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    • 5. 发明申请
    • METHOD FOR SEMICONDUCTOR CIRCUIT
    • 半导体电路方法
    • US20090132974A1
    • 2009-05-21
    • US12024107
    • 2008-01-31
    • Hiroyuki YOSHIMOTONobuyuki SugiiShinichi SaitoDigh Hisamoto
    • Hiroyuki YOSHIMOTONobuyuki SugiiShinichi SaitoDigh Hisamoto
    • G06F17/50
    • G06F17/5036
    • Capacity-gate voltage characteristics of a field-effect transistor having plural gates are measured against a voltage change in each one of the gates for an inverted MOSFET and for an accumulated MOSFET, respectively. These measurements together with numerical simulations provided from a model for quantum effects are used to determine flat band voltages between the plural gates and a channel. Next, an effective normal electric field is calculated as a vector line integral by using a set of flat band voltages for the measured capacity as a lower integration limit. Lastly, mobility depending on the effective normal electric field is calculated from current-gate voltage characteristic measurements and capacity measurements in a source-drain path, and the calculated mobility is substituted into an equation for a current-voltage curve between source and drain.
    • 针对反向MOSFET的栅极和积累的MOSFET中的每一个的电压变化分别测量具有多个栅极的场效应晶体管的容量栅极电压特性。 这些测量结果与从量子效应模型提供的数值模拟一起用于确定多个门和通道之间的平带电压。 接下来,通过使用一组用于测量容量的平带电压作为下积分极限,计算有效正常电场作为矢量线积分。 最后,根据源极 - 漏极路径中的电流 - 栅极电压特性测量和电容测量值计算出有效正常电场的迁移率,并将计算的迁移率代入源极和漏极之间的电流 - 电压曲线的方程式。