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    • 4. 发明申请
    • Wafer Stocker
    • 晶圆储存库
    • US20130175908A1
    • 2013-07-11
    • US13470362
    • 2012-05-14
    • Sheng-Jung ChangHang-Hao Feng
    • Sheng-Jung ChangHang-Hao Feng
    • H05K5/02
    • H01L21/67769
    • A wafer stocker is provided in present invention comprising a main body having an opening communicating with an inner accommodation space, a plurality of storage cells for wafer pod disposed in said main body, and an embedded storage shelf mounting in said accommodation space of said main body via said opening, said embedded storage shelf is provided with a plurality of storage cells for wafer pods which may combine with the storage cells in said main body to serve jointly as the storage cells of the entire said wafer stocker, wherein said embedded storage shelf may be removed from said accommodation space to be replaced with an embedded wafer sorter.
    • 本发明提供了一种晶片储片器,其特征在于,包括具有与内部容置空间连通的开口的主体,设置在所述主体中的用于晶片容器的多个存储单元,以及安装在所述主体的所述容置空间中的嵌入式存储架 通过所述开口,所述嵌入式存储架设置有多个用于晶片盒的存储单元,所述存储单元可以与所述主体中的存储单元组合以共同作为整个所述晶片储片器的存储单元,其中所述嵌入式存储架可以 从所述容纳空间移除以用嵌入式晶片分选器代替。