will approach that emitted by a black body of the same temperature as the wafers, and the temperature read by the pyrometer will be independent of the emissivity or transmissivity of the wafers.
摘要翻译：一种测量和控制在室中平行堆叠的物品的温度的方法。高温计位于腔室的外部，直接或通过反射镜通过腔室壁中的窗口引导，使得仅从堆叠端部移除的晶片的能量被高温计接收。高温计以一定的角度倾斜，使得来自堆叠的相对侧的基本上所有的能量并且通过在进入高温计之前被晶片反射大量的晶片表面之间的空间的反射。因此，无论晶片的发射率或透射率如何，入射到高温计上的能量将接近与晶片相同温度的黑体发射的能量，并且由高温计读取的温度将与发射率或透射率无关晶圆。

7. 发明授权

US5259881A Wafer processing cluster tool batch preheating and degassing apparatus 失效
标题翻译：晶圆处理集群工具批量预热和脱气装置
公开(公告)号：US5259881A
公开(公告)日：1993-11-09
申请号：US701800
申请日：1991-05-17
申请人： Richard C. Edwards , Michael S. Kolesa , Hiroichi Ishikawa
发明人： Richard C. Edwards , Michael S. Kolesa , Hiroichi Ishikawa
IPC分类号： H01L21/205 , G01J5/00 , G01J5/04 , G01J5/08 , H01L21/00 , H01L21/02 , H01L21/302 , H01L21/3065 , H01L21/677 , C23C16/00
CPC分类号： H01L21/67115 , G01J5/0003 , G01J5/0007 , G01J5/02 , G01J5/0275 , G01J5/08 , G01J5/089 , H01L21/67167 , H01L21/67184 , H01L21/6719 , H01L21/67248 , Y10S414/139 , Y10S438/908 , Y10T29/41
摘要： A wafer processing cluster tool, having one or more load-locks, is provided with one or more batch preheating modules that receive wafers only from the cluster tool transport module at the internal vacuum pressure of the machine. The loading, unloading, handling and processing of wafers in the machine can occur while other wafers are being preheated. The preheat module has a vertically moveable rack and is loaded with various sized batches of wafers with no vacant positions between them. Wafer shaped shields may occupy positions adjacent top and bottom wafers to cause them to heat the same as other wafers in the rack. Infrared lamps positioned outside of quartz windows heat wafers in the preheat module. The rack may rotate to improve heating uniformity. Temperature sensors, such as pyrometers, that do not contact the wafers being preheated, measure temperature for control of the heating of the lamps.
摘要翻译：具有一个或多个负载锁定的晶片处理集群工具设置有一个或多个批量预热模块，其仅在机器的内部真空压力下从集群工具传送模块接收晶片。当其他晶片被预热时，可能会发生机器中晶片的装载，卸载，处理和处理。预热模块具有可垂直移动的支架，并且装载有各种尺寸的批量的晶片，它们之间没有空置位置。晶圆形屏蔽件可能占据与顶部和底部晶片相邻的位置，以使它们与机架中的其它晶片相同。位于石英窗外部的红外灯在预热模块中加热晶片。机架可旋转以提高加热均匀性。温度传感器，例如高温计，不接触被预热的晶片，测量温度以控制灯的加热。

8. 发明申请

US20120140414A1 VIBRATING DEVICE, JET FLOW GENERATING DEVICE, ELECTRONIC DEVICE, AND MANUFACTURING METHOD OF VIBRATING DEVICE 审中-公开
标题翻译：振动装置，喷射流产生装置，电子装置和振动装置的制造方法
公开(公告)号：US20120140414A1
公开(公告)日：2012-06-07
申请号：US13369003
申请日：2012-02-08
申请人： Hiroichi Ishikawa , Norikazu Nakayama , Takuya Makino , Tomoharu Mukasa , Hiroyuki Ryoson
发明人： Hiroichi Ishikawa , Norikazu Nakayama , Takuya Makino , Tomoharu Mukasa , Hiroyuki Ryoson
IPC分类号： H05K7/20 , F04F5/16 , H01L41/053 , F04B17/00 , H02K33/00 , H02K7/065
CPC分类号： G06F1/203 , F04F7/00 , H01L2924/0002 , H05K7/20172 , Y10T29/49002 , H01L2924/00
摘要： Provided is a vibrating device which can generate efficient vibrations in a vibrating member and efficiently apply vibrations to a gas, a jet flow generating device in which the vibrating device has been implemented, and an electronic device in which the jet flow generating device has been implemented. A jet flow generating device 10 has a vibrating device 15 including a frame 4, and actuator 5 mounted on the frame 4, and a vibrating member 3 supported on the frame 4 by an elastic supporting member 6. The vibrating member 3 has a side plate 3b formed on the perimeter portion of a disc-shaped vibrating plate 3a, for example. Vibration of the vibrating member 3 applies vibrations to air within chambers 11a and 11b, whereby gas can alternatingly be blown from nozzles 2a and 2b.
摘要翻译：提供一种能够在振动部件中产生有效的振动并且有效地对气体施加振动的振动装置，已经实现了振动装置的喷流产生装置，以及已经实现了喷射流产生装置的电子装置。喷射流产生装置10具有包括框架4的振动装置15和安装在框架4上的致动器5以及通过弹性支撑构件6支撑在框架4上的振动构件3.振动构件3具有侧板 3b形成在盘状振动板3a的周边部分上。振动构件3的振动对室11a和11b内的空气施加振动，从而可以从喷嘴2a和2b交替地吹送气体。

9. 发明申请

US20090262500A1 COOLING DEVICE, HEAT SINK, AND ELECTRONIC APPARATUS 审中-公开
标题翻译：冷却装置，散热器和电子装置
公开(公告)号：US20090262500A1
公开(公告)日：2009-10-22
申请号：US11912538
申请日：2006-04-04
申请人： Takuya Makino , Hiroshi Takino , Kazuhito Hori , Hiroichi Ishikawa
发明人： Takuya Makino , Hiroshi Takino , Kazuhito Hori , Hiroichi Ishikawa
IPC分类号： H05K7/20 , F28F7/00 , F28D21/00
CPC分类号： H01L23/4735 , F28D15/0266 , F28D2021/0029 , F28F1/32 , F28F3/02 , F28F2265/28 , H01L23/3672 , H01L2924/0002 , H01L2924/00
摘要： There are provided a cooling device and a heat sink that can effectively radiate heat generated by a heat source while reducing the volume of discharged gas to avoid noise, and an electronic apparatus in which the cooling device and the heat sink are mounted. A heat sink 3 includes cutouts 24a and 24b through which air serving as gas can be taken in from the outside and which are provided on a side where air discharged from first and second nozzles 6 and 7 serving as openings of a jet generating mechanism 2 is received. Therefore, the pressure near the cutouts is decreased by air flow discharged from the first and second nozzles 6 and 7, and outside air is taken in through the cutouts 24a and 24b. Consequently, more gas than gas discharged from the first and second nozzles 6 and 7 is discharged from an outlet of the heat sink. This can minimize the volume of jetted gas to avoid noise, and effectively radiate heat generated by a heat source.
摘要翻译：提供了一种冷却装置和散热器，其能够有效地辐射由热源产生的热量，同时减少排出的气体的体积以避免噪音;以及电子设备，其中安装有冷却装置和散热器。散热器3包括切口24a和24b，通过该切口24a和24b，可以从外部吸入用作气体的空气，并且设置在从用作喷气发生机构2的开口的第一和第二喷嘴6和7排出的空气的一侧收到了因此，通过从第一和第二喷嘴6和7排出的空气流，切口附近的压力减小，并且外部空气通过切口24a和24b被吸入。因此，比从第一和第二喷嘴6和7排出的气体多的气体从散热器的出口排出。这样可以最大程度地减少喷射气体的体积，以避免噪音，并有效地辐射热源产生的热量。

10. 发明授权

US07012734B2 Optical multilayer structure, optical switching device, and image display 失效
公开(公告)号：US07012734B2
公开(公告)日：2006-03-14
申请号：US11136069
申请日：2005-05-24
申请人： Hiroichi Ishikawa
发明人： Hiroichi Ishikawa
IPC分类号： G02F1/03 , G02B6/26
CPC分类号： G02B6/3524 , G02B5/284 , G02B5/285 , G02B5/286 , G02B6/3512 , G02B6/3544 , G02B6/355 , G02B6/3572 , G02B6/3584 , G02B6/3594 , G02B26/001
摘要： An optical multilayer structure has a substrate, a light-absorbing first layer in contact with the substrate, a gap portion having a changeable size capable of causing an optical interference phenomenon, and a second layer. By changing the size of the gap portion, an amount of reflection, transmission, or absorption of incident light can be changed. For example, the substrate is made of carbon (C), the first layer is made of tantalum (Ta), and the second layer is made of silicon nitride (Si3N4). Also in a visible light area, high response is realized. Consequently, the optical multilayer structure can be suitably used for an image display. The optical multilayer structure may be obtained by stacking, on a substrate made of a metal such as chromium (Cr), a first transparent layer made of a material having a high refractive index such as TiO2 (n=2.40), a second transparent layer made of a material having a low refractive index such as MgF2 (n=1.38), a gap portion having a changeable size capable of causing an optical interference phenomenon, and a third transparent layer made of a material having a high refractive index such as TiO2.

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