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    • 1. 发明授权
    • Projection device
    • 投影设备
    • US4368975A
    • 1983-01-18
    • US240835
    • 1981-03-05
    • Yoshiya MatsuiSetsuo MinamiNoritaka MochizukiIsao HarumotoAtsuo TsunodaShiro HiraiMasami Ohkubo
    • Yoshiya MatsuiSetsuo MinamiNoritaka MochizukiIsao HarumotoAtsuo TsunodaShiro HiraiMasami Ohkubo
    • G03B27/50G02B3/00G02B13/22G02B13/24G02B27/18G03G15/04G03G15/047G03B27/48
    • G02B13/24G02B13/22G02B3/00
    • This specification discloses a projection device in which a plurality of element lens systems for projecting a part area of an object onto a predetermined part area on the image plane at erect one-to-one magnification are arranged parallel to one another in a plane perpendicular to the optical axis. Each element lens system is a telecentric system comprising three thin lenses of the same shape arranged in the direction of the optical axis, and an intermediate lens is provided at a position deviated from the intermediate point between the object side lens and the image plane side lens. A light absorbing member for extinguishing any light rays exceeding the effective lens diameter is provided between the lenses, and the light intensity distribution on the image plane of each element lens system is controlled substantially to Gauss distribution form by aperture eclipse and, even if there is any error in the arrangement interval, the exposure amount distribution in the arrangement direction superposed on the image plane is uniform.
    • 本说明书公开了一种投影装置,其中用于将物体的一部分区域以直立的一对一放大率在像面上的预定部分区域投影的多个元件透镜系统在垂直于...的平面中彼此平行地布置 光轴。 每个元件透镜系统是一种远心系统,包括沿光轴方向布置的相同形状的三个薄透镜,并且在偏离物侧透镜和像平面侧透镜之间的中间点的位置处设置中间透镜 。 在透镜之间设置用于熄灭超过有效透镜直径的光线的光吸收部件,并且每个元件透镜系统的像面上的光强度分布基本上由孔眼日蚀控制为高斯分布形式,并且即使存在 布置间隔中的任何误差,叠加在图像平面上的排列方向上的曝光量分布是均匀的。