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1. 发明授权

US5212374A Method and apparatus for positioning and biasing an electro-optic modulator of an electro-optic imaging system 失效
标题翻译：用于定位和偏移电光成像系统的电光调制器的方法和装置
公开(公告)号：US5212374A
公开(公告)日：1993-05-18
申请号：US804257
申请日：1991-12-04
申请人： James C. Speedy , Francois J. Henley , Hee-June Choi , Michael J. Miller , Ying-Moh Liu
发明人： James C. Speedy , Francois J. Henley , Hee-June Choi , Michael J. Miller , Ying-Moh Liu
IPC分类号： G01R31/302 , G01R19/00 , G01R31/308 , G02F1/13 , G09G3/00 , H01L21/66
CPC分类号： G09G3/006 , G01R31/308 , G02F1/1309
摘要： An imaging method creates a two-dimensional image of a voltage distribution or a capacitance distribution across a surface of a substrate under test using an electro-optic modulator which is positioned and biased with respect to the surface of the substrate. The method involves a first coarse offsite calibrating step to compensate for nonuniformities in the light emerging from the modulator. Then, for each successive portion of the substrate over which the modulator is to detect characteristics of the substrate, the system undergoes a modulator relocating step, a modulator levelling step, a modulator gapping step, a fine onsite calibrating step, and a measuring step. An apparatus is disclosed for levelling the bottom surface of a modulator into a substantially coplanar spacial relationship with a portion of top surface of the underlying substrate being tested monitors light emerging from at least three regions on the top surface of the modulator in order to determine the relative distances of three corresponding regions of the bottom surface of the modulator from the underlying top surface of the substrate being tested. In one embodiment, three transducers are used to control the spacial orientation of the modulator. The method and apparatus see special application in detecting defects in LCD display panels.
摘要翻译：成像方法使用相对于衬底的表面定位和偏置的电光调制器产生跨越被测衬底的表面的电压分布或电容分布的二维图像。该方法涉及第一粗糙非现场校准步骤以补偿从调制器出射的光的不均匀性。然后，对于调制器要在其上检测衬底的特性的衬底的每个连续部分，系统经历调制器重定位步骤，调制器调平步骤，调制器间隔步骤，精细现场校准步骤和测量步骤。公开了一种用于将调制器的底表面平整为与待测试的下层基底的顶表面的一部分基本上共面的空间关系，监测从调制器顶表面上的至少三个区域出射的光，以便确定调制器底表面的三个对应区域与正在测试的衬底的下表面之间的相对距离。在一个实施例中，使用三个换能器来控制调制器的空间取向。该方法和装置在液晶显示面板检测缺陷方面具有特殊应用。

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