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1. 发明申请

US20070001790A1 Apparatus for testing electronic devices 有权
标题翻译：电子设备测试装置
公开(公告)号：US20070001790A1
公开(公告)日：2007-01-04
申请号：US11413323
申请日：2006-04-27
申请人： Donald Richmond , Frank Uher , Jovan Jovanovic , Scott Lindsey
发明人： Donald Richmond , Frank Uher , Jovan Jovanovic , Scott Lindsey
IPC分类号： H01H50/54
CPC分类号： G01R31/287 , G01R31/003 , G01R31/26 , G01R31/2642 , G01R31/2851 , G01R31/2855 , G01R31/2863 , G01R31/2868 , G01R31/2872 , G01R31/2877 , G01R31/2886 , G01R31/2889 , G01R31/2891 , G01R31/31924 , G06F8/30
摘要： An apparatus is described for burn-in and/or functional testing of microelectronic circuits of unsingulated wafers. A large number of power, ground, and signal connections can be made to a large number of contacts on a wafer. The apparatus has a cartridge that allows for fanning-in of electric paths. A distribution board has a plurality of interfaces that are strategically positioned to provide a dense configuration. The interfaces are connected through flexible attachments to an array of first connector modules. Each one of the first connector modules can be independently connected to a respective one of a plurality of second connector modules, thereby reducing stresses on a frame of the apparatus. Further features include for example a piston that allows for tight control of forces exerted by terminals onto contacts of a wafer.
摘要翻译：描述了一种用于老化和/或功能测试未调制晶片的微电子电路的装置。可以对晶片上的大量触点进行大量的电源，接地和信号连接。该装置具有允许电通路进入的盒。分配板具有多个接口，其被策略地定位以提供密集配置。这些接口通过柔性附件连接到第一连接器模块的阵列。第一连接器模块中的每一个可以独立地连接到多个第二连接器模块中的相应的一个，从而减少装置的框架上的应力。其他特征包括例如允许对端子施加到晶片的触点上的力的严格控制的活塞。

2. 发明申请

US20060132154A1 Wafer Burn-In and Test Employing Detachable Cartridge 有权
标题翻译：晶圆老化和测试使用可拆卸墨盒
公开(公告)号：US20060132154A1
公开(公告)日：2006-06-22
申请号：US11276314
申请日：2006-02-23
申请人： Frank Uher , John Andberg , Mark Carbone , Donald Richmond
发明人： Frank Uher , John Andberg , Mark Carbone , Donald Richmond
IPC分类号： G01R31/02
CPC分类号： G01R31/2865 , G01R1/0408 , G01R1/0491 , G01R31/2831 , G01R31/2855 , G01R31/2863 , G01R31/2886
摘要： A cartridge (10) includes a chuck plate (12) for receiving a wafer (74) and a probe plate (14) for establishing electrical contact with the wafer. In use, a mechanical connecting device (90) locks the chuck plate and the probe plate fixed relative to one another to maintain alignment of the wafer and the probe plate. Preferably, electrical contact with the wafer is established using a probe card (50) that is movably mounted to the probe plate by means of a plurality of leaf springs (52.) The mechanical connecting device is preferably a kinematic coupling including a male connector (94) and first and second opposed jaws (122, 124.) Each of the jaws is pivotable from a retracted position in which the male connector can be inserted between the jaws and an engaging position in which the jaws prevent withdrawal of the male connector from between the jaws. The male connector is movable between an extended and a retracted position, and is biased towards the retracted position. This provides a positive clamping force that pulls the chuck and probe plates together when the mechanical connecting device is engaged. To load a wafer into the cartridge, the wafer is placed on the chuck plate, the probe plate is aligned with the wafer, and the chuck plate and the probe plate are locked together. The cartridge can then be removed from the alignment device and placed in a burn-in or test chamber that does not itself require means for aligning the wafer or for providing a probe actuation force.
摘要翻译：盒（10）包括用于接收晶片（74）的卡盘板（12）和用于与晶片建立电接触的探针板（14）。在使用中，机械连接装置（90）相对于彼此固定的卡盘板和探针板锁定，以保持晶片和探针板的对准。优选地，使用通过多个板簧（52）可移动地安装到探针板的探针卡（50）来建立与晶片的电接触。机械连接装置优选地是包括公连接器（每个夹爪可以从缩回位置枢转，在该位置中，阳连接器可以插入到夹爪之间和卡合位置，在该接合位置，卡爪防止阳连接器从金属接头在颚之间阳连接器可在延伸位置和缩回位置之间移动，并且朝着缩回位置偏置。这提供了当夹持机械连接装置时将卡盘和探针板拉到一起的正夹紧力。为了将晶片装载到盒中，将晶片放置在夹盘上，探针板与晶片对准，夹盘和探针板被锁定在一起。然后可以将该盒从对准装置移除并放置在本身不需要用于对准晶片或提供探针致动力的装置的老化或测试室中。

3. 发明申请

US20050007132A1 Assembly for electrically connecting a test component to a testing machine for testing electrical circuits on the test component 有权
标题翻译：用于将测试部件电连接到用于测试部件上的电路的测试机的组件
公开(公告)号：US20050007132A1
公开(公告)日：2005-01-13
申请号：US10912785
申请日：2004-08-06
申请人： Donald Richmond , Jovan Jovanovic
发明人： Donald Richmond , Jovan Jovanovic
IPC分类号： G01R1/073 , G01R31/28 , G01R31/02
CPC分类号： G01R1/0491 , G01R1/07378 , G01R31/2863 , G01R31/2886
摘要： In one embodiment, the invention provides a test assembly for electrically connecting a test component to a testing machine for testing electrical circuits on the test component. The assembly comprises a contactor assembly to interconnect with the test component, a probe assembly to mechanically support the contactor assembly and electrically connect the contactor assembly to the testing machine, and a clamping mechanism comprising a first clamping member and a second clamping member, the clamping members being urged together to exert a clamping force to deform contactor bumps of an electrical connection between the probe assembly and the contactor assembly.
摘要翻译：在一个实施例中，本发明提供了一种用于将测试部件电连接到测试机器上以测试测试部件上的电路的测试组件。该组件包括与测试部件互连的接触器组件，用于机械地支撑接触器组件并将接触器组件电连接到测试机器的探针组件，以及包括第一夹紧部件和第二夹紧部件的夹持机构，构件一起被推动以施加夹紧力以使得探针组件和接触器组件之间的电连接的接触器凸块变形。

4. 发明申请

US20060267624A1 Assembly for electrically connecting a test component to a testing machine for testing electrical circuits on the test component 有权
公开(公告)号：US20060267624A1
公开(公告)日：2006-11-30
申请号：US11433845
申请日：2006-05-12
申请人： Donald Richmond , Jovan Jovanovic
发明人： Donald Richmond , Jovan Jovanovic
IPC分类号： G01R31/26
CPC分类号： G01R1/0491 , G01R1/07378 , G01R31/2863 , G01R31/2886
摘要： In one embodiment, the invention provides a test assembly for electrically connecting a test component to a testing machine for testing electrical circuits on the test component. The assembly comprises a contactor assembly to interconnect with the test component, a probe assembly to mechanically support the contactor assembly and electrically connect the contactor assembly to the testing machine, and a clamping mechanism comprising a first clamping member and a second clamping member, the clamping members being urged together to exert a clamping force to deform contactor bumps of an electrical connection between the probe assembly and the contactor assembly.

5. 发明申请

US20050057270A1 Contactor assembly for testing electrical circuits 有权
公开(公告)号：US20050057270A1
公开(公告)日：2005-03-17
申请号：US10971897
申请日：2004-10-22
申请人： Jovan Jovanovic , Frank Uher , Donald Richmond
发明人： Jovan Jovanovic , Frank Uher , Donald Richmond
IPC分类号： G01R1/073 , G01R31/28 , G01R31/02
CPC分类号： G01R1/07378 , G01R31/2863 , G01R31/2886 , Y10T29/49204
摘要： The invention provides a contactor assembly. The contactor assembly comprises an electrical contactor including a contactor substrate, a plurality of electrical terminals on the contactor substrate; an interposer including an electrically conductive interposer substrate having first and second sides, a plurality of first and second resilient interconnection elements extending respectively from the first and second sides of the interposer substrate, wherein the interposer is positioned in a predetermined position relative to the electrical contactor in which predetermined position each first resilient interconnection element makes electrical contact with an electrical terminal of the electrical contactor, the interposer substrate having been moved relatively towards the contactor substrate to resiliently deform the first resilient interconnection elements; and a retaining component having a first portion secured to the electrical contactor and a second portion in contact with the interposer to retain the interposer in the predetermined position relative to the electrical contactor.

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