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    • 4. 发明授权
    • Foreign particle inspection apparatus
    • 国外颗粒检测仪器
    • US5623340A
    • 1997-04-22
    • US391602
    • 1995-02-21
    • Kenji YamamotoFuminori HayanoTsuneyuki HagiwaraHideyuki Tashiro
    • Kenji YamamotoFuminori HayanoTsuneyuki HagiwaraHideyuki Tashiro
    • G01N21/88G01N21/94G01N21/956G06T1/00
    • G01N21/8806
    • A foreign particle inspection apparatus, for detecting a foreign particle on a reticle or the like includes an illumination system for irradiating an inspection area on a specimen with inspecting light, and plural light-receiving systems adapted to condense the scattered light from a foreign particle in the inspection area and having respective light-receiving areas on the specimen, each smaller than the inspection area. Each of the light-receiving areas of the plural light-receiving systems overlaps partially with at least one of the other light-receiving areas. The plural light-receiving systems are so arranged that any point in the inspection area is covered by the light-receiving areas of at least two of the plural light-receiving systems. A foreign particle in the inspection area is detected by a detection system, based on the lights condensed by the plural light receiving systems.
    • 用于检测掩模版等上的异物的异物检查装置包括:用于用检查光照射检体的检查区域的照明系统,以及适于将来自异物的散射光聚集的多个受光系统 检查区域,并且在样本上具有各自小于检查区域的各个光接收区域。 多个光接收系统的每个光接收区域与其它光接收区域中的至少一个部分地重叠。 多个光接收系统被布置成使得检查区域中的任何点都被多个光接收系统中的至少两个的光接收区域覆盖。 基于由多个光接收系统会聚的光,由检测系统检测检查区域中的异物。
    • 8. 发明申请
    • Water Spray Device for Ice Making Machine
    • 制冰机喷水装置
    • US20110113814A1
    • 2011-05-19
    • US13002962
    • 2009-07-21
    • Kiyoshi YamaokaTakashi HibinoNobuo KondoHideyuki TashiroTakeshi UedaAkira Harata
    • Kiyoshi YamaokaTakashi HibinoNobuo KondoHideyuki TashiroTakeshi UedaAkira Harata
    • F25C1/00
    • F25C1/25F25C2400/14F25C2500/02
    • Ice making water is uniformly supplied to ice making regions of an ice making section. A water sprayer (30) is provided with a water spray section (32) provided above an ice making section (12) so as to extend in the width direction thereof and supplying the ice making water to each ice making region (20) from water spray holes (34) arranged spaced from each other in the width direction, a buffer section (36) provided next to the water spray section (32) and having, at one end of the buffer section (36) in the width direction, an introduction section (38) for receiving the ice making water delivered under pressure, and a communication section (40) provided between the water spray section (32) and the buffer section (36) and leading the ice making water, which is received by the buffer section (36), to the water spray section (32) through the communication hole (42)
    • 制冰水均匀地供应到制冰部分的制冰区域。 喷水器(30)具有设置在制冰部分(12)上方以沿其宽度方向延伸的水喷射部分(32),并且将制冰水从水供应到每个制冰区域(20) 在宽度方向上彼此间隔布置的喷孔(34),设置在喷水部分(32)旁边的缓冲部分(36),并且在缓冲部分(36)的宽度方向上的一端具有 用于接收在压力下输送的制冰水的导入部(38),以及设置在所述喷水部(32)与所述缓冲部(36)之间并连通所述制冰水的连通部(40) 缓冲部分(36)通过连通孔(42)连接到喷水部分(32)
    • 9. 发明授权
    • Defect inspection apparatus
    • 缺陷检查装置
    • US5473426A
    • 1995-12-05
    • US427738
    • 1995-04-24
    • Fuminori HayanoHitoshi HamadaHideyuki Tashiro
    • Fuminori HayanoHitoshi HamadaHideyuki Tashiro
    • G01N21/89
    • G01N21/8901
    • An apparatus includes a light source for emitting a light beam, a light beam expander for expanding the light beam in a predetermined direction, and radiating the expanded light beam onto an object to be inspected, a scanning device for moving the object to be inspected relative to the light beam to be radiated onto the object to be inspected, and a photodetector for photoelectrically converting scattered light generated from a defect (including foreign matter) on the object to be inspected, and inspects the defect on the basis of a photoelectric conversion signal obtained from the photodetector. A light-shielding plate having a plurality of edges for limiting the light beam expanded by the light beam expander at the two end portions, in the expansion direction, of the light beam is arranged, and at least one of the plurality of edges is formed to be transverse to the relative scanning direction (Y direction).
    • 一种装置,包括用于发射光束的光源,用于沿预定方向扩展光束的光束扩展器,以及将扩展的光束照射到被检查物体上;扫描装置,用于移动被检查物体相对于 涉及要被照射到待检查物体上的光束;以及光电检测器,用于将由待检查物体上的缺陷(包括异物)产生的散射光光电转换,并且基于光电转换信号检查缺陷 从光电检测器获得。 布置有多个边缘的遮光板,用于限制由光束扩展器在光束的膨胀方向上的两个端部处扩展的光束,形成多个边缘中的至少一个边缘 横向于相对扫描方向(Y方向)。
    • 10. 发明授权
    • Refrigerating storage cabinet and control method for compressor thereof
    • 制冷储存柜及其压缩机的控制方法
    • US08474280B2
    • 2013-07-02
    • US12527581
    • 2007-02-26
    • Naoshi KondouAkihiko HiranoShinichi KagaMasahide YatoriHideyuki Tashiro
    • Naoshi KondouAkihiko HiranoShinichi KagaMasahide YatoriHideyuki Tashiro
    • F25B1/00
    • F25D29/00F25B49/025F25B2600/021F25B2600/2511F25D2700/12Y02B30/741
    • A deviation calculating unit 42 calculates a deviation between an internal temperature detected by a temperature sensor 35 and a target temperature provided from a target temperature setting unit 41 for each predetermined time period. The deviation is integrated by a deviation integrating unit 46. When the integrated value exceeds a predetermined reference value, a rotational speed of an inverter motor that drives a compressor is increased. Therefore, for example, even if an internal temperature temporarily rises because a door is opened temporarily and outside air flows into a storage compartment, because there is no sudden change in the integrated value of the temperature deviation and the rotational speed of the compressor does not react in an oversensitive manner and rapidly increase. Consequently the control is stable. Thus, an unnecessarily oversensitive response to a sudden change in an internal temperature can be prevented, enabling operation at a higher efficiency.
    • 偏差计算单元42计算每个预定时间段由温度传感器35检测到的内部温度与由目标温度设定单元41提供的目标温度之间的偏差。 偏差由偏差积分单元46积分。当积分值超过预定基准值时,驱动压缩机的变频电动机的转速增加。 因此,例如,即使内部温度暂时上升,门暂时打开,外部空气流入储藏室,因为温度偏差的积分值没有突然变化,压缩机的转速不会 以过敏的方式作出反应,并迅速增加。 因此,控制是稳定的。 因此,可以防止对内部温度的突然变化的不必要的过敏响应,使得能够以更高的效率进行操作。