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1. 发明申请

US20080203325A1 Method of Protecting a Radiation Source Producing Euv-Radiation and/or Soft X-Rays Against Short Circuits 审中-公开
标题翻译：保护产生Euv辐射和/或软X射线的辐射源短路方法
公开(公告)号：US20080203325A1
公开(公告)日：2008-08-28
申请号：US11917198
申请日：2006-06-06
申请人： Dominik Marcel Vaudravange , Jeroen Jonkers
发明人： Dominik Marcel Vaudravange , Jeroen Jonkers
IPC分类号： H05G2/00
CPC分类号： H05G2/003 , H05G2/005
摘要： The present invention relates to a method of protecting a radiation source producing extreme ultraviolet radiation (EUV) and/or soft X-rays against short circuits. The method applies to radiation sources producing said EUV-radiation and/or soft X-rays by means of an electrically operated discharge, which is ignited in a vapor between at least two electrodes (1, 2) in a discharge space, wherein said vapor is produced from a metal melt (6), which is applied to a surface in said discharge space and at least partially evaporated by an energy beam (9). Such a radiation source has one or several small gaps (17) between said electrodes (1, 2) and/or between components (4, 5) electrically connected to said electrodes (1, 2). These gaps (17) can cause short circuits when evaporated metal condenses there. In the present method during operation of the radiation source at least one surface bordering said gaps (17) and/or one or several protective elements (16, 18) covering said gaps (17) or arranged inside said gaps (17) are heated to a temperature at which the vapor pressure of said metal is high enough to evaporate metal material condensed on said surface or protective elements. With the present method the lifetime of the radiation source is extended.
摘要翻译：本发明涉及一种保护产生极紫外辐射（EUV）和/或软X射线的辐射源免于短路的方法。该方法适用于通过在放电空间中的至少两个电极（1,2）之间的蒸气中点燃的电操作放电产生所述EUV辐射和/或软X射线的辐射源，其中所述蒸气由金属熔体（6）制成，其被施加到所述放电空间中的表面并且被能量束（9）至少部分蒸发。这种辐射源在所述电极（1,2）之间和/或电连接到所述电极（1,2）的部件（4,5）之间具有一个或几个小间隙（17）。当蒸发的金属在那里冷凝时，这些间隙（17）可能导致短路。在本方法中，在辐射源的操作期间，覆盖所述间隙（17）和/或覆盖所述间隙（17）或布置在所述间隙（17）内的一个或多个保护元件（16,18）的至少一个表面被加热到所述金属的蒸汽压高到足以蒸发在所述表面上凝结的金属材料或保护元件的温度。利用本方法，辐射源的寿命延长。

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