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    • 5. 发明授权
    • Binary mask, method for fabricating the binary mask, and method for fabricating fine pattern of semiconductor device using binary mask
    • 二进制掩模,二进制掩模的制造方法以及使用二元掩模制造半导体器件的精细图案的方法
    • US07939226B2
    • 2011-05-10
    • US12134534
    • 2008-06-06
    • Hye Mi Lee
    • Hye Mi Lee
    • G03F1/00G03F7/00
    • G03F1/32
    • Provided are a binary mask, a method for fabricating the binary mask, and a method for fabricating a fine pattern of semiconductor device. In the method for fabricating the fine pattern, a binary mask including phase shift layer patterns is prepared on a transparent substrate. A semiconductor substrate including an etch objective layer and a resist layer is prepared. An exposure operation using the binary mask and a light source of a short wavelength is performed to transfer the phase shift layer patterns of the binary mask onto the resist layer of the semiconductor substrate. The resist layer to which the patterns have been transferred is developed to form resist layer patterns selectively exposing the etch objective layer. Exposed portions of the etch objective layer are etched using the resist layer patterns as an etch mask to form etch objective layer patterns. The resist layer patterns are removed.
    • 提供二进制掩模,二进制掩模的制造方法以及制造半导体器件精细图案的方法。 在精细图案的制造方法中,在透明基板上制备包括相移层图案的二值掩模。 制备包括蚀刻目标层和抗蚀剂层的半导体衬底。 执行使用二进制掩模和短波长的光源的曝光操作,以将二进制掩模的相移层图案转印到半导体衬底的抗蚀剂层上。 已经转印图案的抗蚀剂层被显影以形成选择性地暴露蚀刻目标层的抗蚀剂层图案。 使用抗蚀剂层图案作为蚀刻掩模蚀刻蚀刻目标层的暴露部分以形成蚀刻目标层图案。 去除抗蚀剂层图案。
    • 6. 发明申请
    • Method for searching data in a wireless terminal
    • 用于在无线终端中搜索数据的方法
    • US20070080942A1
    • 2007-04-12
    • US11372079
    • 2006-03-10
    • Hye-Mi Lee
    • Hye-Mi Lee
    • G09G5/08
    • G06F3/04892
    • Disclosed is a method for easily searching data displayed in a wireless terminal. The method comprises the steps of: determining if at least two keys are input while data is displayed in the wireless terminal; moving a cursor onto a position of specific data corresponding to consecutive inputs of the keys when the keys are consecutively input; moving the cursor onto a position of first data when a first key of the keys is input; and moving the cursor onto a position of last data when a last key of the keys is input. Also, the method comprises the steps of: determining input of directional keys while data is displayed in the wireless terminal; displaying data of a previous screen when a left key of the directional keys is input; displaying data of a next screen when a right key of the directional keys is input; upwardly moving a cursor onto a position of specific data, when an up key of the directional keys is input; and downwardly moving the cursor onto a position of specific data, when a down key of the directional keys is input.
    • 公开了一种用于容易地搜索在无线终端中显示的数据的方法。 该方法包括以下步骤:确定在无线终端中显示数据时是否输入至少两个键; 当键连续输入时,将光标移动到对应于键的连续输入的特定数据的位置; 当输入键的第一个键时,将光标移动到第一数据的位置; 并且当输入键的最后一个键时,将光标移动到最后数据的位置。 此外,该方法包括以下步骤:在无线终端中显示数据的同时确定方向键的输入; 当输入方向键的左键时显示上一屏幕的数据; 当输入方向键的右键时显示​​下一屏幕的数据; 向上移动光标到特定数据的位置,当方向键的向上键被输入时; 并且当输入方向键的向下键时,将光标向下移动到特定数据的位置。
    • 8. 发明申请
    • BINARY MASK, METHOD FOR FABRICATING THE BINARY MASK, AND METHOD FOR FABRICATING FINE PATTERN OF SEMICONDUCTOR DEVICE USING BINARY MASK
    • 二进制掩模,用于制作二进制掩模的方法以及使用二进制掩模制作半导体器件的精细图案的方法
    • US20090111035A1
    • 2009-04-30
    • US12134534
    • 2008-06-06
    • HYE MI LEE
    • HYE MI LEE
    • G03F7/20G03F1/00
    • G03F1/32
    • Provided are a binary mask, a method for fabricating the binary mask, and a method for fabricating a fine pattern of semiconductor device. In the method for fabricating the fine pattern, a binary mask including phase shift layer patterns is prepared on a transparent substrate. A semiconductor substrate including an etch objective layer and a resist layer is prepared. An exposure operation using the binary mask and a light source of a short wavelength is performed to transfer the phase shift layer patterns of the binary mask onto the resist layer of the semiconductor substrate. The resist layer to which the patterns have been transferred is developed to form resist layer patterns selectively exposing the etch objective layer. Exposed portions of the etch objective layer are etched using the resist layer patterns as an etch mask to form etch objective layer patterns. The resist layer patterns are removed.
    • 提供二进制掩模,二进制掩模的制造方法以及制造半导体器件精细图案的方法。 在精细图案的制造方法中,在透明基板上制备包括相移层图案的二值掩模。 制备包括蚀刻目标层和抗蚀剂层的半导体衬底。 执行使用二进制掩模和短波长的光源的曝光操作,以将二进制掩模的相移层图案转印到半导体衬底的抗蚀剂层上。 已经转印图案的抗蚀剂层被显影以形成选择性地暴露蚀刻目标层的抗蚀剂层图案。 使用抗蚀剂层图案作为蚀刻掩模蚀刻蚀刻目标层的暴露部分以形成蚀刻目标层图案。 去除抗蚀剂层图案。