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1. 发明申请

US20060280501A1 Developing process and apparatus 有权
标题翻译：开发过程和设备
公开(公告)号：US20060280501A1
公开(公告)日：2006-12-14
申请号：US11148607
申请日：2005-06-08
申请人： Hsun-Kai Chan , Ta-Yu Liu
发明人： Hsun-Kai Chan , Ta-Yu Liu
IPC分类号： G03D3/02
CPC分类号： G03D5/04 , G03F7/3042
摘要： The invention discloses a developing apparatus and a developing process. Wherein the developing process comprises following steps. First, a developing apparatus and a substrate are provided, wherein the developing apparatus comprises a conveyer and a nozzle. Then, the substrate is conveyed along a first direction by the conveyer, and the nozzle is driven to move along a second direction opposite to the first direction, wherein the nozzle sprays a developer over the substrate as moving. As mentioned above, the non-uniformity of development can be reduced.
摘要翻译：本发明公开了一种显影装置和显影方法。其中开发过程包括以下步骤。首先，提供显影装置和基板，其中显影装置包括输送机和喷嘴。然后，通过输送机沿着第一方向输送基板，并且驱动喷嘴沿与第一方向相反的第二方向移动，其中喷嘴将显影剂喷射在基板上作为移动。如上所述，可以减少发展的不均匀性。

2. 发明授权

US07287919B2 Developing process and apparatus 有权
标题翻译：开发过程和设备
公开(公告)号：US07287919B2
公开(公告)日：2007-10-30
申请号：US11148607
申请日：2005-06-08
申请人： Hsun-Kai Chan , Ta-Yu Liu
发明人： Hsun-Kai Chan , Ta-Yu Liu
IPC分类号： G03D5/06 , G03D5/00
CPC分类号： G03D5/04 , G03F7/3042
摘要： The invention discloses a developing apparatus and a developing process. Wherein the developing process comprises following steps. First, a developing apparatus and a substrate are provided, wherein the developing apparatus comprises a conveyer and a nozzle. Then, the substrate is conveyed along a first direction by the conveyer, and the nozzle is driven to move along a second direction opposite to the first direction, wherein the nozzle sprays a developer over the substrate as moving. As mentioned above, the non-uniformity of development can be reduced.
摘要翻译：本发明公开了一种显影装置和显影方法。其中开发过程包括以下步骤。首先，提供显影装置和基板，其中显影装置包括输送机和喷嘴。然后，通过输送机沿着第一方向输送基板，并且驱动喷嘴沿与第一方向相反的第二方向移动，其中喷嘴将显影剂喷射在基板上作为移动。如上所述，可以减少发展的不均匀性。

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