专利快速检索-快速检索全球专利，免费商用专利数据库-IPRDB

1. 发明申请

US20200161096A1 PLASMA GENERATING APPARATUS AND SUBSTRATE PROCESSING APPARATUS 审中-公开
公开(公告)号：US20200161096A1
公开(公告)日：2020-05-21
申请号：US16688857
申请日：2019-11-19
申请人： Hong-Young CHANG , Sang-Hun Seo , Yun-Seong Lee
发明人： Hong-Young CHANG , Sang-Hun Seo , Yun-Seong Lee
IPC分类号： H01J37/32
摘要： Provided are a plasma generating apparatus and a substrate treating apparatus. The plasma generating apparatus includes a plurality of ground electrodes arranged inside a vacuum container and extending parallel to each other and power electrodes arranged between the ground electrodes. An area where a distance between the ground electrode and the power electrode is constant exists, and the power electrodes are tapered in a direction facing the substrate. The power electrodes are connected to an RF power source, and height of the power electrode is greater than that of the ground electrode in the direction facing the substrate.

2. 发明授权

US07442273B2 Apparatus using hybrid coupled plasma 有权
标题翻译：使用混合耦合等离子体的装置
公开(公告)号：US07442273B2
公开(公告)日：2008-10-28
申请号：US10892259
申请日：2004-07-14
申请人： Gi-Chung Kwon , Hong-Young Chang , Yong-Kwan Lee
发明人： Gi-Chung Kwon , Hong-Young Chang , Yong-Kwan Lee
IPC分类号： C23C16/00 , C23F1/00 , H01L21/306
CPC分类号： H01J37/32174 , H01J37/32082 , H01J37/321
摘要： A hybrid coupled plasma type apparatus includes: a chamber having a gas-injecting unit; an electrostatic chuck in the chamber; an insulating plate over the gas-injecting unit; a high frequency generator; an impedance matching circuit connected to the high frequency generator; first and second antennas connected to the impedance matching circuit in parallel, a power of the high frequency generator being supplied to the first and second antennas; an electrode of a plate shape connected to one of the first and second antennas in serial, the power of the high frequency generator being supplied to the electrode; and a power distributor between the high frequency generator and one of the first and second antennas.
摘要翻译：混合耦合等离子体型装置包括：具有气体注入单元的室; 腔室中的静电卡盘; 气体注入单元上的绝缘板; 高频发生器; 连接到高频发生器的阻抗匹配电路; 第一和第二天线并联连接到阻抗匹配电路，高频发生器的功率被提供给第一和第二天线; 连接到第一和第二天线中的一个的板状电极，高频发生器的功率被提供给电极; 以及高频发生器与第一和第二天线之一之间的功率分配器。

3. 发明授权

US06288493B1 Antenna device for generating inductively coupled plasma 有权
标题翻译：用于产生电感耦合等离子体的天线装置
公开(公告)号：US06288493B1
公开(公告)日：2001-09-11
申请号：US09562902
申请日：2000-05-02
申请人： Yong-Kwan Lee , Nam-Sik Yoon , Sung-Sik Kim , Pyung-Woo Lee , Hong-Young Chang
发明人： Yong-Kwan Lee , Nam-Sik Yoon , Sung-Sik Kim , Pyung-Woo Lee , Hong-Young Chang
IPC分类号： H05H124
CPC分类号： H01J37/321 , H05H1/46
摘要： The invention relates to an antenna device of a low impedance for generating a large quantity of inductively coupled plasma to process a large size of a specimen with adjustment for a uniform distribution in the density of plasma, comprising: a high frequency power source; a first antenna for receiving the high frequency power supplied from the high frequency power source; and a second antenna connected in parallel with the first antenna for receiving the high frequency power supplied from the high frequency power source, wherein a resonant state is kept between the first and second antennas.
摘要翻译：本发明涉及一种用于产生大量电感耦合等离子体的低阻抗天线装置，用于对等离子体密度进行调整以调整大尺寸样品，包括：高频电源; 用于接收从高频电源提供的高频电力的第一天线; 以及与第一天线并联连接的第二天线，用于接收从高频电源提供的高频电力，其中谐振状态保持在第一和第二天线之间。

4. 发明授权

US10553406B2 Plasma generating apparatus and substrate processing apparatus 有权
公开(公告)号：US10553406B2
公开(公告)日：2020-02-04
申请号：US14004411
申请日：2012-03-29
申请人： Hong-Young Chang , Sang-Hun Seo , Yun-Seong Lee
发明人： Hong-Young Chang , Sang-Hun Seo , Yun-Seong Lee
IPC分类号： H01J37/32
摘要： Provided are a plasma generating apparatus and a substrate treating apparatus. The plasma generating apparatus includes a plurality of ground electrodes arranged inside a vacuum container and extending parallel to each other and power electrodes arranged between the ground electrodes. An area where a distance between the ground electrode and the power electrode is constant exists, and the power electrodes are tapered in a direction facing the substrate. The power electrodes are connected to an RF power source, and height of the power electrode is greater than that of the ground electrode in the direction facing the substrate.

5. 发明授权

US08999189B2 Ferroelectric fluoride compositions and methods of making and using same 有权
标题翻译：铁电氟化物组合物及其制备和使用方法
公开(公告)号：US08999189B2
公开(公告)日：2015-04-07
申请号：US13036983
申请日：2011-02-28
申请人： P. Shiv Halasyamani , Hong-Young Chang
发明人： P. Shiv Halasyamani , Hong-Young Chang
IPC分类号： H01F1/01 , C30B7/10 , C30B29/12 , C01G45/00 , C01G51/00 , C01G53/00 , C01G9/00 , H01F1/00
CPC分类号： H01F1/01 , C01G9/006 , C01G45/006 , C01G51/006 , C01G53/006 , C01P2002/72 , C01P2002/76 , C01P2002/77 , C01P2006/10 , C01P2006/42 , C30B7/10 , C30B29/12 , H01F1/0009
摘要： A method for synthesis of a ferroelectric material characterized by the general formula AxByFz where A is an alkaline earth metal, B is transition metal or a main group metal, x and y each range from about 1 to about 5, and z ranges from about 1 to about 20 comprising contacting an alkaline earth metal fluoride, a difluorometal compound and a fluoroorganic acid in a medium to form a reaction mixture; and subjecting the reaction mixture to conditions suitable for hydrothermal crystal growth.
摘要翻译：一种用于合成铁电材料的方法，其特征在于通式AxByFz，其中A是碱土金属，B是过渡金属或主族金属，x和y各自在约1至约5的范围内，z的范围为约1 包括使介质中的碱土金属氟化物，二氟金属化合物和氟代有机酸接触以形成反应混合物; 并对反应混合物进行适合于水热晶体生长的条件。

6. 发明申请

US20110220836A1 Ferroelectric fluoride compositions and methods of making and using same 有权
标题翻译：铁电氟化物组合物及其制备和使用方法
公开(公告)号：US20110220836A1
公开(公告)日：2011-09-15
申请号：US13036983
申请日：2011-02-28
申请人： P. Shiv HALASYAMANI , Hong-Young CHANG
发明人： P. Shiv HALASYAMANI , Hong-Young CHANG
IPC分类号： H01F1/01
CPC分类号： H01F1/01 , C01G9/006 , C01G45/006 , C01G51/006 , C01G53/006 , C01P2002/72 , C01P2002/76 , C01P2002/77 , C01P2006/10 , C01P2006/42 , C30B7/10 , C30B29/12 , H01F1/0009
摘要： A method for synthesis of a ferroelectric material characterized by the general formula AxByFz where A is an alkaline earth metal, B is transition metal or a main group metal, x and y each range from about 1 to about 5, and z ranges from about 1 to about 20 comprising contacting an alkaline earth metal fluoride, a difluorometal compound and a fluoroorganic acid in a medium to form a reaction mixture; and subjecting the reaction mixture to conditions suitable for hydrothermal crystal growth.
摘要翻译：一种用于合成铁电材料的方法，其特征在于通式AxByFz，其中A是碱土金属，B是过渡金属或主族金属，x和y各自在约1至约5的范围内，z的范围为约1 包括使介质中的碱土金属氟化物，二氟金属化合物和氟代有机酸接触以形成反应混合物; 并对反应混合物进行适合于水热晶体生长的条件。

7. 发明申请

US20140007812A1 PLASMA GENERATING APPARATUS AND SUBSTRATE PROCESSING APPARATUS 审中-公开
标题翻译：等离子体发生装置和基板处理装置
公开(公告)号：US20140007812A1
公开(公告)日：2014-01-09
申请号：US14004411
申请日：2012-03-29
申请人： Hong-Young Chang , Sang-Hun Seo , Yun-Seong Lee
发明人： Hong-Young Chang , Sang-Hun Seo , Yun-Seong Lee
IPC分类号： H01J37/32
摘要： Provided are a plasma generating apparatus and a substrate treating apparatus. The plasma generating apparatus includes a plurality of ground electrodes arranged inside a vacuum container and extending parallel to each other and power electrodes arranged between the ground electrodes. An area where a distance between the ground electrode and the power electrode is constant exists, and the power electrodes are tapered in a direction facing the substrate. The power electrodes are connected to an RF power source, and height of the power electrode is greater than that of the ground electrode in the direction facing the substrate.
摘要翻译：提供了一种等离子体发生装置和基板处理装置。等离子体发生装置包括布置在真空容器内并且彼此平行延伸的多个接地电极和布置在接地电极之间的电力电极。接地电极和功率电极之间的距离恒定的区域存在，并且功率电极在面向衬底的方向上是锥形的。电源电极连接到RF电源，并且功率电极的高度大于接地电极在朝向衬底的方向上的高度。

8. 发明申请

US20050017201A1 Apparatus using hybrid coupled plasma 有权
标题翻译：使用混合耦合等离子体的装置
公开(公告)号：US20050017201A1
公开(公告)日：2005-01-27
申请号：US10892259
申请日：2004-07-14
申请人： Gi-Chung Kwon , Hong-Young Chang , Yong-Kwan Lee
发明人： Gi-Chung Kwon , Hong-Young Chang , Yong-Kwan Lee
IPC分类号： H05H1/24 , H01J37/32 , G21G5/00
CPC分类号： H01J37/32174 , H01J37/32082 , H01J37/321
摘要： A hybrid coupled plasma type apparatus includes: a chamber having a gas-injecting unit; an electrostatic chuck in the chamber; an insulating plate over the gas-injecting unit; a high frequency generator; an impedance matching circuit connected to the high frequency generator; first and second antennas connected to the impedance matching circuit in parallel, a power of the high frequency generator being supplied to the first and second antennas; an electrode of a plate shape connected to one of the first and second antennas in serial, the power of the high frequency generator being supplied to the electrode; and a power distributor between the high frequency generator and one of the first and second antennas.
摘要翻译：混合耦合等离子体型装置包括：具有气体注入单元的室; 腔室中的静电卡盘; 气体注入单元上的绝缘板; 高频发生器; 连接到高频发生器的阻抗匹配电路; 第一和第二天线并联连接到阻抗匹配电路，高频发生器的功率被提供给第一和第二天线; 连接到第一和第二天线中的一个的板状电极，高频发生器的功率被提供给电极; 以及高频发生器与第一和第二天线之一之间的功率分配器。

9. 发明授权

US5627640A Method for measuring radical species distribution in plasma and an apparatus therefor 失效
标题翻译：用于测量血浆中自由基物质分布的方法及其装置
公开(公告)号：US5627640A
公开(公告)日：1997-05-06
申请号：US588308
申请日：1996-01-18
申请人： Hong-Young Chang , Pyung-Woo Lee , Yong-Jin Kim
发明人： Hong-Young Chang , Pyung-Woo Lee , Yong-Jin Kim
IPC分类号： G01N21/73 , G01J3/30
CPC分类号： G01N21/73
摘要： The present invention relates to a method for measuring radical species distribution in plasma by determining the intensity of the light emitted from the radical species and plasma parameters in plasma with the aid of optical and electrostatic probes, and an apparatus for measuring the radical species distribution. The method of the invention comprises the steps of: (i) measuring integral light intensity in a vacuum container by an optical probe inserted to the vacuum container; (ii) determining light intensity at each point of the vacuum container by differentiating the integral light intensity; (iii) measuring current and voltage applied to the electrostatic probe in the vacuum container; (iv) determining plasma parameters from the measured current and voltage; and, (v) measuring distribution of radical species from the light intensity and plasma parameters.
摘要翻译：本发明涉及通过使用光学和静电探针来测定从自由基物质发射的光的强度和等离子体中的等离子体参数以及用于测量自由基物质分布的装置来测量等离子体中的自由基物质分布的方法。本发明的方法包括以下步骤：（i）通过插入真空容器的光学探针测量真空容器中的积分光强度; （ii）通过微分积分光强度来确定真空容器的每个点处的光强度; （iii）测量施加到真空容器中的静电探针的电流和电压; （iv）从所测量的电流和电压确定等离子体参数; 和（v）从光强度和等离子体参数测量自由基物质的分布。

你已经成功收藏专利！

检索式保存成功!

IPRDB

热门服务

关于我们

友情链接

联系方式