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    • 4. 发明授权
    • Process for producing ultrathin homogenous metal layers
    • 生产超薄均质金属层的方法
    • US06946386B2
    • 2005-09-20
    • US10854759
    • 2004-05-25
    • Gernot SteinlesbergerManfred EngelhardtEugen Unger
    • Gernot SteinlesbergerManfred EngelhardtEugen Unger
    • C23C18/31C23C28/02H01L21/4763
    • C23C18/31C23C28/023
    • A method of forming an ultrathin homogenous metal layer that serves as base metallization for formation of contact locations and/or contact pads and/or wirings of an integrated electronic component. The method includes the steps of depositing a first metal layer on a substrate at least in regions, and producing a second metal layer on the first metal layer at least in regions, component(s) of the second metal layer have a more positive redox potential than component(s) of the first metal layer, wherein ultrathin homogenous deposition of the second metal layer is effected by wet-chemical, current-free, electrochemical redox processes by element exchange from one or more metal salts as oxidant with at least a top metal atomic layer of the first metal layer as reductant.
    • 形成用于形成集成电子部件的接触位置和/或接触焊盘和/或布线的基底金属化的超薄均匀金属层的方法。 该方法包括以下步骤:至少在区域中在衬底上沉积第一金属层,并且至少在区域中在第一金属层上产生第二金属层,第二金属层的组分具有更正的氧化还原电位 其中第二金属层的超薄均匀沉积通过湿化学,无电流的电化学氧化还原过程通过元素交换从一种或多种金属盐作为氧化剂与至少一个顶部进行 第一金属层的金属原子层作为还原剂。