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1. 发明申请

US20120270352A1 FABRICATING MEMS COMPOSITE TRANSDUCER INCLUDING COMPLIANT MEMBRANE 有权
标题翻译：制造包括合成膜的MEMS复合传感器
公开(公告)号：US20120270352A1
公开(公告)日：2012-10-25
申请号：US13089532
申请日：2011-04-19
申请人： James D. Huffman , Maria J. Lehmann
发明人： James D. Huffman , Maria J. Lehmann
IPC分类号： H01L21/02
CPC分类号： B81C1/00182 , B81B2201/038 , B81B2203/053 , G01H11/06 , H02N1/002 , H04R1/222 , H04R17/02 , H04R31/00 , H04R2201/003
摘要： A method of fabricating a MEMS composite transducer includes providing a substrate having a first surface and a second surface opposite the first surface. A transducing material is deposited over the first surface of the substrate. The transducing material is patterned by retaining transducing material in a first region and removing transducing material in a second region. A polymer layer is deposited over the first region and the second region. The polymer layer is patterned by retaining polymer in a third region and removing polymer in a fourth region. A first portion of the third region is coincident with a portion of the first region and a second portion of the third region is coincident with a portion of the second region. A cavity is etched from the second surface to the first surface of the substrate. An outer boundary of the cavity at the first surface of the substrate intersects the first region where transducing material is retained, so that a first portion of the transducing material is anchored to the first surface of the substrate and a second portion of the transducing material extends over at least a portion of the cavity.
摘要翻译：制造MEMS复合换能器的方法包括提供具有第一表面和与第一表面相对的第二表面的基底。在衬底的第一表面上沉积换能材料。通过将传感材料保持在第一区域中并且在第二区域中去除换能材料来对转导材料进行图案化。聚合物层沉积在第一区域和第二区域上。通过在第三区域中保持聚合物并在第四区域中除去聚合物来对聚合物层进行图案化。第三区域的第一部分与第一区域的一部分重合，第三区域的第二部分与第二区域的一部分重合。空腔从第二表面蚀刻到衬底的第一表面。在基板的第一表面处的空腔的外边界与保持换能材料的第一区域相交，使得转换材料的第一部分锚定到基板的第一表面，并且换能材料的第二部分延伸在空腔的至少一部分上方。

2. 发明授权

US08409900B2 Fabricating MEMS composite transducer including compliant membrane 有权
标题翻译：制造MEMS复合传感器，包括合适的膜
公开(公告)号：US08409900B2
公开(公告)日：2013-04-02
申请号：US13089532
申请日：2011-04-19
申请人： James D. Huffman , Maria J. Lehmann
发明人： James D. Huffman , Maria J. Lehmann
IPC分类号： H01L21/02
CPC分类号： B81C1/00182 , B81B2201/038 , B81B2203/053 , G01H11/06 , H02N1/002 , H04R1/222 , H04R17/02 , H04R31/00 , H04R2201/003
摘要： A method of fabricating a MEMS composite transducer includes providing a substrate having a first surface and a second surface opposite the first surface. A transducing material is deposited over the first surface of the substrate. The transducing material is patterned by retaining transducing material in a first region and removing transducing material in a second region. A polymer layer is deposited over the first region and the second region. The polymer layer is patterned by retaining polymer in a third region and removing polymer in a fourth region. A first portion of the third region is coincident with a portion of the first region and a second portion of the third region is coincident with a portion of the second region. A cavity is etched from the second surface to the first surface of the substrate. An outer boundary of the cavity at the first surface of the substrate intersects the first region where transducing material is retained, so that a first portion of the transducing material is anchored to the first surface of the substrate and a second portion of the transducing material extends over at least a portion of the cavity.
摘要翻译：制造MEMS复合换能器的方法包括提供具有第一表面和与第一表面相对的第二表面的基底。在衬底的第一表面上沉积换能材料。通过将传感材料保持在第一区域中并且在第二区域中去除换能材料来对转导材料进行图案化。聚合物层沉积在第一区域和第二区域上。通过在第三区域中保持聚合物并在第四区域中除去聚合物来对聚合物层进行图案化。第三区域的第一部分与第一区域的一部分重合，第三区域的第二部分与第二区域的一部分重合。空腔从第二表面蚀刻到衬底的第一表面。在基板的第一表面处的空腔的外边界与保持换能材料的第一区域相交，使得转换材料的第一部分锚定到基板的第一表面，并且换能材料的第二部分延伸在空腔的至少一部分上方。

3. 发明申请

US20120098907A1 LIQUID DISPENSER INCLUDING CURVED VENT 有权
标题翻译：液体分配器包括弯曲通风口
公开(公告)号：US20120098907A1
公开(公告)日：2012-04-26
申请号：US12911751
申请日：2010-10-26
申请人： Yonglin Xie , Carolyn R. Ellinger , Maria J. Lehmann , Joseph Jech, JR. , Qing Yang
发明人： Yonglin Xie , Carolyn R. Ellinger , Maria J. Lehmann , Joseph Jech, JR. , Qing Yang
IPC分类号： B41J2/185 , B41J2/18
CPC分类号： B41J2/1404 , B41J2/1433 , B41J2002/14403 , B41J2202/12
摘要： A liquid dispenser includes a liquid supply channel, a liquid return channel, and a liquid dispensing channel. The liquid dispensing channel includes a wall. The wall includes a surface. A portion of the wall defines an outlet opening. A drain is located in the wall downstream from the outlet opening. The drain includes a radius of curvature as viewed from a direction perpendicular to the wall. A liquid supply provides liquid that flows from the liquid supply channel through the liquid dispensing channel to the liquid return channel. A diverter member selectively diverts a portion of the flowing liquid through the outlet opening of the liquid dispensing channel.
摘要翻译：液体分配器包括液体供应通道，液体返回通道和液体分配通道。液体分配通道包括壁。墙壁包括一个表面。壁的一部分限定出口开口。排水口位于出口开口下游的墙壁中。漏极包括从垂直于壁的方向观察的曲率半径。液体供应液体从液体供应通道通过液体分配通道流到液体返回通道。分流器构件选择性地将流动的液体的一部分转过液体分配通道的出口。

4. 发明授权

US08328335B2 Liquid dispenser including sloped outlet opening wall 有权
标题翻译：液体分配器包括倾斜的出口开口壁
公开(公告)号：US08328335B2
公开(公告)日：2012-12-11
申请号：US12911758
申请日：2010-10-26
申请人： Yonglin Xie , Joseph Jech, Jr. , Carolyn R. Ellinger , Maria J. Lehmann , Ali G. Lopez , Qing Yang
发明人： Yonglin Xie , Joseph Jech, Jr. , Carolyn R. Ellinger , Maria J. Lehmann , Ali G. Lopez , Qing Yang
IPC分类号： B41J2/04
CPC分类号： B41J2/14016 , B41J2002/14403 , B41J2002/14475 , B41J2202/12
摘要： A liquid dispenser is provided that includes a liquid supply channel, a liquid dispensing channel, and a liquid return channel. The liquid dispensing channel includes a wall. The wall includes a surface. A portion of the wall defines an outlet opening that includes a downstream edge relative to a direction of liquid flow through the liquid dispensing channel. The downstream edge is sloped relative to the surface of the wall of the liquid dispensing channel. A liquid is provided that flows from the liquid supply channel through the liquid dispensing channel to the liquid return channel. A liquid drop is caused to be ejected from the outlet opening of the liquid dispensing channel by selectively actuating a diverter member to divert a portion of the flowing liquid through the outlet opening of the liquid dispensing channel.
摘要翻译：提供了一种液体分配器，其包括液体供应通道，液体分配通道和液体返回通道。液体分配通道包括壁。墙壁包括一个表面。壁的一部分限定出口开口，其包括相对于流过液体分配通道的液体流动方向的下游边缘。下游边缘相对于液体分配通道的壁的表面倾斜。提供从液体供应通道通过液体分配通道流到液体返回通道的液体。通过选择性地致动分流器构件以使流动的液体的一部分通过液体分配通道的出口开口而使液滴从液体分配通道的出口开口排出。

5. 发明授权

US08303091B2 Dispensing liquid using curved vent dispenser 有权
标题翻译：使用弯曲排气口分配器分配液体
公开(公告)号：US08303091B2
公开(公告)日：2012-11-06
申请号：US12911755
申请日：2010-10-26
申请人： Yonglin Xie , Carolyn R. Ellinger , Maria J. Lehmann , Joseph Jech, Jr. , Qing Yang
发明人： Yonglin Xie , Carolyn R. Ellinger , Maria J. Lehmann , Joseph Jech, Jr. , Qing Yang
IPC分类号： B41J2/05
CPC分类号： B41J2/14016 , B41J2002/14403 , B41J2002/14475 , B41J2202/12
摘要： A liquid dispenser is provided that includes a liquid supply channel, a liquid dispensing channel, and a liquid return channel. The liquid dispensing channel includes a wall. The wall includes a surface. A portion of the wall defines an outlet opening. Another portion of the wall defines a drain located in the wall downstream from the outlet opening. The drain includes a radius of curvature as viewed from a direction perpendicular to the wall. A liquid is provided that flows from the liquid supply channel through the liquid dispensing channel to the liquid return channel. A liquid drop is caused to be ejected from the outlet opening of the liquid dispensing channel by selectively actuating a diverter member to divert a portion of the flowing liquid through the outlet opening of the liquid dispensing channel.
摘要翻译：提供了一种液体分配器，其包括液体供应通道，液体分配通道和液体返回通道。液体分配通道包括壁。墙壁包括一个表面。壁的一部分限定出口开口。壁的另一部分限定位于出口开口下游的壁中的排水口。漏极包括从垂直于壁的方向观察的曲率半径。提供从液体供应通道通过液体分配通道流到液体返回通道的液体。通过选择性地致动分流器构件以使流动的液体的一部分通过液体分配通道的出口开口而使液滴从液体分配通道的出口开口排出。

6. 发明申请

US20120098892A1 DISPENSING LIQUID USING SLOPED OUTLET OPENING DISPENSER 有权
标题翻译：使用倾斜出口打开分配器分配液体
公开(公告)号：US20120098892A1
公开(公告)日：2012-04-26
申请号：US12911758
申请日：2010-10-26
申请人： Yonglin Xie , Joseph Jech, JR. , Carolyn R. Ellinger , Maria J. Lehmann , Ali G. Lopez , Qing Yang
发明人： Yonglin Xie , Joseph Jech, JR. , Carolyn R. Ellinger , Maria J. Lehmann , Ali G. Lopez , Qing Yang
IPC分类号： B41J2/04
CPC分类号： B41J2/14016 , B41J2002/14403 , B41J2002/14475 , B41J2202/12
摘要： A liquid dispenser is provided that includes a liquid supply channel, a liquid dispensing channel, and a liquid return channel. The liquid dispensing channel includes a wall. The wall includes a surface. A portion of the wall defines an outlet opening that includes a downstream edge relative to a direction of liquid flow through the liquid dispensing channel. The downstream edge is sloped relative to the surface of the wall of the liquid dispensing channel. A liquid is provided that flows from the liquid supply channel through the liquid dispensing channel to the liquid return channel. A liquid drop is caused to be ejected from the outlet opening of the liquid dispensing channel by selectively actuating a diverter member to divert a portion of the flowing liquid through the outlet opening of the liquid dispensing channel.
摘要翻译：提供了一种液体分配器，其包括液体供应通道，液体分配通道和液体返回通道。液体分配通道包括壁。墙壁包括一个表面。壁的一部分限定出口开口，其包括相对于流过液体分配通道的液体流动方向的下游边缘。下游边缘相对于液体分配通道的壁的表面倾斜。提供从液体供应通道通过液体分配通道流到液体返回通道的液体。通过选择性地致动分流器构件以使流动的液体的一部分通过液体分配通道的出口开口而使液滴从液体分配通道的出口开口排出。

7. 发明授权

US08573743B2 Liquid dispenser including curved vent 有权
标题翻译：液体分配器包括弯曲排气口
公开(公告)号：US08573743B2
公开(公告)日：2013-11-05
申请号：US12911751
申请日：2010-10-26
申请人： Yonglin Xie , Carolyn R. Ellinger , Maria J. Lehmann , Joseph Jech, Jr. , Qing Yang
发明人： Yonglin Xie , Carolyn R. Ellinger , Maria J. Lehmann , Joseph Jech, Jr. , Qing Yang
IPC分类号： B41J2/16 , B41J2/18
CPC分类号： B41J2/1404 , B41J2/1433 , B41J2002/14403 , B41J2202/12
摘要： A liquid dispenser includes a liquid supply channel, a liquid return channel, and a liquid dispensing channel. The liquid dispensing channel includes a wall. The wall includes a surface. A portion of the wall defines an outlet opening. A drain is located in the wall downstream from the outlet opening. The drain includes a radius of curvature as viewed from a direction perpendicular to the wall. A liquid supply provides liquid that flows from the liquid supply channel through the liquid dispensing channel to the liquid return channel. A diverter member selectively diverts a portion of the flowing liquid through the outlet opening of the liquid dispensing channel.
摘要翻译：液体分配器包括液体供应通道，液体返回通道和液体分配通道。液体分配通道包括壁。墙壁包括一个表面。壁的一部分限定出口开口。排水口位于出口开口下游的墙壁中。漏极包括从垂直于壁的方向观察的曲率半径。液体供应液体从液体供应通道通过液体分配通道流到液体返回通道。分流器构件选择性地将流动的液体的一部分转过液体分配通道的出口。

8. 发明授权

US08439481B2 Liquid dispenser including sloped outlet opening wall 有权
标题翻译：液体分配器包括倾斜的出口开口壁
公开(公告)号：US08439481B2
公开(公告)日：2013-05-14
申请号：US12911756
申请日：2010-10-26
申请人： Yonglin Xie , Joseph Jech, Jr. , Carolyn R. Ellinger , Maria J. Lehmann , Ali G. Lopez , Qing Yang
发明人： Yonglin Xie , Joseph Jech, Jr. , Carolyn R. Ellinger , Maria J. Lehmann , Ali G. Lopez , Qing Yang
IPC分类号： B41J2/135
CPC分类号： B41J2/14016 , B41J2/14112 , B41J2002/14387 , B41J2002/14403 , B41J2002/14475 , B41J2202/12 , Y10T137/6497
摘要： A liquid dispenser includes a liquid supply channel, a liquid return channel; and a liquid dispensing channel. The liquid dispensing channel includes a wall. The wall includes a surface. A portion of the wall defines an outlet opening. The outlet opening includes a downstream edge relative to a direction of liquid flow through the liquid dispensing channel. The downstream edge is sloped relative to the surface of the wall of the liquid dispensing channel. A liquid supply provides liquid that flows from the liquid supply channel through the liquid dispensing channel to the liquid return channel. A diverter member selectively diverts a portion of the flowing liquid through the outlet opening of the liquid dispensing channel.
摘要翻译：液体分配器包括液体供应通道，液体返回通道; 和液体分配通道。液体分配通道包括壁。墙壁包括一个表面。壁的一部分限定出口开口。出口开口包括相对于流过液体分配通道的液体流动方向的下游边缘。下游边缘相对于液体分配通道的壁的表面倾斜。液体供应液体从液体供应通道通过液体分配通道流到液体返回通道。分流器构件选择性地将流动的液体的一部分转过液体分配通道的出口。

9. 发明申请

US20120098891A1 DISPENSING LIQUID USING CURVED VENT DISPENSER 有权
标题翻译：使用弯曲通风口分配器分配液体
公开(公告)号：US20120098891A1
公开(公告)日：2012-04-26
申请号：US12911755
申请日：2010-10-26
申请人： Yonglin Xie , Carolyn R. Ellinger , Maria J. Lehmann , Joseph Jech, JR. , Qing Yang
发明人： Yonglin Xie , Carolyn R. Ellinger , Maria J. Lehmann , Joseph Jech, JR. , Qing Yang
IPC分类号： B41J2/04
CPC分类号： B41J2/14016 , B41J2002/14403 , B41J2002/14475 , B41J2202/12
摘要： A liquid dispenser is provided that includes a liquid supply channel, a liquid dispensing channel, and a liquid return channel. The liquid dispensing channel includes a wall. The wall includes a surface. A portion of the wall defines an outlet opening. Another portion of the wall defines a drain located in the wall downstream from the outlet opening. The drain includes a radius of curvature as viewed from a direction perpendicular to the wall. A liquid is provided that flows from the liquid supply channel through the liquid dispensing channel to the liquid return channel. A liquid drop is caused to be ejected from the outlet opening of the liquid dispensing channel by selectively actuating a diverter member to divert a portion of the flowing liquid through the outlet opening of the liquid dispensing channel.
摘要翻译：提供了一种液体分配器，其包括液体供应通道，液体分配通道和液体返回通道。液体分配通道包括壁。墙壁包括一个表面。壁的一部分限定出口开口。壁的另一部分限定位于出口开口下游的壁中的排水口。漏极包括从垂直于壁的方向观察的曲率半径。提供从液体供应通道通过液体分配通道流到液体返回通道的液体。通过选择性地致动分流器构件以使流动的液体的一部分通过液体分配通道的出口开口而使液滴从液体分配通道的出口开口排出。

10. 发明申请

US20120098887A1 LIQUID DISPENSER INCLUDING SLOPED OUTLET OPENING WALL 有权
标题翻译：液体分配器，包括开放式开口墙
公开(公告)号：US20120098887A1
公开(公告)日：2012-04-26
申请号：US12911756
申请日：2010-10-26
申请人： Yonglin Xie , Joseph Jech, JR. , Carolyn R. Ellinger , Maria J. Lehmann , Ali G. Lopez , Qing Yang
发明人： Yonglin Xie , Joseph Jech, JR. , Carolyn R. Ellinger , Maria J. Lehmann , Ali G. Lopez , Qing Yang
IPC分类号： B41J2/135
CPC分类号： B41J2/14016 , B41J2/14112 , B41J2002/14387 , B41J2002/14403 , B41J2002/14475 , B41J2202/12 , Y10T137/6497
摘要： A liquid dispenser includes a liquid supply channel, a liquid return channel; and a liquid dispensing channel. The liquid dispensing channel includes a wall. The wall includes a surface. A portion of the wall defines an outlet opening. The outlet opening includes a downstream edge relative to a direction of liquid flow through the liquid dispensing channel. The downstream edge is sloped relative to the surface of the wall of the liquid dispensing channel. A liquid supply provides liquid that flows from the liquid supply channel through the liquid dispensing channel to the liquid return channel. A diverter member selectively diverts a portion of the flowing liquid through the outlet opening of the liquid dispensing channel.
摘要翻译：液体分配器包括液体供应通道，液体返回通道; 和液体分配通道。液体分配通道包括壁。墙壁包括一个表面。壁的一部分限定出口开口。出口开口包括相对于流过液体分配通道的液体流动方向的下游边缘。下游边缘相对于液体分配通道的壁的表面倾斜。液体供应液体从液体供应通道通过液体分配通道流到液体返回通道。分流器构件选择性地将流动的液体的一部分转过液体分配通道的出口。

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