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1. 发明授权

US08818146B2 Silica-on-silicon waveguides and related fabrication methods 有权
标题翻译：二氧化硅 - 硅波导和相关制造方法
公开(公告)号：US08818146B2
公开(公告)日：2014-08-26
申请号：US13494707
申请日：2012-06-12
申请人： Kerry Vahala , Hansuek Lee , Tong Chen , Jiang Li
发明人： Kerry Vahala , Hansuek Lee , Tong Chen , Jiang Li
IPC分类号： G02B6/12 , G02B6/10 , H01L21/00 , H01L21/302 , H01L21/461 , G02B6/136
CPC分类号： G02B6/136
摘要： A method of manufacturing a waveguide eliminates a prior art reflow step and introduces certain new steps that permit fabricating of an ultra-low loss waveguide element on a silicon chip. The ultra-low loss waveguide element may be adapted to fabricate a number of devices, including a wedge resonator and a ultra-low loss optical delay line having an extended waveguide length.
摘要翻译：制造波导的方法消除了现有技术的回流步骤，并且引入允许在硅芯片上制造超低损耗波导元件的某些新步骤。超低损耗波导元件可以适于制造多个器件，包括具有扩展的波导长度的楔形谐振器和超低损耗光学延迟线。

2. 发明申请

US20150092808A1 CHIP-BASED LASER RESONATOR DEVICE FOR HIGHLY COHERENT LASER GENERATION 有权
标题翻译：基于芯片的激光共振器器件，用于高度相干激光产生
公开(公告)号：US20150092808A1
公开(公告)日：2015-04-02
申请号：US13525147
申请日：2012-06-15
申请人： Jiang LI , Hansuek LEE , Tong CHEN , Kerry VAHALA
发明人： Jiang LI , Hansuek LEE , Tong CHEN , Kerry VAHALA
IPC分类号： H01S5/10 , H01S5/227
CPC分类号： H01S5/2275 , H01S3/0632 , H01S3/083 , H01S3/094057 , H01S3/0941 , H01S3/176 , H01S3/30 , H01S5/1075 , H01S2301/02
摘要： A highly-coherent chip-based laser generating system includes a disk resonator incorporating a wedge structure fabricated from a silicon dioxide layer of a chip. The disk resonator is operable to generate a highly-coherent laser from a low-coherence optical pump input provided at an optical power level as low as 60 μW. The disk resonator is fabricated with sub-micron cavity size control that allows generation of a highly-coherent laser using a controllable Stimulated Brillouin Scattering process that includes matching of a cavity free-spectral-range to a Brillouin shift frequency in silica. While providing several advantages due to fabrication on a chip, the highly-coherent laser produced by the disk resonator may feature a Schawlow-Townes noise level as low as 0.06 Hz2/Hz (measured with the coherent laser at a power level of about 400 μW) and a technical noise that is at least 30 dB lower than the low-coherence optical pump input.
摘要翻译：高度相干的基于芯片的激光发生系统包括一个包含由芯片的二氧化硅层制成的楔形结构的光盘谐振器。盘式谐振器可操作以从低至60μW的光功率级提供的低相干光泵输入产生高相干激光。盘式谐振器采用亚微米腔体尺寸控制制造，其允许使用可控激励的布里渊散射方法产生高相干激光，其包括空腔自由光谱范围与二氧化硅中的布里渊移动频率的匹配。虽然由于在芯片上的制造而提供了几个优点，但是由盘式谐振器产生的高相干激光器可以具有低至0.06Hz2 / Hz的Schwlow-Townes噪声电平（以约400μW的功率水平的相干激光器测量））和比低相干光泵输入低至少30 dB的技术噪声。

3. 发明授权

US08917444B2 Chip-based frequency comb generator with microwave repetition rate 有权
标题翻译：基于芯片的频率梳发生器，具有微波重复率
公开(公告)号：US08917444B2
公开(公告)日：2014-12-23
申请号：US13525189
申请日：2012-06-15
申请人： Jiang Li , Hansuek Lee , Tong Chen , Kerry Vahala
发明人： Jiang Li , Hansuek Lee , Tong Chen , Kerry Vahala
IPC分类号： G02F2/02 , G02F1/225
CPC分类号： G02F1/353 , G02F1/2257 , G02F2201/063 , G02F2201/17 , G02F2201/58 , G02F2202/09 , G02F2202/105 , G02F2203/15 , G02F2203/54 , G02F2203/56 , G02F2203/69
摘要： A frequency comb generator fabricated on a chip with elimination of a disadvantageous reflow process, includes an ultra-high Q disk resonator having a waveguide that is a part of a wedge structure fabricated from a silicon dioxide layer of the chip. The disk resonator allows generation of a frequency comb with a mode spacing as low as 2.6 GHz and up to 220 GHz. A surface-loss-limited behavior of the disk resonator decouples a strong dependence of pumping threshold on repetition rate.
摘要翻译：制造在芯片上的消除不利的回流工艺的频率梳发生器包括具有作为由芯片的二氧化硅层制成的楔形结构的一部分的波导的超高Q盘谐振器。磁盘谐振器允许产生低至2.6GHz和高达220GHz的模式间隔的频率梳。盘式谐振器的表面损耗受限行为使抽水阈值对重复率的强烈依赖性解耦。

4. 发明申请

US20120321245A1 SILICA-ON-SILICON WAVEGUIDES AND RELATED FABRICATION METHODS 有权
标题翻译：二氧化硅光波导和相关制造方法
公开(公告)号：US20120321245A1
公开(公告)日：2012-12-20
申请号：US13494707
申请日：2012-06-12
申请人： Kerry VAHALA , Hansuek LEE , Tong CHEN , Jiang LI
发明人： Kerry VAHALA , Hansuek LEE , Tong CHEN , Jiang LI
IPC分类号： G02B6/125 , G02B6/136 , H01L21/02 , G02B6/10
CPC分类号： G02B6/136
摘要： A method of manufacturing a waveguide eliminates a prior art reflow step and introduces certain new steps that permit fabricating of an ultra-low loss waveguide element on a silicon chip. The ultra-low loss waveguide element may be adapted to fabricate a number of devices, including a wedge resonator and a ultra-low loss optical delay line having an extended waveguide length.
摘要翻译：制造波导的方法消除了现有技术的回流步骤，并且引入允许在硅芯片上制造超低损耗波导元件的某些新步骤。超低损耗波导元件可以适于制造多个器件，包括具有扩展的波导长度的楔形谐振器和超低损耗光学延迟线。

5. 发明申请

US20120320448A1 CHIP-BASED FREQUENCY COMB GENERATOR WITH MICROWAVE REPETITION RATE 有权
标题翻译：具有微波重复速率的基于芯片的频率发电机
公开(公告)号：US20120320448A1
公开(公告)日：2012-12-20
申请号：US13525189
申请日：2012-06-15
申请人： Jiang LI , Hansuek LEE , Tong CHEN , Kerry VAHALA
发明人： Jiang LI , Hansuek LEE , Tong CHEN , Kerry VAHALA
IPC分类号： G02F2/02 , C03C25/68 , C03C25/22
CPC分类号： G02F1/353 , G02F1/2257 , G02F2201/063 , G02F2201/17 , G02F2201/58 , G02F2202/09 , G02F2202/105 , G02F2203/15 , G02F2203/54 , G02F2203/56 , G02F2203/69
摘要： A frequency comb generator fabricated on a chip with elimination of a disadvantageous reflow process, includes an ultra-high Q disk resonator having a waveguide that is a part of a wedge structure fabricated from a silicon dioxide layer of the chip. The disk resonator allows generation of a frequency comb with a mode spacing as low as 2.6 GHz and up to 220 GHz. A surface-loss-limited behavior of the disk resonator decouples a strong dependence of pumping threshold on repetition rate.
摘要翻译：制造在芯片上的消除不利的回流工艺的频率梳发生器包括具有作为由芯片的二氧化硅层制成的楔形结构的一部分的波导的超高Q盘谐振器。磁盘谐振器允许产生低至2.6GHz和高达220GHz的模式间隔的频率梳。盘式谐振器的表面损耗受限行为使抽水阈值对重复率的强烈依赖性解耦。

6. 发明授权

US09293887B2 Chip-based laser resonator device for highly coherent laser generation 有权
标题翻译：用于高度相干激光产生的基于芯片的激光谐振器装置
公开(公告)号：US09293887B2
公开(公告)日：2016-03-22
申请号：US13525147
申请日：2012-06-15
申请人： Jiang Li , Hansuek Lee , Tong Chen , Kerry Vahala
发明人： Jiang Li , Hansuek Lee , Tong Chen , Kerry Vahala
IPC分类号： H01S5/10 , H01S3/30 , H01S3/063 , H01S3/083 , H01S3/094 , H01S3/0941 , H01S3/17
CPC分类号： H01S5/2275 , H01S3/0632 , H01S3/083 , H01S3/094057 , H01S3/0941 , H01S3/176 , H01S3/30 , H01S5/1075 , H01S2301/02
摘要： A highly-coherent chip-based laser generating system includes a disk resonator incorporating a wedge structure fabricated from a silicon dioxide layer of a chip. The disk resonator is operable to generate a highly-coherent laser from a low-coherence optical pump input provided at an optical power level as low as 60 μW. The disk resonator is fabricated with sub-micron cavity size control that allows generation of a highly-coherent laser using a controllable Stimulated Brillouin Scattering process that includes matching of a cavity free-spectral-range to a Brillouin shift frequency in silica. While providing several advantages due to fabrication on a chip, the highly-coherent laser produced by the disk resonator may feature a Schawlow-Townes noise level as low as 0.06 Hz2/Hz (measured with the coherent laser at a power level of about 400 μW) and a technical noise that is at least 30 dB lower than the low-coherence optical pump input.
摘要翻译：高度相干的基于芯片的激光发生系统包括一个包含由芯片的二氧化硅层制成的楔形结构的光盘谐振器。盘式谐振器可操作以从低至60μW的光功率级提供的低相干光泵输入产生高相干激光。盘式谐振器采用亚微米腔体尺寸控制制造，其允许使用可控激励的布里渊散射方法产生高相干激光，其包括空腔自由光谱范围与二氧化硅中的布里渊移动频率的匹配。虽然由于在芯片上的制造而提供了几个优点，但是由盘式谐振器产生的高相干激光器可以具有低至0.06Hz2 / Hz的Schwlow-Townes噪声电平（以约400μW的功率水平的相干激光器测量））和比低相干光泵输入低至少30 dB的技术噪声。

7. 发明申请

US20150236784A1 STABILIZED MICROWAVE-FREQUENCY SOURCE 有权
标题翻译：稳定的微波源
公开(公告)号：US20150236784A1
公开(公告)日：2015-08-20
申请号：US14605977
申请日：2015-01-26
申请人： Kerry Vahala , Scott Diddams , Jiang Li , Xu Yi , Hansuek Lee
发明人： Kerry Vahala , Scott Diddams , Jiang Li , Xu Yi , Hansuek Lee
IPC分类号： H04B10/2507 , H04B10/2575
CPC分类号： H04B10/2507 , H03B17/00 , H03L7/08 , H03L7/16 , H04B10/2504 , H04B10/2575 , H04B10/503 , H04B2210/006 , H04L7/0075 , H04L7/0091
摘要： A microwave-frequency source at frequency fM comprises: a dual optical-frequency reference source, an electro-optic sideband generator, an optical bandpass filter, an optical detector, a reference oscillator, an electrical circuit, and a voltage-controlled oscillator (VCO). The sideband generator modulates dual optical reference signals at v2 and v1 to generate sideband signals at v1±n1fM and v2±n2fM. The bandpass filter transmits sideband signals at v1+N1fM and v2−N2fM. The optical detector generates a beat note at (v2−N2fM)−(v1+N1fM). The beat note and a reference oscillator signal are processed by the circuit to generate a loop-filtered error signal to input to the VCO. Output of the VCO at fM drives the sideband generator and forms the microwave-frequency output signal. The resultant frequency division results in reduced phase noise on the microwave-frequency signal.
摘要翻译：频率fM的微波频率源包括：双光频参考源，电光边带发生器，光带通滤波器，光检测器，参考振荡器，电路和压控振荡器（VCO ）。边带发生器在v2和v1处调制双光参考信号，以在v1±n1fM和v2±n2fM产生边带信号。带通滤波器发送v1 + N1fM和v2-N2fM的边带信号。光学检测器在（v2-N2fM） - （v1 + N1fM）处产生节拍。拍音和参考振荡器信号由电路处理以产生环路滤波的误差信号以输入到VCO。在fM处的VCO的输出驱动边带发生器并形成微波频率输出信号。所得到的分频导致微波频率信号上的相位噪声减小。

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