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    • 3. 发明授权
    • Process for fabricating vertical transistors
    • 制造垂直晶体管的工艺
    • US06197641B1
    • 2001-03-06
    • US09335707
    • 1999-06-18
    • John Michael HergenrotherDonald Paul MonroeGary Robert Weber
    • John Michael HergenrotherDonald Paul MonroeGary Robert Weber
    • H01L21336
    • H01L29/66666H01L29/161H01L29/7827H01L29/78642
    • A process for fabricating a vertical MOSFET device for use in integrated circuits is disclosed. In the process, at least three layers of material are formed sequentially on a semiconductor substrate. The three layers are arranged such that the second layer is interposed between the first and third layers. The second layer is sacrificial, that is, the layer is completely removed during subsequent processing. The thickness of the second layer defines the physical gate length of the vertical MOSFET. In the process the first and third layers have etch rates that are significantly lower than the etch rate of the second layer in an etchant selected to remove the second layer. The top layer, which is either the third or subsequent layer, is a stop layer for a subsequently performed mechanical polishing step that is used to remove materials formed over the at least three layers. After the at least three layers of material are formed on the substrate, a window or trench is formed in the layers. The window terminates at the surface of the silicon substrate in which one of either a source or drain region is formed in the silicon substrate. The window or trench is then filled with a semiconductor material. This semiconductor plug becomes the vertical channel of the transistor. Therefore the crystalline semiconductor plug is doped to form a source extension, a drain extension, and a channel region in the plug. Subsequent processing forms the other of a source or drain on top of the vertical channel and removes the sacrificial second material layer. The removal of the sacrificial second layer exposes a portion of the doped semiconductor plug. The device gate dielectric is then formed on the exposed portion of the doped semiconductor plug. The gate electrode is then deposited. The physical gate length of the resulting device corresponds to the deposited thickness of the second material layer.
    • 公开了用于制造用于集成电路的垂直MOSFET器件的工艺。 在该过程中,在半导体衬底上依次形成至少三层材料。 三层被布置成使得第二层介于第一层和第三层之间。 第二层是牺牲性的,即在随后的处理期间该层被完全去除。 第二层的厚度限定了垂直MOSFET的物理栅极长度。 在该过程中,第一层和第三层的蚀刻速率明显低于蚀刻剂中被选择去除第二层的第二层的蚀刻速率。 顶层,其是第三层或后续层,是用于随后执行的机械抛光步骤的停止层,其用于去除在至少三层上形成的材料。 在衬底上形成至少三层材料之后,在这些层中形成窗口或沟槽。 窗口终止于在硅衬底中形成源区或漏区之一的硅衬底的表面。 然后用半导体材料填充窗口或沟槽。 该半导体插头成为晶体管的垂直沟道。 因此,晶体半导体插头被掺杂以在插头中形成源延伸部,漏极延伸部和沟道区域。 随后的处理形成垂直通道顶部的源极或漏极中的另一个,并去除牺牲的第二材料层。 牺牲第二层的去除暴露了掺杂半导体插件的一部分。 然后在掺杂半导体插头的暴露部分上形成器件栅极电介质。 然后沉积栅电极。 所得装置的物理栅极长度对应于第二材料层的沉积厚度。
    • 5. 发明授权
    • Electronic apparatus having improved scratch and mechanical resistance
    • 具有改进的划痕和机械阻力的电子设备
    • US06240199B1
    • 2001-05-29
    • US08899735
    • 1997-07-24
    • Lalita ManchandaEdward Paul Martin, Jr.Gary Robert Weber
    • Lalita ManchandaEdward Paul Martin, Jr.Gary Robert Weber
    • G06K900
    • G06K9/00053G01D5/24H01L23/562H01L2924/0002Y10T428/26H01L2924/00
    • Embodiments of the invention include a sensor such as a capacitive sensor with improved scratch resistance. The sensor has a substrate and a layer of sensing elements formed thereon that are formed from materials having a greater mechanical firmness than conventional aluminum or other soft metal materials. Sensor interconnects also are made of such materials. The increased mechanical firmness of the sensing elements and interconnects improves the scratch and mechanical resistance thereof by reducing scratches, mechanical stress and cracks by reducing the deformation and consequently the bridge and/or gap effects of the sensing element material. Such effects plague conventional electronic devices, integrated circuits and sensors. Alternatively, the inventive sensor includes, e.g., a dielectric region operably coupled to the sensing elements and interconnects, thus forming a capacitive sensor or other electronic devices. The sensing elements and interconnects are formed beneath, within or on top of the dielectric region, and their improved mechanical firmness improves the scratch and mechanical resistance of the dielectric region or other material region formed thereon.
    • 本发明的实施例包括诸如具有改进的耐擦伤性的电容式传感器的传感器。 传感器具有形成在其上的基底和感应元件层,其由具有比常规铝或其它软金属材料更大的机械硬度的材料形成。 传感器互连也由这样的材料制成。 通过减小感应元件材料的变形和桥接和/或间隙效应,传感元件和互连件的增加的机械硬度通过减少划痕,机械应力和裂纹来改善其划痕和机械阻力。 这种影响瘟疫常规电子设备,集成电路和传感器。 或者,本发明的传感器包括例如可操作地耦合到感测元件和互连的电介质区域,从而形成电容式传感器或其它电子设备。 感测元件和互连件形成在电介质区域的下方,内部或之上,并且它们改进的机械坚固性改善了形成在其上的电介质区域或其他材料区域的划痕和机械阻力。