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1. 发明授权

US06660665B2 Platen for electrostatic wafer clamping apparatus 有权
标题翻译：压板用于静电晶片夹紧装置
公开(公告)号：US06660665B2
公开(公告)日：2003-12-09
申请号：US10137790
申请日：2002-05-01
申请人： Hiroaki Yanagida , Hideaki Matsubara , Yoshiki Okuhara , Shoji Aoki , Naoki Kawashima , Bruce T. Williams , Toshio Uehara
发明人： Hiroaki Yanagida , Hideaki Matsubara , Yoshiki Okuhara , Shoji Aoki , Naoki Kawashima , Bruce T. Williams , Toshio Uehara
IPC分类号： H02N1300
CPC分类号： H02N13/00 , H01L21/6833 , Y10T279/23 , Y10T428/24917
摘要： A platen for electrostatic wafer clamping apparatus comprising a platen body of dielectric material and grains of electrically conductive material diffused in the dielectric material so that the platen has a relatively large electrostatic capacitance due to the diffusion of the conductive grains with the result that the platen provides an increased clamping force regardless of humidity. In accordance with another aspect of the invention, the thickness of the platen body can be decreased by an amount sufficient to maintain a constant clamping force with reduced applied voltage, to eliminate any residual voltage on the platen and to increase the speed of wafer release. The grains of electrically conductive material are present in an amount of from about 2.5 percent to about 15.0 percent of the volume of the platen body, and the grains of electrically conductive material are selected from the group consisting of carbonated transition metals, nitrified transition metals and carbonated grains. The dielectric material preferably is Al2O3, and the grains of electrically conductive material preferably are TiC and preferably in an amount of about 5% of the volume of the platen.
摘要翻译：一种用于静电晶片夹紧装置的压板，包括电介质材料的压板体和导电材料颗粒在电介质材料中扩散，使得压板由于导电颗粒的扩散而具有相对较大的静电电容，结果是压板提供增加夹紧力，而不管湿度如何。根据本发明的另一方面，压板体的厚度可以减小足够的量以保持具有降低的施加电压的恒定夹紧力，以消除压板上的任何残余电压并增加晶片释放的速度。导电材料的颗粒以压板体的体积的约2.5％至约15.0％的量存在，并且导电材料颗粒选自碳酸过渡金属，硝化过渡金属和碳酸化谷物。电介质材料优选为Al 2 O 3，导电材料的颗粒优选为TiC，优选为压板体积的约5％。

2. 发明授权

US5379644A Strain or stress gauge and method for detecting strain or stress of structure using the same, and plastic composite material for foreknowing progress of breakdown of structure and method using the same 失效
标题翻译：应变计和应变计及其结构的应变或应力检测方法，以及用于预测结构破坏进展的塑料复合材料及其使用方法
公开(公告)号：US5379644A
公开(公告)日：1995-01-10
申请号：US919526
申请日：1992-07-24
申请人： Hiroaki Yanagida , Masaru Miyayama , Norio Muto , Minoru Sugita , Teruyuki Nakatsuji , Yasushi Otsuka
发明人： Hiroaki Yanagida , Masaru Miyayama , Norio Muto , Minoru Sugita , Teruyuki Nakatsuji , Yasushi Otsuka
IPC分类号： G01B7/16 , G01L1/22 , G01L1/18
CPC分类号： G01B7/18 , G01L1/2287
摘要： A strain or stress gauge 1A is presented for measuring the stress of a structure or a member. The gauge 1A comprises a bundle of electric conductive fibers 3, and a pair of terminals 4, for measuring an electric resistance of the bundle of electric conductive fibers provided on both ends thereof. It presents a strain or stress gauge having a simple structure, which can be produced inexpensively, and its size can be chosen freely. It is possible to know not only the state of a strain or stress but also the history of stress in a structure or a structural member which, by the characteristics of a specific curve relating the stress/strain relationship of the gauge.
摘要翻译：提出了应变计或应力计1A用于测量结构或构件的应力。仪表1A包括一束导电纤维3和一对端子4，用于测量其两端设置的导电纤维束的电阻。它具有可以廉价生产的具有简单结构的应变计或应力计，其尺寸可以自由选择。可以通过与量规的应力/应变关系相关联的特定曲线的特性来知道应变或应力的状态，而且可以知道结构或结构构件中的应力历史。

3. 发明授权

US4209477A Process for preparing a film of densely packed structure 失效
标题翻译：制备密集结构薄膜的方法
公开(公告)号：US4209477A
公开(公告)日：1980-06-24
申请号：US871609
申请日：1978-01-23
申请人： Hiroaki Yanagida , Masayuki Nagai , Tadao Shimizu
发明人： Hiroaki Yanagida , Masayuki Nagai , Tadao Shimizu
IPC分类号： C04B33/32 , C04B35/634 , C04B35/636 , C04B35/638 , H01G4/12 , H01L21/48 , H05K1/03 , C04B35/64
CPC分类号： C04B35/63416 , C04B33/32 , C04B35/634 , C04B35/63424 , C04B35/63432 , C04B35/6365 , C04B35/638 , H01G4/12 , H01L21/4807 , H05K1/0306
摘要： A process for preparing dielectric or semiconductive films which have densely packed structures. In a process comprising spreading a powdery ceramic material suspended in a binder and solvent on to a base plate to form a thin layer and subjecting the layer to firing, the improvement being provisionally firing the thin layer to remove the binder and solvent, cooling the resulting thin layer, covering the thin layer with an organic film, compressing the thin layer and the film to densely pack the thin layer and to adhere the thin layer to the film, prior to the firing.
摘要翻译：一种制备具有密集堆积结构的电介质或半导体膜的方法。在包括将悬浮在粘合剂和溶剂中的粉末陶瓷材料撒在基板上以形成薄层并使该层烧成的方法中，改进是暂时烧制薄层以除去粘合剂和溶剂，冷却所得薄层，用有机薄膜覆盖薄层，压缩薄层和薄膜以在烧制之前密集地包装薄层并将薄层粘附到薄膜上。

4. 发明授权

US5461274A Humidity-sensitive actuator 失效
标题翻译：湿度敏感致动器
公开(公告)号：US5461274A
公开(公告)日：1995-10-24
申请号：US209782
申请日：1994-03-11
申请人： Isogai Yuji , Hiroaki Yanagida , Masaru Miyayama
发明人： Isogai Yuji , Hiroaki Yanagida , Masaru Miyayama
IPC分类号： F24F11/02 , G01N19/10 , H01L41/09 , H02N2/00 , H01L41/08
CPC分类号： H01L41/0926 , H01L41/094
摘要： A humidity-sensitive actuator includes a plate made of piezoelectric electrostrictive ceramic having a variable electric resistance region having a high moisture absorbing capability and defining a flat electrode attachment surface, and a high, fixed electric resistance region having a low moisture absorbing capability and defining a flat electrode attachment surface. The variable electric resistance region is joined to the high, fixed electric resistance region with electrodes on the flat electrode attachment surface on opposite sides of the plate for applying an electric voltage transversely through the plate. Under a high humidity condition, when the voltage is applied transversely across the plate through the electrodes by a power supply, an electric field is applied in different proportions to the variable and high, fixed electric resistance regions, which thereby contract by smaller and larger lengths, respectively, and produce a flexural displacement of the plate to serve as a humidity-sensitive actuator.
摘要翻译：湿敏致动器包括由压电电致伸缩陶瓷制成的板，其具有具有高吸湿能力并限定平坦电极附着表面的可变电阻区域，以及具有低吸湿能力的高固定电阻区域，平面电极附着面。可变电阻区域与板的相对侧上的平坦电极附着面上的电极接合到高固定电阻区域，用于横向穿过板施加电压。在高湿度条件下，当电源通过电源横向穿过电极施加电压时，电场以不同比例施加到可变和高固定电阻区域，从而由较小和较大的长度收缩并且产生板的弯曲位移以用作湿度敏感致动器。

5. 发明授权

US5352385A Joining agent for joining ceramic with electric joining method 失效
标题翻译：用电接合法连接陶瓷的接合剂
公开(公告)号：US5352385A
公开(公告)日：1994-10-04
申请号：US834258
申请日：1992-03-25
申请人： Hiroaki Yanagida , Akio Matsui , Tokumitsu Nishi , Kouji Okuda , Hiroshi Takai , Hisakiyo Hoshino , Masahi Numano , Natsumi Miyake
发明人： Hiroaki Yanagida , Akio Matsui , Tokumitsu Nishi , Kouji Okuda , Hiroshi Takai , Hisakiyo Hoshino , Masahi Numano , Natsumi Miyake
IPC分类号： C04B37/00 , H01B1/00 , H01B1/06
CPC分类号： C04B37/005 , C04B2235/666 , C04B2237/06 , C04B2237/062 , C04B2237/066 , C04B2237/08 , C04B2237/341 , C04B2237/343 , C04B2237/368
摘要： Described in a joining agent for joining electrically ceramic bodies by heating the joining agent inserted at the parts to be jointed between the ceramic bodies with an electric current flowing predominantly through the joining agent at high temperature. The joining agent is superior in the wetability and reactivity with the ceramics to ensure the joint part strength. The joining agent includes, as an electric conductor, an electric conductive component made of an ion conductor consisting of fluoride, chloride, and/or oxide, which forms carrier ions by the pre-heating and has an electric conductivity higher than that of the ceramic body at the electric current supplying time. During the supplying electric current to time, the joining agent has the electric resistance increased gradually at the molten state of the joining agent by decreasing the density or the mobility of the carrier ions. After the electric heating, the joining agent is changed into a composition having a high electric resistance and hence the electric current path moves smoothly.
摘要翻译： PCT No.PCT / JP91 / 00796 Sec。 371日期：1992年3月25日 102（e）1992年3月25日PCT PCT 1991年6月13日PCT公布。出版物WO91 / 19689 日期为1991年12月26日。描述了通过加热插入陶瓷体之间待接合部分的接合剂与主要通过接合剂高温流动的电流来接合电陶瓷体的接合剂。接合剂与陶瓷的润湿性和反应性优越，以确保接合部件强度。接合剂包括作为导电体的由由氟化物，氯化物和/或氧化物组成的离子导体制成的导电组分，其通过预热形成载流子离子，并且具有比陶瓷的导电性更高的导电性身体在电流供应时间。在供给电流期间，通过降低载流子离子的密度或迁移率，接合剂在接合剂的熔融状态下电阻逐渐增加。在电加热之后，接合剂变成具有高电阻的组合物，因此电流路径平稳地移动。

6. 发明授权

US4282200A Processes for the preparation of fiberous titanic acid metal salts 失效
标题翻译：制备纤维状钛酸金属盐的方法
公开(公告)号：US4282200A
公开(公告)日：1981-08-04
申请号：US124065
申请日：1980-02-25
申请人： Yasuo Nishikawa , Hiroaki Yanagida , Tadao Shimizu , Masayosi Hori , Tetsuro Yoshida
发明人： Yasuo Nishikawa , Hiroaki Yanagida , Tadao Shimizu , Masayosi Hori , Tetsuro Yoshida
IPC分类号： C01G23/047 , C01G23/00 , C30B29/32 , C30B29/62 , H01B3/48
CPC分类号： H01B3/48 , C01G23/003 , C01G23/006 , C01P2002/72 , C01P2004/10 , C01P2004/54
摘要： Fibrous compounds having a ratio of length to diameter of at least 10 of the formula MO.TiO.sub.2 wherein M is a bivalent metal and processes for preparing these compounds are described. Preferably M is selected from the group consisting of barium, strontium, calcium, magnesium, cobalt, lead, zinc, beryllium, and cadmium. The processes for preparing the compounds utilize fibrous potassium titanate hydrates or fibrous titanium dioxide hydrates both having a ratio of length to diameter of at least 10 as the starting material to prepare the compounds.
摘要翻译：描述了具有式MO.TiO 2的至少10的长度与直径之比的纤维化合物，其中M是二价金属及其制备方法。 M优选选自钡，锶，钙，镁，钴，铅，锌，铍和镉。制备这些化合物的方法利用纤维状钛酸钾水合物或纤维状二氧化钛水合物，其长度与直径之比至少为10，作为制备化合物的原料。

7. 发明授权

US4047971A Method for treating a glass surface 失效
标题翻译：玻璃表面处理方法
公开(公告)号：US4047971A
公开(公告)日：1977-09-13
申请号：US674879
申请日：1976-04-08
申请人： Hiroaki Yanagida , Tsuneo Ohashi
发明人： Hiroaki Yanagida , Tsuneo Ohashi
IPC分类号： C03C23/00 , C03C21/00 , H01L21/3105 , B08B3/00 , C03C17/22
CPC分类号： H01L21/3105 , C03C21/001
摘要： A surface treating process for alkali glass to prevent "whitening" thereof. The method comprises bringing the surface of glass into contact with an aqueous solution containing one or more metal nitrates, the nitrate being of a metal selected from the group consisting of iron, nickel, chromium and cobalt.
摘要翻译：用于碱玻璃的表面处理方法以防止“白化”。该方法包括使玻璃表面与含有一种或多种金属硝酸盐的水溶液接触，所述硝酸盐是选自铁，镍，铬和钴的金属。

8. 发明申请

US20100078626A1 P-TYPE SEMICONDUCTOR MATERIAL, SEMICONDUCTOR DEVICE, ORGANIC ELECTROLUMINESCENT DEVICE, AND METHOD FOR MANUFACTURING P-TYPE SEMICONDUCTOR MATERIAL 失效
标题翻译： P型半导体材料，半导体器件，有机电致发光器件以及制造P型半导体材料的方法
公开(公告)号：US20100078626A1
公开(公告)日：2010-04-01
申请号：US12311886
申请日：2007-09-28
申请人： Masahiro Orita , Takashi Narushima , Hiroaki Yanagida
发明人： Masahiro Orita , Takashi Narushima , Hiroaki Yanagida
IPC分类号： H01L29/12 , H01L29/06 , H01L51/50 , H01L21/20
CPC分类号： H05B33/26 , H01L51/5206
摘要： To provide a p-type semiconductor material having a band matching with a hole injection layer and suitable for an anode electrode that can be formed on a glass substrate or a polymer substrate, and to provide a semiconductor device. In the p-type semiconductor material, 1×1018 to 5×1020 cm−3 of Ag is contained in a compound containing Zn and Se, and the semiconductor device includes a substrate and a p-type electrode layer arranged on this substrate and having the aforementioned p-type semiconductor material.
摘要翻译：为了提供具有与空穴注入层匹配的带状的p型半导体材料，适用于能够形成在玻璃基板或聚合物基板上的阳极电极，并提供半导体器件。在p型半导体材料中，含有Zn和Se的化合物中含有1×1018〜5×1020cm-3的Ag，半导体装置包括基板和布置在该基板上的p型电极层，具有上述p型半导体材料。

9. 发明授权

US5618496A Gas sensors and their manufacturing methods 失效
标题翻译：气体传感器及其制造方法
公开(公告)号：US5618496A
公开(公告)日：1997-04-08
申请号：US406097
申请日：1995-03-16
申请人： Kazuhisa Hasumi , Kentaro Nagano , Shuuichi Kamiyama , Hiroaki Yanagida , Osamu Okada
发明人： Kazuhisa Hasumi , Kentaro Nagano , Shuuichi Kamiyama , Hiroaki Yanagida , Osamu Okada
IPC分类号： G01N27/00 , G01N27/12
CPC分类号： G01N27/12
摘要： P-type semiconductor 15 and n-type semiconductor 16 are formed as thick films or spray-coated onto electrodes 13 and 14 on top of substrates 11 and 12, with films of p-type semiconductor 15 and n-type semiconductor 16 being formed in such manner that they are in mutual contact. If a gas to be detected is introduced to the contact region while a bias voltage is being applied between the two electrodes, an output will be obtained in accordance with the concentration of flammable gas components in the gas being detected. In addition, if a film is formed from a material comprising a mixture of particles of p-type semiconductor and particles of n-type semiconductor, the bias voltage can be an AC voltage.
摘要翻译： P型半导体15和n型半导体16形成为厚膜或喷涂在基板11和12的顶部上的电极13和14上，其中p型半导体15和n型半导体16的膜形成在使他们相互接触。如果在两个电极之间施加偏置电压时将要检测的气体引入接触区域，则将根据被检测气体中的可燃气体成分的浓度获得输出。此外，如果由包含p型半导体颗粒和n型半导体颗粒的混合物的材料形成膜，偏压可以是AC电压。

10. 发明授权

US3952090A Method of making fibrous alkali titanates 失效
标题翻译：纤维状碱式钛酸盐的制备方法
公开(公告)号：US3952090A
公开(公告)日：1976-04-20
申请号：US517436
申请日：1974-10-23
申请人： Tadao Shimizu , Koshiro Hashimoto , Hiroaki Yanagida
发明人： Tadao Shimizu , Koshiro Hashimoto , Hiroaki Yanagida
IPC分类号： C01G23/00
CPC分类号： C01G23/005 , C01P2002/02 , C01P2004/10 , C01P2004/54 , C01P2004/61
摘要： A method of making fibrous alkali titanate comprising the steps of melting a mixture of titanium compound and alkali compound at a temperature higher than 1000.degree.C, cooling the melted product so as to form a glassy material, pulverizing the resultant glassy material, treating the pulverized powder in an autoclave in the presence of water at a temperature at least higher than 350.degree.C so as to form fibrous alkali titanate, and washing the treated product.
摘要翻译：一种制造纤维状碱金属钛酸盐的方法，包括在高于1000℃的温度下熔化钛化合物和碱性化合物的混合物的步骤，冷却熔融的产物以形成玻璃状材料，粉碎所得的玻璃状材料，处理粉碎的在高压釜中在至少高于350℃的温度下在水的存在下粉碎，以形成纤维状碱式钛酸盐，并洗涤处理过的产品。

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