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    • 1. 发明授权
    • Magneto-resistive layer arrangement and gradiometer with said layer arrangement
    • 具有所述层布置的磁阻层布置和梯度计
    • US07064649B2
    • 2006-06-20
    • US10344314
    • 2002-05-16
    • Peter SchmollngruberHenrik Siegle
    • Peter SchmollngruberHenrik Siegle
    • H01L43/00
    • B82Y25/00G01R33/093G01R33/096H01L43/08
    • A magnetoresistive layer system including a layer sequence including at least two magnetic layers, a non-magnetic, electrically conductive intermediate layer being arranged between them; the electrical resistance of the layer system being changeable as a function of an external magnetic field acting on the layer system. At least one magnetically hard layer is integrated in the layer system, at least in certain areas, applying a magnetic field at least in the area of a boundary surface between the magnetic layers and the intermediate layer. The magnetoresistive layer system is suitable in particular for use in a GMR sensor element including coupled multilayers or in an AMR sensor element having a barberpole structure. In addition, the system includes a gradiometer including a plurality of such layer systems.
    • 一种磁阻层系统,包括包括至少两个磁性层的层序列,布置在它们之间的非磁性导电中间层; 层系统的电阻可以作为作用在层系统上的外部磁场的函数而变化。 至少在一个磁层中集成了至少一个磁性硬层,至少在某些区域,至少在磁性层和中间层之间的边界面的区域中施加一个磁场。 磁阻层系统特别适用于包括耦合多层的GMR传感器元件或具有barberpole结构的AMR传感器元件。 此外,该系统包括包括多个这样的层系统的梯度计。
    • 4. 发明授权
    • Method of adjusting or locally modifying a magnetization in a layer of a magnetoresistive layer system, heat stamp for heating the magnetoresistive layer system, and use of same
    • 调整或局部改变磁阻层系统层中的磁化的方法,用于加热磁阻层系统的热标记及其使用
    • US07033849B2
    • 2006-04-25
    • US10614540
    • 2003-07-07
    • Henrik SiegleAndrew JohnsonUlrich May
    • Henrik SiegleAndrew JohnsonUlrich May
    • H01L21/00
    • G11C11/16B82Y25/00B82Y40/00G01R33/093H01F41/302Y10T29/49034Y10T29/49044
    • A method of adjusting or locally modifying the direction of magnetization of a ferromagnetic layer in a magnetoresistive layer system using a heat stamp is described, the ferromagnetic layer being stabilized over an antiferromagnetic layer. The antiferromagnetic layer is heated, using a heat stamp, over a threshold temperature, above which the influence of this layer on the direction of magnetization of the adjacent ferromagnetic layer disappears; subsequently, the ferromagnetic layer is exposed to an external magnetic field of a predefined direction, and finally the antiferromagnetic layer is cooled again below the threshold temperature. In addition, a heat stamp having a base body and a heatable stamp structure connected to the base body and matching the dimensions of or similar to the magnetoresistive layer system is described. The heat stamp and the method described are suitable in particular for manufacturing a magnetoresistive layer system operating by the spin valve principle, which has a plurality of magnetoresistive layer systems having at least partially different resulting directions of magnetization in the particular layers, the magnetoresistive layer systems being interconnected in the form of a Wheatstone bridge in particular.
    • 描述了使用热压力调整或局部改变磁阻层系统中的铁磁层的磁化方向的方法,铁磁层在反铁磁性层上稳定。 使用加热印模将反铁磁层加热到阈值温度以上,该层对相邻铁磁层的磁化方向的影响消失; 随后,铁磁层暴露于预定方向的外部磁场,最后将反铁磁层再次冷却到阈值温度以下。 此外,描述了具有连接到基体并具有匹配磁阻层系统的尺寸或类似于磁阻层系统的基体和可加热印模结构的热印。 所述热标记和所述方法特别适用于制造通过自旋阀原理操作的磁阻层系统,其具有多个具有至少部分不同的特定层中的磁化方向的磁阻层系统,磁阻层系统 以惠斯通电桥的形式相互联系。
    • 7. 发明授权
    • Device and method for measuring angles
    • 用于测量角度的装置和方法
    • US07170279B2
    • 2007-01-30
    • US10362316
    • 2001-08-21
    • Gunther HaasHenrik SiegleRalf Moenikes
    • Gunther HaasHenrik SiegleRalf Moenikes
    • G01B7/30
    • G01D5/145G01D5/24409G01D5/24476G01D5/2452G01D5/2497
    • A device for angle measurement, having at least one transducer wheel and at least one sensor, including at least one sensor element and cooperating with the transducer wheel, in which by means of the cooperation of the transducer wheel and the sensor, a pair, which can be associated with an angle to be measured, comprising one sine-wave signal and one cosine-wave signal can be obtained, in which at least two sensors are provided, whose sine-wave signals and cosine-wave signals, for obtaining an averaged sine-wave signal and averaged cosine-wave signal, and/or after the formation of an arc tangent signal from the respective averaged or unaveraged sine-wave signals or cosine-wave signals, can be put computationally into relation with one another by means of an evaluation device in order to obtain an averaged arc tangent signal.
    • 一种用于角度测量的装置,其具有至少一个换能器轮和至少一个传感器,包括至少一个传感器元件并与换能器轮配合,其中通过换能器轮和传感器的配合,一对 可以与要测量的角度相关联,包括一个正弦波信号和一个余弦波信号,其中提供至少两个传感器,其中的正弦波信号和余弦波信号用于获得平均 正弦波信号和平均余弦波信号,和/或在来自相应的平均或未平铺的正弦波信号或余弦波信号的反正切信号的形成之后,可以通过以下方式相互关联: 评估装置,以获得平均的反正切信号。
    • 8. 发明授权
    • Magnetoresistive sensor element and method for reducing the angular error of a magnetoresistive sensor element
    • 磁阻传感器元件和减小磁阻传感器元件角度误差的方法
    • US07095596B2
    • 2006-08-22
    • US10535475
    • 2003-10-09
    • Peter SchmollngruberIngo HerrmannHenrik SiegleHartmut KittelPaul FarberUlrich May
    • Peter SchmollngruberIngo HerrmannHenrik SiegleHartmut KittelPaul FarberUlrich May
    • G11B5/33G11B5/127
    • B82Y25/00G01R33/093
    • A magnetoresistive sensor element is provided, having a magnetoresistive layer system which, in top view, is at least regionally striated. The sensor element operates on the basis of the GMR effect and is constructed according to the spin valve principle, the striated layer system featuring a reference layer having a direction of magnetization substantially uninfluenced by a direction of an outer magnetic field acting on it. During operation, the sensor element provides a measuring signal which changes as a function of a measurement angle between the component of the field strength of the outer magnetic field lying in the plane of the layer system, and the direction of magnetization, and from which this measurement angle is able to be ascertained. In addition, observed in a top view of the striated layer system, the angle between the direction of magnetization in the absence of the outer magnetic field and the longitudinal direction of the striated layer system is set in such a way that in response to an influence of the outer magnetic field having a defined field strength, which is selected from a predefined work interval, the angle error of the layer system, as a function of this angle and the field strength, is minimal.
    • 提供了一种磁阻传感器元件,具有磁阻层系统,其在顶视图中至少是区域性条纹化的。 传感器元件基于GMR效应进行操作,并且根据自旋阀原理构造,具有参考层的条纹层系统具有基本上不受作用在其上的外部磁场的方向的磁化方向的磁化方向。 在操作期间,传感器元件提供测量信号,该测量信号根据位于层系统的平面中的外部磁场的场强的分量与磁化方向之间的测量角度而变化,并且由此 可以确定测量角度。 此外,在条纹层系统的俯视图中观察到,在没有外磁场的磁化方向与条纹层系统的纵向方向之间的角度被设定为响应于影响 具有定义的场强的外部磁场,其从预定义的工作间隔中选择,层系统的角度误差作为该角度和场强的函数是最小的。
    • 10. 发明申请
    • Sensor element and gradiometer assemblage, use thereof for measuring magnetic field gradients, and method therefor
    • 传感器元件和梯度仪组合,其用于测量磁场梯度的方法及其方法
    • US20050073301A1
    • 2005-04-07
    • US10400863
    • 2003-03-26
    • Ingo HerrmannHenrik Siegle
    • Ingo HerrmannHenrik Siegle
    • G01R33/022G01R33/09G01R33/02
    • G01R33/022G01R33/09
    • A sensor element is described having a substrate and a first magnetoresistive layered assemblage having at least locally a first strip having a first strip width, and a second magnetoresistive layered assemblage having at least locally a second strip having a second strip width different from the first strip width. A gradiometer assemblage is described having at least two gradiometer bridges which have magnetoresistive, at least locally strip-shaped, layered assemblages of this kind, the strips in the individual gradiometer bridges being of different widths. This sensor element or gradiometer assemblage is suitable in particular for measuring magnetic field gradients over at least five orders of magnitude at magnetic field strengths from 1 μT to 30 mT, in particular from 1 μT to 10 mT. A method for measuring magnetic field gradients using a sensor element or a gradiometer assemblage of this kind is described, an overall measurement range exceeding the measurement range of an individual layered assemblage being obtained by way of a different setting of the width of the strips.
    • 传感器元件被描述为具有衬底和至少局部地具有第一条带宽度的第一条带的第一磁阻层叠组件,以及至少局部地具有第二条带的第二磁阻层叠组件,第二条带具有不同于第一条带 宽度。 描述了具有至少两个梯度计桥的梯度计组合,其具有这种类型的至少局部带状的层状组合的磁阻,至少局部带状的层状组合,各个梯度计桥中的条具有不同的宽度。 该传感器元件或梯度计组合特别适用于在1μT至30 mT,特别是1μT至10 mT的磁场强度下测量至少五个数量级的磁场梯度。 描述了使用这种传感器元件或梯度计组合来测量磁场梯度的方法,其总体测量范围超过通过条带宽度的不同设置获得的各个层叠组合的测量范围。