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    • 2. 发明申请
    • Method and apparatus for reducing noise in analog amplifier circuits and solid state imagers employing such circuits
    • 使用这种电路的模拟放大器电路和固体成像器中的噪声降低的方法和装置
    • US20060268140A1
    • 2006-11-30
    • US11135520
    • 2005-05-24
    • Leonard ForbesDavid Cuthbert
    • Leonard ForbesDavid Cuthbert
    • H04N5/335
    • H04N5/378H04N5/3575H04N5/3651
    • A technique for reducing 1/f noise in an imager, in which the source follower transistor in a pixel circuit is turned off prior to a correlated double sampling (CDS) operation, thereby reducing 1/f noise in the source follower transistor for up to 100 ms. The source follower transistor is then reactivated and a CDS operation and readout is performed normally. This technique substantially reduces the contributions of 1/f noise. The invention also provides a reduction of 1/f noise in an analog amplifier circuit which may process pixel output signals, or more generally, other analog signals, whereby the analog amplifier is turned off during an amplifier reset operation prior to signal amplification. The analog amplifier circuit may be a differential amplifier or a switched capacitor analog amplifier circuit.
    • 用于降低成像器中1 / f噪声的技术,其中像素电路中的源极跟随器晶体管在相关双采样(CDS)操作之前被截止,从而减少源极跟随器晶体管中的1 / f噪声,直到 100毫秒 源极跟随器晶体管然后被重新激活,并且正常执行CDS操作和读出。 该技术大大降低了1 / f噪声的贡献。 本发明还提供可以处理像素输出信号或更一般地,其它模拟信号的模拟放大器电路中的1 / f噪声的减小,由此在信号放大之前的放大器复位操作期间模拟放大器被关断。 模拟放大器电路可以是差分放大器或开关电容器模拟放大器电路。
    • 4. 发明授权
    • Method for controlling a process for patterning a feature in a photoresist
    • 用于控制对光致抗蚀剂中的特征图案化的工艺的方法
    • US06248485B1
    • 2001-06-19
    • US09356638
    • 1999-07-19
    • John David Cuthbert
    • John David Cuthbert
    • G03F900
    • G03F7/70625
    • A method and controller for controlling a process and system for patterning a feature in a photoresist on a semiconductor wafer. The present invention characterizes various components (both individually and collectively) of an image transfer system, including the illumination source, lens and product reticle, with regard to dimensional errors introduced into the image transfer process by these components. The collective error data or information provided in accordance with the present invention may be communicated to the image transfer system to control the image transfer system and the image transfer process and to ensure that the actual dimension of features patterned in the photoresist are within acceptable dimensional limits for these features.
    • 一种用于控制用于图案化半导体晶片上的光致抗蚀剂中的特征的工艺和系统的方法和控制器。 本发明的特征在于涉及通过这些部件引入到图像转印过程中的尺寸误差的包括照明源,透镜和产品掩模版的图像传送系统的各种组件(单独地和集体地)。 根据本发明提供的集体误差数据或信息可以被传送到图像传送系统以控制图像传输系统和图像传送过程,并且确保在光致抗蚀剂中图案化的特征的实际尺寸在可接受的尺寸限度内 对于这些功能。
    • 6. 发明授权
    • Optical comparator system to separate unacceptable defects from
acceptable edge aberrations
    • 光学比较器系统将不可接受的缺陷与可接受的边缘像差分开
    • US3944369A
    • 1976-03-16
    • US473233
    • 1974-05-24
    • John David CuthbertDelmer Lee FehrsDavid Farnham Munro
    • John David CuthbertDelmer Lee FehrsDavid Farnham Munro
    • G01N21/956G01B11/24
    • G01N21/95607
    • In an optical comparison inspection system a single beam from a scanning light source is split to produce a pair of synchronously scanning focused light beams. One of the beams is directed onto a reference, light affecting patterned workpiece and the other beam is directed onto a similar patterned workpiece to be inspected. Both workpieces are mounted in optically equivalent positions on a traverse table which has a direction of travel orthogonal to parallel planes containing the scanning light beams. Pattern differences are represented by differences in photodetected representations of the two light beams, which are intensity modulated by the patterned workpieces. By electronically gating preselected combinations of the two modulated signals with circuitry employing multiple threshold detection elements, a resultant signal is produced which enables allowable edge aberrations to be discriminated from unacceptable defects in the patterns. Suitable display of the resultant signal permits an operator to rapidly ascertain both the number and location of only unacceptable defects.
    • 在光学比较检查系统中,来自扫描光源的单个光束被分割以产生一对同步扫描的聚焦光束。 一个光束被引导到参考光,影响图案化的工件的光,另一个光束被引导到待检查的类似的图案化工件上。 两个工件安装在横向工作台上的光学等效位置上,该横动台具有与包含扫描光束的平行平面垂直的行进方向。 图案差异由两个光束的光电检测表示的差异表示,两个光束被图案化工件强度调制。 通过使用多个阈值检测元件的电路将两个调制信号的预选组合电门选通,产生得到的信号,其使允许的边缘像差与图案中不可接受的缺陷区分开。 所得信号的适当显示允许操作者快速地确定仅有不可接受的缺陷的数量和位置。
    • 8. 发明申请
    • Technique to improve the gain and signal to noise ratio in CMOS switched capacitor amplifiers
    • 提高CMOS开关电容放大器的增益和信噪比的技术
    • US20070182482A1
    • 2007-08-09
    • US11728537
    • 2007-03-26
    • Leonard ForbesDavid Cuthbert
    • Leonard ForbesDavid Cuthbert
    • H03F1/36
    • H03F3/005H03F1/26H03F1/38H03F3/45183H03F2203/45166H03F2203/45224H03F2203/45514H03F2203/45551H03F2203/45674H03F2203/45722
    • The present invention comprises switched capacitor amplifiers including positive feedback on semiconductor devices, wafers, and systems incorporating same and methods for amplifying signals using positive feedback, while maintaining a stable gain and producing an improved signal-to-noise ratio. One embodiment includes a switched capacitor amplifier comprising a CMOS amplifier, a feed-in switched capacitor, and a feedback switched capacitor. The feed-in switched capacitor couples an input signal to the non-inverting input of the CMOS amplifier. Similarly, the feedback switched capacitor couples the amplifier output to the non-inverting input to create a positive feedback loop. A capacitance of the feedback switched capacitor relative to a capacitance of the feed-in switched capacitor comprises a feedback proportion. This feedback proportion may be configured to maintain a stable gain of the switched capacitor amplifier and increase a signal-to-noise ratio of the switched capacitor amplifier, even with the switched capacitor amplifier in a positive feedback arrangement.
    • 本发明包括开关电容放大器,其包括对半导体器件的正反馈,晶圆及其结合的系统以及使用正反馈放大信号的方法,同时保持稳定的增益并产生改善的信噪比。 一个实施例包括具有CMOS放大器,馈入开关电容器和反馈开关电容器的开关电容放大器。 馈入开关电容将输入信号耦合到CMOS放大器的非反相输入。 类似地,反馈开关电容器将放大器输出耦合到非反相输入端以产生正反馈回路。 反馈开关电容器相对于馈入开关电容器的电容的电容包括反馈比例。 该反馈比例可以被配置为保持开关电容放大器的稳定增益,并且即使开关电容放大器处于正反馈布置中,也可提高开关电容放大器的信噪比。