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1. 发明授权

US3953281A Method and system for growing monocrystalline ingots 失效
标题翻译：生长单晶锭的方法和系统
公开(公告)号：US3953281A
公开(公告)日：1976-04-27
申请号：US483511
申请日：1974-06-27
申请人： Anthony A. Pantusco , Warren J. Pinckney , George R. Santillo, Jr. , Gerard J. Scharff
发明人： Anthony A. Pantusco , Warren J. Pinckney , George R. Santillo, Jr. , Gerard J. Scharff
IPC分类号： C30B15/30 , H01L21/208 , B01J17/18
CPC分类号： C30B15/30 , Y10S117/90 , Y10S117/911 , Y10T117/1072
摘要： A monocrystalline silicon ingot is grown from molten silicon by progressively lifting a monocrystalline seed from the molten silicon, which is disposed within a crucible in a furnace, through mounting the seed on a graphite pull shaft. The pull shaft is surrounded by a bellows, which is connected to a carriage to which the pull shaft also is connected. A seal, which is carried by the bellows structure, seals the pull shaft in its rotary motion. Because the bellows structure and the pull shaft are both connected to the carriage, there is no relative linear motion therebetween so that there is no necessity to seal for linear motion of the pull shaft. A pair of lifting mechanisms is connected to diametrically opposite sides of the carriage to support the carriage and to exert a lifting force on the pull shaft along its longitudinal axis. The crucible also must be raised as the level of the molten silicon is depleted due to the formation of the ingot on the seed at the end of the pull shaft. This is because there is an optimum heating zone, which is an isothermal zone and is relatively small, within the furnace, and it is necessary for the level of the molten silicon to be maintained within this zone. The crucible is lifted through being connected to a carriage, which is supported and lifted by a similar arrangement to that for lifting the carriage to which the pull shaft is connected.
摘要翻译：通过将晶种通过将晶种安装在石墨牵引轴上，逐渐地将单晶种子从熔融硅中放置在炉中的坩埚内，从熔融硅生长单晶硅锭。牵引轴被波纹管包围，波纹管连接到牵引轴也连接到的托架上。由波纹管结构承载的密封件在其旋转运动中密封拉动轴。因为波纹管结构和拉动轴都与滑架相连，所以它们之间没有相对的线性运动，因此不需要密封用于拉动轴的直线运动。一对提升机构连接到滑架的径向相对的两侧，以支撑托架并且沿其纵向轴线在拉动轴上施加提升力。由于在拉杆端部的种子上形成锭，所以坩埚也必须升高，因为熔融硅的水平耗尽。这是因为在炉内存在最佳的加热区，其是等温区并且相对较小，并且熔融硅的水平必须保持在该区内。坩埚通过连接到滑架被提升，托架通过与用于提升牵引轴所连接的托架相似的布置被支撑和提升。

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