会员体验
专利管家(专利管理)
工作空间(专利管理)
风险监控(情报监控)
数据分析(专利分析)
侵权分析(诉讼无效)
联系我们
交流群
官方交流:
QQ群: 891211   
微信请扫码    >>>
现在联系顾问~
热词
    • 3. 发明申请
    • APPARATUS AND METHOD FOR MANUFACTURING A LIGHT-EMITTING DEVICE USING A NEUTRAL PARTICLE BEAM
    • 使用中性粒子束制造发光装置的装置和方法
    • US20140017827A1
    • 2014-01-16
    • US14006937
    • 2011-05-30
    • Suk Jae YooSeong Bong Kim
    • Suk Jae YooSeong Bong Kim
    • C30B25/02H01L21/02
    • H01L21/0257C30B25/02C30B25/105C30B29/406H01L21/02458H01L21/0254H01L21/02576H01L21/02579H01L21/0262H01L21/02631H01L21/02656H01L21/67161H01L21/67207H01L33/0066
    • The present invention relates to an apparatus and method for manufacturing a semiconductor light-emitting device using a neutral particle beam. According to the present invention, since the kinetic energy of the neutral particle beam is provided as a portion of the reaction energy for causing a nitride semiconductor single crystal thin film to be formed on a substrate, and the reaction energy is not provided as heat energy by heating a substrate as in the prior art, the substrate may be treated at a relatively low temperature. Furthermore, elements such as Si, Mg, and the like, which are solid elements required for doping are sprayed onto the substrate from a source which generates solid elements for doping together with the neutral particle beam to achieve high doping efficiency at a lower temperature. According to the present invention, since the substrate is treated at a low temperature, the degradation of the substrate and thin film may be prevented, and the undesired diffusion of the doping elements may be prevented to enable the manufacture of the semiconductor light-emitting device having superior light-emitting properties in a relatively easy manner.
    • 本发明涉及使用中性粒子束制造半导体发光装置的装置和方法。 根据本发明,由于中性粒子束的动能作为用于使衬底上形成氮化物半导体单晶薄膜的反应能量的一部分而提供,反应能量不能作为热能 通过像现有技术那样加热衬底,衬底可以在相对低的温度下进行处理。 此外,作为掺杂所需的固体元素的Si,Mg等元素,由生成与中性粒子束一起掺杂的固体元素的源喷射到基板上,以在较低的温度下实现高的掺杂效率。 根据本发明,由于在低温下处理基板,可以防止基板和薄膜的劣化,并且可以防止掺杂元件的不期望的扩散,从而能够制造半导体发光器件 以相对容易的方式具有优异的发光特性。