会员体验
专利管家(专利管理)
工作空间(专利管理)
风险监控(情报监控)
数据分析(专利分析)
侵权分析(诉讼无效)
联系我们
交流群
官方交流:
QQ群: 891211   
微信请扫码    >>>
现在联系顾问~
热词
    • 8. 发明授权
    • Leakage inspection method and apparatus
    • 泄漏检查方法和装置
    • US06212942B1
    • 2001-04-10
    • US09172891
    • 1998-10-15
    • Hideaki HaraShoji Iriyama
    • Hideaki HaraShoji Iriyama
    • G01M308
    • G01M3/24
    • A leakage inspection method and apparatus having a pressure wave generating means, including an air supply source, a regulator, and a solenoid valve. A pressure wave of a fluid is applied to a normal flow path of an measurement object by the pressure wave generating means to detect internal leakage by measuring, by means of a microphone, a difference between the transfer time during which the pressure wave passes through the normal flow path and the transfer time during which the pressure wave passes through the leakage flow path. Accordingly, the internal leakage of the fluid, flowing in the leakage flow path bypassing the normal flow path of an equipment having a partition and the normal flow path separated by the partition, is detected, if any.
    • 一种具有压力波产生装置的泄漏检查方法和装置,包括空气供应源,调节器和电磁阀。 通过压力波产生装置将流体的压力波施加到测量对象的正常流动路径,以通过麦克风测量压力波通过的传递时间之间的差异来检测内部泄漏 正常流路和压力波通过泄漏流路的传送时间。 因此,如果有的话,检测到流过旁路通过具有分隔件的设备的正常流路的泄漏流路内的流体的内部泄漏和由隔板分开的正常流路。
    • 9. 发明授权
    • Stage apparatus and exposure apparatus provided with the stage apparatus
    • 设置有舞台装置的舞台装置和曝光装置
    • US6158298A
    • 2000-12-12
    • US166192
    • 1998-10-05
    • Hideaki Hara
    • Hideaki Hara
    • G12B5/00G03F7/20H01L21/027H01L21/68H01L21/683
    • G03F7/70691H01L21/68H01L21/6838Y10T74/20201Y10T74/20354
    • A stage apparatus comprises a pedestal, an X axis guide bar which is fixed on the pedestal, an X stage which is movable along an upper surface of the pedestal and the guide bar, and a Y stage which is placed over the X state and movable along the pedestal in a direction of the Y axis. Vacuum-pre-loadable static pressure air bearings, in which pressures of vacuum ports are independently controllable, are provided on a surface of the X stage opposing to the pedestal and on another surface of the X stage opposing to the X axis guide bar. By using the stage apparatus, the electric power consumption of driving means for movable units can be reduced, the amount of heat generation can be reduced, and the bearing gap can be adjusted highly accurately after assembling.
    • 舞台装置包括基座,固定在基座上的X轴导杆,可以沿着底座和导杆的上表面移动的X平台,以及设置在X状态上并可移动的Y平台 沿Y轴的方向沿基座。 真空预加载的静压空气轴承,其中真空端口的压力是可独立控制的,设置在与基座相对的X台的表面上,在与X轴导杆相对的X台的另一个表面上。 通过使用平台装置,能够减少可动部的驱动装置的电力消耗,能够减少发热量,能够在组装后高精度地调整轴承间隙。