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    • 1. 发明授权
    • Collector mirror assembly and extreme ultraviolet light source device using said collector mirror assembly
    • 集光镜组件和使用所述收集镜组件的极紫外光源装置
    • US09029815B2
    • 2015-05-12
    • US13583471
    • 2011-03-02
    • Hiroto Sato
    • Hiroto Sato
    • G02B5/08G03F7/20H05G2/00
    • G03F7/70166G03F7/70891G03F7/70958G21K2201/064H05G2/001
    • A deterioration of the collector performance in an extreme ultraviolet light source device due to a heat deformation of the collector mirror assembly is to be prevented. The collector mirror assembly used in the extreme ultraviolet light source device comprises a plurality of reflective shells 21 with different diameters which are shaped as ellipsoids of revolution or hyperboloids of revolution, wherein the reflective shells 21 are arranged in a nested shape and the ends thereof are held by a holding structure 22. A cooling channel, through which a cooling medium flows is mounted at the reflective shell 21 in the axial direction of the reflective shell on the face being the back side of the reflective surface. This cooling channel acts as a reinforcement material and is able to suppress a heat deformation of the reflective shell 21. By using molybdenum as the material for the reflective shells 21, the heat deformation can be suppressed even further, and by providing cooling channels in the holding structure 22, the collector mirror assembly can be cooled even more efficiently and a heat deformation thereof can be suppressed.
    • 防止由于集光镜组件的热变形引起的极紫外光源装置的集电体性能的劣化。 在极紫外光源装置中使用的收集器反射镜组件包括多个具有不同直径的反射壳21,其形状为旋转的椭圆形或旋转双曲面,其中反射壳21以嵌套形状布置,其端部为 由保持结构22保持。冷却介质流过的冷却通道在反射壳体的轴向方向上安装在反射壳体21的作为反射表面的背面的面上。 该冷却通道用作增强材料,并且能够抑制反射壳体21的热变形。通过使用钼作为反射壳体21的材料,可以进一步抑制热变形,并且通过在 可以更有效地冷却收集镜组件,并且可以抑制其热变形。
    • 8. 发明授权
    • Radiation detection device and method of making the same
    • 辐射检测装置及其制作方法
    • US06940072B2
    • 2005-09-06
    • US10750945
    • 2004-01-05
    • Takuya HommeToshio TakabayashiHiroto Sato
    • Takuya HommeToshio TakabayashiHiroto Sato
    • G01T1/20G01T1/24G01T1/202
    • G01T1/2018
    • A radiation detection device includes a light-receiving device array with a plurality of light-receiving devices arranged on a substrate to form a light-receiving portion and a plurality of bonding pads electrically coupled to the light-receiving devices of the light-receiving portion to form a bonding pad portion. A scintillator layer is deposited over at least a portion of the light-receiving devices for converting radiaton into detectable light. A radiation-transmitable, moisture-resistant protective film covers at least the scintillator. A coating resin is located in proximity to a periphery of the moisture-resistant prptective film, with the periphery of the moisture-resistant protective film being fixed to the light-receiving device array with the coating resin.
    • 辐射检测装置包括:光接收装置阵列,其具有布置在基板上的多个光接收装置,以形成光接收部分;以及多个接合焊盘,其电耦合到光接收部分的光接收装置 以形成接合焊盘部分。 闪烁体层沉积在光接收装置的至少一部分上,用于将辐射转换成可检测的光。 辐射透射,防潮保护膜至少覆盖闪烁体。 涂层树脂位于防潮保护膜的周围附近,防潮保护膜的周边用涂布树脂固定在光接收装置阵列上。