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    • 1. 发明授权
    • Radiation-emitting semiconductor diode and method of manufacturing such
a diode
    • 辐射发射半导体二极管及其制造方法
    • US5703894A
    • 1997-12-30
    • US538267
    • 1995-10-03
    • Adriaan ValsterJohannes A. De PoorterGerard A. Acket
    • Adriaan ValsterJohannes A. De PoorterGerard A. Acket
    • H01L21/18H01L21/20H01L21/22H01L21/329H01L33/00H01L33/06H01S5/16H01S5/20H01S5/32H01S5/34H01S5/343H02S3/19
    • H01L33/06B82Y20/00H01L21/182H01L33/0062H01S5/162H01S5/2059H01S5/3202H01S5/3209H01S5/3413H01S5/3432
    • The invention relates to a radiation-emitting semiconductor diode, in particular a laser diode, whose active layer (3) comprises a II-V mixed crystal in which various elements, for example III elements, may be present in orderly or disorderly arrangement. Such a mixed crystal is InGaP whose emission lies below 1 .mu.m. In the known diode, catastrophic optical degradation is suppressed in that the active layer (3) has an orderly distribution in the active region (3A) and a disorderly distribution of the elements in a passive region (3B) situated near an exit surface (51). The known diode has a low efficiency and a high starting current. In a diode according to the invention, the distribution of the different elements is disorderly in the active region (3A), while the passive region (3B) is formed through local intermixing of the active layer (3). Such a diode surprisingly has a high efficiency and a low starting current, shows very little propensity to said degradation, and is in addition very easy to manufacture. The invention accordingly also relates to a method of manufacturing such a diode. Said disorderly distribution is realised, for example, through a high growing temperature, while said intermixing is achieved through local diffusion of, for example, Zn or Si. Intermixing may take place during or after the manufacture of the semiconductor layers.
    • 本发明涉及一种辐射发射半导体二极管,特别是激光二极管,其有源层(3)包括II-V混合晶体,其中各种元素,例如III族元素可以以有序或无序的方式存在。 这样的混晶是InGaP的发光低于1μm。 在已知的二极管中,抑制了灾难性的光学降解,因为有源层(3)在有源区(3A)中具有有序分布,并且位于出射表面附近的被动区域(3B)中的元件的无序分布 )。 已知的二极管具有低效率和高启动电流。 在根据本发明的二极管中,不同元件的分布在有源区(3A)中是无序的,而无源区(3B)是通过有源层(3)的局部混合形成的。 这种二极管令人惊奇地具有高效率和低启动电流,显示出非常少的所述降解倾向,并且另外非常容易制造。 因此,本发明还涉及制造这种二极管的方法。 所述无序分布例如通过高生长温度实现,而所述混合通过例如Zn或Si的局部扩散来实现。 混合可以在制造半导体层期间或之后进行。
    • 3. 发明授权
    • Semiconductor diode laser having improved performance and method of
manufacturing same
    • 具有改进性能的半导体二极管激光器及其制造方法
    • US5574743A
    • 1996-11-12
    • US407931
    • 1995-03-21
    • Carolus J. van der PoelGerard A. AcketMarcel F. C. Schemmann
    • Carolus J. van der PoelGerard A. AcketMarcel F. C. Schemmann
    • H01S5/00H01S5/10H01S5/20H01S5/22H01S5/223H01S3/19
    • H01S5/10H01S5/2231H01S5/1039H01S5/204H01S5/22H01S5/223
    • Semiconductor diode lasers are used inter alia in optical disc systems, laser printers, bar code readers, and glass fibre communication systems. Lasers having a so-called (weakly) index-guided structure are very suitable for many applications inter alia because they can be manufactured comparatively simply and reliably. A disadvantage of the known (weakly) index-guided laser is that the so-called P-I (=optical power-current) characteristic thereof exhibits a kink. Such a kink limits the use of the laser to a relatively low optical power. According to the invention, such a (weakly) index-guided laser has a resonance cavity with a length for which the optical power at which a kink occurs in the P-I characteristic is a maximum. It was a surprise to find that the occurrence of a kink in the P-I curve of such a (weakly) index-guided laser depends on the length of the resonance cavity. Very surprising is the appearance of a maximum value in this kink power as a function of the length of the resonance cavity. Equally surprising is the occurrence of a series of such maxima, which are substantially equally high, and which are formed by the crests of a sawtooth curve with a very steep flank at the rising edge to each maximum. As a result, the laser length may be optimized not only in relation to the occurrence of kinks in the P-I characteristic but also in relation to other properties. The invention also relates to a method of manufacturing a laser according to the invention, which preferably includes a ridge waveguide structure.
    • 半导体二极管激光器尤其用于光盘系统,激光打印机,条形码读取器和玻璃纤维通信系统中。 具有所谓(弱)折射率引导结构的激光器特别适用于许多应用,因为它们可以相对简单且可靠地制造。 已知(弱)折射率引导激光器的缺点在于其所谓的P-I(=光功率 - 电流)特性表现为扭结。 这样的扭结将激光器的使用限制在相对低的光功率。 根据本发明,这种(弱)折射率引导激光器具有谐振腔,其具有在P-I特性中发生扭结的光功率为最大的长度。 令人吃惊的是,发现在这种(弱)折射率引导激光器的P-I曲线中出现扭结,取决于谐振腔的长度。 非常令人惊讶的是,这个扭结功率的最大值的出现是谐振腔长度的函数。 同样令人惊讶的是,一系列这样的最大值的出现是基本上同样高的,并且它们由在上升沿到每个最大值的具有非常陡峭的侧面的锯齿曲线的波峰形成。 结果,激光长度不仅可以相对于P-I特性中的扭结的发生而且与其它特性有关。 本发明还涉及根据本发明的制造激光器的方法,其优选地包括脊形波导结构。