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    • 2. 发明授权
    • Electron spectroscopy employing controlled surface charging
    • 采用受控表面充电的电子光谱
    • US06720556B2
    • 2004-04-13
    • US09847583
    • 2001-05-03
    • Hagai CohenIsrael Rubinstein
    • Hagai CohenIsrael Rubinstein
    • G01N23227
    • G01N23/227B82Y15/00H01J2237/2522
    • A method of examining a sample, including: performing a first spectroscopic analysis of a surface portion of the sample when the sample surface portion is in a first electrical charge state; placing the sample surface portion in a second electrical charge state that is different from the first electrical charge state and performing a second spectroscopic analysis of the surface portion of the sample when the sample surface portion is in the second electrical charge state; and comparing the first spectroscopic analysis result with the second spectroscopic analysis result to obtain at least one of structural and electrical information about the sample.
    • 一种检查样品的方法,包括:当样品表面部分处于第一电荷状态时,对样品的表面部分进行第一光谱分析; 将样品表面部分置于不同于第一电荷状态的第二电荷状态,并且当样品表面部分处于第二电荷状态时,对样品的表面部分进行第二光谱分析; 以及将所述第一光谱分析结果与所述第二光谱分析结果进行比较,以获得关于所述样品的结构和电信息中的至少一个。
    • 3. 发明授权
    • Electrical measurements in samples
    • 样品电气测量
    • US07148478B2
    • 2006-12-12
    • US10987192
    • 2004-11-15
    • Hagai CohenIgor Lubomirsky
    • Hagai CohenIgor Lubomirsky
    • H01J37/26G01R31/305
    • G01N27/66G01N2223/076G01N2223/079G01N2223/081
    • A method and device are presented for measuring the electrical properties of a specimen. The specimen is excited with high energy radiation to cause emission of internal charged particles from the specimen. Electrical power is supplied to a circuit, that is formed by the specimen and any added component connected to a back contact of the specimen. The electric power supply includes at least one of the following: irradiating the circuit with low energy charged particles; subjecting the circuit to an external field of the kind affecting the flux of emitted internal charged particles, and supplying a bias voltage to the back contact of the specimen. During the power supply to the specimen, at least one of the following is carried out: an electric current through the specimen is measured, and the emitted charged particles are analyzed versus their energy (using a contactless voltmeter) which provides local potential values at chemical entities of the specimen. This technique enables determination of rich, chemically resolved, electrical properties of a specimen, such as I–V characteristic, and/or evaluation of a work function characteristic, and/or characterization of electric leakage or breakdown conditions of the sample, and/or characterization of accumulation of charge within at least one region of the sample, and/or chemically resolved photovoltaic characteristics (photovoltage and/or photocurrent) of the sample.
    • 提出了一种用于测量样品的电性能的方法和装置。 样品被高能量辐射激发,从样品中发出内部带电粒子。 电力被供给到由样本和连接到样品的背接触的任何附加组分形成的电路。 电源包括以下至少之一:用低能量带电粒子照射电路; 对电路进行影响发射的内部带电粒子的通量的外部场,并向样品的背接触提供偏置电压。 在向样品供电期间,进行以下至少一项:测量通过样品的电流,并分析发射的带电粒子与其能量(使用非接触式电压表)进行分析,其在化学品中提供局部电位值 标本的实体。 该技术能够测定样品的富集,化学拆分的电特性,例如IV特性,和/或功函数特征的评估,和/或样品的漏电或击穿条件的表征,和/或表征 在样品的至少一个区域内的电荷积累和/或样品的化学分辨光伏特性(光电压和/或光电流)。
    • 4. 发明申请
    • Electrical measurements in samples
    • US20060103395A1
    • 2006-05-18
    • US10987192
    • 2004-11-15
    • Hagai CohenIgor Lubomirsky
    • Hagai CohenIgor Lubomirsky
    • G01R31/302
    • G01N27/66G01N2223/076G01N2223/079G01N2223/081
    • A method and device are presented for measuring the electrical properties of a specimen. The specimen is excited with high energy radiation to cause emission of internal charged particles from the specimen. Electrical power is supplied to a circuit, that is formed by the specimen and any added component connected to a back contact of the specimen. The electric power supply includes at least one of the following: irradiating the circuit with low energy charged particles; subjecting the circuit to an external field of the kind affecting the flux of emitted internal charged particles, and supplying a bias voltage to the back contact of the specimen. During the power supply to the specimen, at least one of the following is carried out: an electric current through the specimen is measured, and the emitted charged particles are analyzed versus their energy (using a contactless voltmeter) which provides local potential values at chemical entities of the specimen. This technique enables determination of rich, chemically resolved, electrical properties of a specimen, such as I-V characteristic, and/or evaluation of a work function characteristic, and/or characterization of electric leakage or breakdown conditions of the sample, and/or characterization of accumulation of charge within at least one region of the sample, and/or chemically resolved photovoltaic characteristics (photovoltage and/or photocurrent) of the sample.
    • 5. 发明授权
    • Method and system for determining depth profiling
    • 确定深度剖面的方法和系统
    • US08507853B2
    • 2013-08-13
    • US13124224
    • 2009-10-22
    • Hagai Cohen
    • Hagai Cohen
    • H01J37/26
    • H01J37/26G01N23/2273G01N23/2276
    • The present invention relates to a novel system and method for the determination of depth profiling with improved accuracy and reliability. The method comprises obtaining spectroscopic data from the sample while under at least two different electrical conditions of the sample, the spectroscopic data comprising a signal of charged particles emitted from the sample, and being indicative of a change in amplitude, spectral position and spectral shape of the signal from the sample while under different electrical conditions of the sample, the change being indicative of the compositional profile and spatial distribution for at least one chemical element in the sample along a direction through the sample.
    • 本发明涉及一种以提高的精度和可靠性确定深度剖面的新型系统和方法。 该方法包括在样品的至少两个不同电气条件下从样品获得光谱数据,光谱数据包括从样品发射的带电粒子的信号,并且指示振幅,光谱位置和光谱形状的变化 来自样品的信号在样品的不同电气条件下,该变化指示沿着穿过样品的方向的样品中至少一种化学元素的组成分布和空间分布。
    • 7. 发明申请
    • METHOD AND SYSTEM FOR DETERMINING DEPTH PROFILING
    • 用于确定深度分布的方法和系统
    • US20110210246A1
    • 2011-09-01
    • US13124224
    • 2009-10-22
    • Hagai COHEN
    • Hagai COHEN
    • H01J40/00
    • H01J37/26G01N23/2273G01N23/2276
    • The present invention relates to a novel system and method for the determination of depth profiling with improved accuracy and reliability. The method comprises obtaining spectroscopic data from the sample while under at least two different electrical conditions of the sample, the spectroscopic data comprising a signal of charged particles emitted from the sample, and being indicative of a change in amplitude, spectral position and spectral shape of the signal from the sample while under different electrical conditions of the sample, the change being indicative of the compositional profile and spatial distribution for at least one chemical element in the sample along a direction through the sample.
    • 本发明涉及一种以提高的精度和可靠性确定深度剖面的新型系统和方法。 该方法包括在样品的至少两个不同电气条件下从样品获得光谱数据,光谱数据包括从样品发射的带电粒子的信号,并且指示振幅,光谱位置和光谱形状的变化 来自样品的信号在样品的不同电气条件下,该变化指示沿着穿过样品的方向的样品中至少一种化学元素的组成分布和空间分布。