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    • 4. 发明授权
    • X-ray generating apparatus
    • X射线发生装置
    • US4631743A
    • 1986-12-23
    • US653588
    • 1984-09-24
    • Takio TomimasuTsutomu NoguchiHiroshi TaninoSuguru Sugiyama
    • Takio TomimasuTsutomu NoguchiHiroshi TaninoSuguru Sugiyama
    • H01J35/00H05H7/00H05H13/04
    • H01J35/00H05H7/00
    • An X-ray generating apparatus provided with at least one deflecting means disposed between a freely selected pair of adjacent deflecting electromagnets and adapted to undulate electrons around a design orbit. When the deflecting means if formed of variable horizontally or vertically deflecting electromagnets capable of forming a variable magnetic field for electron on the orbit, the electrons are undulated around the design orbit and synchrotron radiation or powerful wiggler radiation from a wiggler is generated to irradiate a large area of a given substrate. Thus, in the transfer of patterns for the production of LSI devices for example, the X-ray generating apparatus enables highly intensive X-rays abundantly containing soft X-rays to be emitted uniformly to irradiate a wide area.
    • 一种X射线产生装置,设置有至少一个偏转装置,该偏转装置设置在自由选择的一对相邻的偏转电磁体之间并且适于在设计轨道周围波动电子。 当偏转装置如果由能够在轨道上形成电子的可变磁场的可变的水平或垂直偏转电磁体形成时,电子在设计轨道周围波动,同步加速器辐射或来自摆动器的强大的摆动辐射被产生以照射大的 给定基底的面积。 因此,例如,在用于生产LSI器件的图案的传送中,X射线产生装置使得能够均匀地发射含有软X射线的高密度X射线以照射广泛的区域。