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    • 1. 发明申请
    • Fluid cooled semiconductor power module having double-sided cooling
    • 具有双面冷却的流体冷却半导体功率模块
    • US20090057882A1
    • 2009-03-05
    • US11899352
    • 2007-09-05
    • Erich W. Gerbsch
    • Erich W. Gerbsch
    • H01L23/473
    • H01L25/072H01L23/473H01L25/115H01L2224/291H01L2224/32225H01L2224/32245H01L2224/33181H01L2924/13055H01L2924/014H01L2924/00
    • A semiconductor power module includes one or more power semiconductor power devices sandwiched between a fluid conducting base and a fluid conducting cover joined to the base. Fluid coolant entering the base diverges into a first flow path through the base and a second parallel flow path through the cover, and then converges and discharges through an outlet. The semiconductor devices have upper and lower active areas that are thermally coupled to inboard faces of the cover and base for low double-sided thermal resistance, and the devices are electrically accessed through a set of terminals formed on the base. Multiple sets of semiconductor power devices are double-side cooled by joining multiple fluid conducting covers to the base such that the coolant successively diverges and then re-converges at the locations where each cover is joined to the base. Preferably, the flow paths in both the base and cover include integral features for enhancing the surface area in contact with the coolant.
    • 半导体功率模块包括一个或多个功率半导体功率器件,其夹在流体导电基座和连接到基座的流体导电盖之间。 进入基座的流体冷却剂分流到通过底座的第一流动路径和穿过盖子的第二平行流动路径,然后通过出口收敛和排出。 半导体器件具有上下有源区域,其热耦合到盖子和底座的内表面,用于低双面热阻,并且器件通过形成在基座上的一组端子电接触。 多组半导体功率器件通过将多个流体导电盖连接到基座而被双面冷却,使得冷却剂依次发散,然后在每个盖接合到基座的位置处重新收敛。 优选地,底座和盖子中的流动路径包括用于增强与冷却剂接触的表面积的整体特征。