会员体验
专利管家(专利管理)
工作空间(专利管理)
风险监控(情报监控)
数据分析(专利分析)
侵权分析(诉讼无效)
联系我们
交流群
官方交流:
QQ群: 891211   
微信请扫码    >>>
现在联系顾问~
热词
    • 1. 发明申请
    • METHOD FOR PRODUCING A COPOLYMER FOR PHOTORESIST
    • 用于生产光电聚合物的共聚物的方法
    • US20100222526A1
    • 2010-09-02
    • US12702356
    • 2010-02-09
    • Tomo OikawaEiichi Ikawa
    • Tomo OikawaEiichi Ikawa
    • C08F2/00C08G63/08C08G65/00C08G73/00C08G65/34C08G73/24
    • C08F2/06C08F2/00C08F220/28
    • The present invention provides a method for production of a copolymer for photoresists in which the bias of the monomer composition ration is small. This method for production is a method for production of a copolymer for photoresists, which copolymer containing at least two types of repeating units, the method having a supplying step of supplying a monomer solution and a solution containing a polymerization initiator into a polymerization reaction system, wherein the range of fluctuation of the monomer composition ratio of unreacted monomers is within the range between minus 15% and plus 15% or the standard deviation of the monomer composition ratio of unreacted monomers is within 2 in the polymerization reaction system during the period from the start of the polymerization reaction to the end of supplying of the monomer solution.
    • 本发明提供一种制备光聚合物共聚物的方法,其中单体组成比例的偏差小。 该制造方法是制造光致抗蚀剂共聚物的方法,该共聚物含有至少两种重复单元,该方法具有将单体溶液和含有聚合引发剂的溶液供给到聚合反应体系中的供给工序, 其中未反应单体的单体组成比的波动范围在-15%和15%之间的范围内,或者在聚合反应体系中未反应单体的单体组成比的标准偏差在2以内的范围内 开始聚合反应直到单体溶液的供应结束。
    • 5. 发明授权
    • Method for producing a copolymer for photoresist
    • 光致抗蚀剂共聚物的制造方法
    • US08455596B2
    • 2013-06-04
    • US12702356
    • 2010-02-09
    • Tomo OikawaEiichi Ikawa
    • Tomo OikawaEiichi Ikawa
    • C08F2/00
    • C08F2/06C08F2/00C08F220/28
    • The present invention provides a method for production of a copolymer for photoresists in which the bias of the monomer composition ration is small. This method for production is a method for production of a copolymer for photoresists, which copolymer containing at least two types of repeating units, the method having a supplying step of supplying a monomer solution and a solution containing a polymerization initiator into a polymerization reaction system, wherein the range of fluctuation of the monomer composition ratio of unreacted monomers is within the range between minus 15% and plus 15% or the standard deviation of the monomer composition ratio of unreacted monomers is within 2 in the polymerization reaction system during the period from the start of the polymerization reaction to the end of supplying of the monomer solution.
    • 本发明提供一种制备光聚合物共聚物的方法,其中单体组成比例的偏差小。 该制造方法是制造光致抗蚀剂共聚物的方法,该共聚物含有至少两种重复单元,该方法具有将单体溶液和含有聚合引发剂的溶液供给到聚合反应体系中的供给工序, 其中未反应单体的单体组成比的波动范围在-15%和15%之间的范围内,或者在聚合反应体系中未反应单体的单体组成比的标准偏差在2以内的范围内 开始聚合反应直到单体溶液的供应结束。