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1. 发明授权

US06280579B1 Target misalignment detector 失效
标题翻译：目标未对准检测器
公开(公告)号：US06280579B1
公开(公告)日：2001-08-28
申请号：US09123507
申请日：1998-07-28
申请人： Seh Kwang Lee , John Egermeier
发明人： Seh Kwang Lee , John Egermeier
IPC分类号： C23C1434
CPC分类号： H01J37/3414 , C23C14/3407 , C23C14/564 , H01J37/3405
摘要： A method and apparatus for detecting target misalignment and plasma instability in a sputtering chamber in a semiconductor fabrication system is provided. In certain embodiments, a detector is utilized to monitor the voltage of the power applied to bias the target. If the voltage fluctuates excessively, plasma instability and target misalignment is indicated.
摘要翻译：提供了一种用于检测半导体制造系统中的溅射室中的目标不对准和等离子体不稳定性的方法和装置。在某些实施例中，使用检测器来监测施加以偏置目标的功率的电压。如果电压波动过大，则表示等离子体不稳定和目标未对准。

2. 发明申请

US20060196274A1 Method and apparatus for the detection of high pressure conditions in a vacuum-type electrical device 有权
标题翻译：用于在真空型电气装置中检测高压条件的方法和装置
公开(公告)号：US20060196274A1
公开(公告)日：2006-09-07
申请号：US11305081
申请日：2005-12-16
申请人： John Egermeier , Rod Mosely , Steve Randazzo , Bryce Sollazzi
发明人： John Egermeier , Rod Mosely , Steve Randazzo , Bryce Sollazzi
IPC分类号： G01L7/06
CPC分类号： H01H33/668 , H01H2033/306
摘要： A method for detecting a high pressure condition within a high voltage vacuum device includes detecting the position of a movable structure such as a bellows or flexible diaphragm. The position at high pressures can be detected optically by the interruption or reflection of light beams, or electrically by sensing contact closure or deflection via strain gauges. Electrical sensing is provided by microcircuits that are operated at high voltage device potentials, transmitting pressure information via RF or optical signals.
摘要翻译：用于检测高压真空装置内的高压状态的方法包括检测诸如波纹管或柔性隔膜的可移动结构的位置。可以通过光束的中断或反射来光学地检测高压位置，或通过应变计感测接触闭合或偏转来电检测位置。电气感应由在高电压器件电位下运行的微电路提供，通过RF或光信号传输压力信息。

3. 发明授权

US06223540B1 Gas processing techniques 有权
标题翻译：气体处理技术
公开(公告)号：US06223540B1
公开(公告)日：2001-05-01
申请号：US09340064
申请日：1999-06-25
申请人： John Egermeier
发明人： John Egermeier
IPC分类号： B01D800
CPC分类号： B01D53/002 , B01D8/00
摘要： The present invention provides techniques for processing effluent gases from vacuum fabrication processes. The effluent gases are condensed on cold surfaces (512 and 514) inside a novel pump (220) resulting in a high vacuum. The pump (220) can be connected to a vacuum fabrication processing chamber (210) and to a turbo molecular pump (275). The condensate which is formed on the cold surfaces of the pump (220) is subsequently evaporated to form regenerated gases during the regeneration of the pump. A pressure vessel (280) is removably connected to the pump during regeneration, causing the regenerated gases to fill the pump and the pressure vessel at pressures ranging from about 10,343 torr (200 psi) to about 103,430 torr ( 2,000 psi). The pressure vessel is closed when substantially all condensate has evaporated. The vessel containing regenerated gases can then be connected to an on-site or to a remote gas treatment facility for removal of noxious substances. In an additional embodiment, an effluent gas processing system (610) is provided, including a controller (600) which is adapted for interacting with a plurality of unit operations (620, 622, 624, 626 and 628) of the novel gas processing techniques.
摘要翻译：本发明提供了用于处理来自真空制造工艺的流出气体的技术。废气在新型泵（220）内的冷表面（512和514）上冷凝，导致高真空。泵（220）可以连接到真空制造处理室（210）和涡轮分子泵（275）。在泵的再生期间，形成在泵（220）的冷表面上的冷凝物随后被蒸发以形成再生气体。在再生期间，压力容器（280）可移除地连接到泵，导致再生气体以约10333托（200psi）至约103,430托（2,000psi）的压力填充泵和压力容器。当基本上所有的冷凝物蒸发时，压力容器关闭。然后可以将含有再生气体的容器连接到现场或远程气体处理设备以除去有害物质。在另外的实施例中，提供了一种流出气体处理系统（610），其包括适于与新颖的气体处理技术的多个单元操作（620,622,624,626和628）相互作用的控制器（600）。

4. 发明申请

US20050258342A1 Method and apparatus for the detection of high pressure conditions in a vacuum switching device 有权
标题翻译：用于在真空开关装置中检测高压条件的方法和装置
公开(公告)号：US20050258342A1
公开(公告)日：2005-11-24
申请号：US10848874
申请日：2004-05-18
申请人： John Egermeier , Steven Randazzo
发明人： John Egermeier , Steven Randazzo
IPC分类号： H01H33/668 , H01M2/00
CPC分类号： H01H33/668
摘要： A method for detecting a high pressure condition within an interrupter includes measuring the intensity of light emitted from an arc created by contacts within the interrupter, comparing the measured intensity with a predetermined value, and providing an indication when the measured intensity exceeds the predetermined value.
摘要翻译：用于检测断续器内的高压条件的方法包括测量从断续器内的触点产生的电弧发射的光的强度，将测量的强度与预定值进行比较，以及当测量的强度超过预定值时提供指示。

5. 发明授权

US06358810B1 Method for superior step coverage and interface control for high K dielectric capacitors and related electrodes 失效
标题翻译：用于高K介质电容器和相关电极的优越的步距覆盖和接口控制的方法
公开(公告)号：US06358810B1
公开(公告)日：2002-03-19
申请号：US09123690
申请日：1998-07-28
申请人： Charles Dornfest , John Egermeier , Nitin Khurana
发明人： Charles Dornfest , John Egermeier , Nitin Khurana
IPC分类号： H01L2120
CPC分类号： H01L28/55 , H01L28/60
摘要： The present invention provides a multi-layer semiconductor memory device comprising: a bottom electrode having a bottom layer, an upper interface layer and an intermediate tuning layer disposed between the bottom layer and the upper interface layer; a top electrode; and a high dielectric constant dielectric layer disposed between the bottom electrode and the top electrode. The present invention further provides an apparatus and a method for manufacturing high density DRAMs having capacitors having high quality HDC materials and low leakage currents. Another aspect of the present invention provides an electrode-dielectric interface that nucleates high quality HDC films. The present invention further provides an apparatus and a method for manufacturing capacitors within a high aspect ratio aperture.
摘要翻译：本发明提供一种多层半导体存储器件，包括：底层电极，其具有底层，上界面层和设置在底层和上界面层之间的中间调谐层; 顶电极以及设置在底部电极和顶部电极之间的高介电常数电介质层。本发明还提供一种用于制造具有高质量HDC材料和低漏电流的电容器的高密度DRAM的装置和方法。本发明的另一方面提供了一种使高质量HDC膜成核的电极 - 电介质界面。本发明还提供了一种在高纵横比孔径内制造电容器的装置和方法。

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