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    • 5. 发明申请
    • ELECTRONIC DEVICE AND METHOD FOR CONTROLLING ELECTRONIC DEVICE
    • 用于控制电子设备的电子设备和方法
    • US20100214244A1
    • 2010-08-26
    • US12698405
    • 2010-02-02
    • Hyun Ok KIM
    • Hyun Ok KIM
    • G06F3/041
    • G06F3/04883G06F3/0481
    • An electronic device includes an infrared temperature sensor and can detect a user's finger arranged within a detection distance even though the user's finger does not contact the electronic device. Movement of the user's finger is also detected. A pointer positioned and moving according to the position and movement of the user's finger is displayed on a screen of the portable electronic device, and a predetermined function corresponding to the movement of the finger may be performed. A method for controlling the electronic device includes detecting that a user's finger is positioned within a detection distance of an infrared temperature sensor, and displaying a pointer corresponding to a position of the user's finger on a display screen. The method also may include moving the pointer or performing a function corresponding to the movement direction of the pointer.
    • 电子设备包括红外温度传感器,并且即使用户的手指不接触电子设备,也可以检测布置在检测距离内的用户手指。 也检测到用户手指的移动。 可以在便携式电子设备的屏幕上显示根据用户手指的位置和移动来定位和移动的指针,并且可以执行与手指的移动相对应的预定功能。 一种用于控制电子设备的方法,包括:检测用户的手指位于红外线温度传感器的检测距离内,并将与用户手指的位置对应的指针显示在显示屏上。 该方法还可以包括移动指针或执行与指针的移动方向相对应的功能。
    • 8. 发明授权
    • MEMS structure having a blocked-sacrificial layer support/anchor and a fabrication method of the same
    • 具有封闭牺牲层支撑/锚的MEMS结构及其制造方法
    • US06975010B2
    • 2005-12-13
    • US10320679
    • 2002-12-17
    • Eun-sung LeeMoon-chul LeeHyun-ok Kim
    • Eun-sung LeeMoon-chul LeeHyun-ok Kim
    • B81C1/00B81B3/00H01L29/82
    • B81B3/0078B81B2203/0307B81C2201/0109
    • A fabrication method for a MEMS structure, the MEMS structure including a fixing portion fixed to the substrate and a floating portion floating above the substrate. A sacrificial layer deposited on the substrate is patterned to have a groove forming a space surrounding the area corresponding to the area in which the fixing portion is to be formed. If the MEMS structure is deposited on the sacrificial layer, a sidewall is formed inside the space and the fixing portion and the floating portion are formed on the sacrificial layer. If the sacrificial layer is removed using an etchant, the sacrificial layer at the bottom of the fixing portion is protected from the etchant by the sidewall and accordingly, the sacrificial layer except the area surrounded by the sidewall is removed. Therefore, only the sacrificial layer under the floating portion is removed. Because the connecting portion is fabricated to have the same thickness as the fixing portion and the floating portion, a strong/durable MEMS structure is provided. Additionally, the boundary between the fixing portion and the floating portion can be precisely determined, and adjustment of the length of the floating portion can be precisely controlled.
    • 一种用于MEMS结构的制造方法,所述MEMS结构包括固定到所述基板的固定部分和浮置在所述基板上方的浮动部分。 沉积在基板上的牺牲层被图案化以具有形成围绕与要形成固定部分的区域相对应的区域的空间的凹槽。 如果MEMS结构沉积在牺牲层上,则在空间内形成侧壁,并且在牺牲层上形成固定部分和浮动部分。 如果使用蚀刻剂去除牺牲层,则固定部分底部的牺牲层被侧壁保护而不受蚀刻剂的影响,因此除去由侧壁包围的区域之外的牺牲层。 因此,只有在浮动部分下面的牺牲层被去除。 由于连接部分被制造成具有与固定部分和浮动部分相同的厚度,所以提供了强/耐久的MEMS结构。 此外,可以精确地确定固定部分和浮动部分之间的边界,并且可以精确地控制浮动部分的长度的调节。