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1. 发明授权

US5362969A Processing endpoint detecting technique and detector structure using multiple radiation sources or discrete detectors 失效
标题翻译：使用多个辐射源或离散检测器处理端点检测技术和检测器结构
公开(公告)号：US5362969A
公开(公告)日：1994-11-08
申请号：US52401
申请日：1993-04-23
申请人： Daniel E. Glenn
发明人： Daniel E. Glenn
IPC分类号： H01J37/32 , H01L21/66 , G01N21/86
CPC分类号： B24B37/013 , H01J37/32935 , H01L22/26
摘要： A detector structure and technique for non-contact monitoring of a process being performed on a surface, such as in semiconductor wafer integrated circuit processing and flat panel display substrate processing, in order to determine when the process has reached endpoint. In one embodiment, multiple small area radiation sources, such as light emitting diodes, are symmetrically arranged around a large area photodetector, and each have similar radiation distribution patterns. In an alternative embodiment, multiple photodetectors are symmetrically arranged around a single light emitting diode with a symmetrical radiation distribution pattern. In either case, the amount of source radiation reflected onto the detector from the surface being processed is not significantly affected by any wobble or tilting of the surface that may occur during processing.
摘要翻译：用于在表面上进行的处理的非接触监视的检测器结构和技术，例如在半导体晶片集成电路处理和平板显示器基板处理中，以便确定该过程何时已到达端点。在一个实施例中，多个小面积辐射源（例如发光二极管）围绕大面积光电检测器对称地布置，并且每个都具有相似的辐射分布图案。在替代实施例中，多个光电探测器对称地布置在具有对称辐射分布图案的单个发光二极管周围。在任一种情况下，从被处理的表面反射到检测器上的源辐射的量不会受到处理期间可能发生的表面的任何摆动或倾斜的显着影响。

2. 发明申请

US20110206579A1 METHOD AND APPARATUS FOR THE EXTRACTION AND PROCESSING OF MOLYBDENUM-99 有权
标题翻译：用于提取和处理钼99的方法和装置
公开(公告)号：US20110206579A1
公开(公告)日：2011-08-25
申请号：US13029332
申请日：2011-02-17
申请人： DANIEL E. GLENN , SCOTT B. AASE , WILLIAM R. STAGG
发明人： DANIEL E. GLENN , SCOTT B. AASE , WILLIAM R. STAGG
IPC分类号： C01G39/02 , B01D12/00
CPC分类号： C01G39/003 , G21C19/46 , Y02W30/883
摘要： A method for the extraction and purification of molybdenum, the method comprising the steps of: transferring an irradiated fuel solution to an extraction system, the irradiated fuel solution comprising iodine and molybdenum and other fission products, the extraction system comprising at least one sorbent column; passing the irradiated fuel solution upwards through the at least one sorbent-containing extraction column; directing the irradiated fuel solution towards a fuel management system by means of at least one discharge alignment valve; directing the extraction column eluate towards an iodine removal system; removing the iodine from the extraction column eluate; purifying the extraction column eluate; and collecting the purified eluate. Also disclosed is an apparatus for accomplishing the aforementioned method.
摘要翻译：一种提取和纯化钼的方法，所述方法包括以下步骤：将辐射的燃料溶液转移到萃取系统中，所述辐射的包含碘和钼和其它裂变产物的燃料溶液，所述萃取系统包含至少一个吸附塔; 使被辐射的燃料溶液向上通过至少一个含吸附剂的萃取塔; 通过至少一个排出对准阀将照射的燃料溶液引向燃料管理系统; 将萃取柱洗脱液导向碘去除系统; 从提取塔中除去碘液洗脱液; 纯化萃取柱洗脱液; 并收集纯化的洗脱液。还公开了一种用于实现上述方法的装置。

3. 发明申请

US20140165705A1 Sample Line Management In A Fluid Analyzer System 有权
标题翻译：流体分析仪系统中的样品管线管理
公开(公告)号：US20140165705A1
公开(公告)日：2014-06-19
申请号：US13714618
申请日：2012-12-14
申请人： Yonquan Li , Daniel E. Glenn , K. Stephen Johnson, JR. , Dieter Kita
发明人： Yonquan Li , Daniel E. Glenn , K. Stephen Johnson, JR. , Dieter Kita
IPC分类号： G01N33/00 , G01N1/44
CPC分类号： G01N1/44 , G01N1/2247 , G01N33/0009
摘要： In a first mode, a monitoring system inputs humidified gas through at least a portion of a conduit. At least a portion of the water in the humidified gas adheres to the inner surface of the conduit, inhibiting contaminants in the gas sample from adhering to the inner surface. The water in the humidified gas may also push any contaminants adhered to the surface of the sample line back out the sample line. In a second mode, after previously passing the humidified gas through the conduit, the monitoring system controls a flow of a gas sample including the contaminants through the conduit to a gas analyzer. The one or more layer of water on the inner surface of the conduit prevents or reduces a buildup of undesirable contaminants on an inner surface of a conduit that conveys gas samples.
摘要翻译：在第一模式中，监测系统通过导管的至少一部分输入加湿气体。加湿气体中的至少一部分水粘附到导管的内表面，从而抑制气体样品中的污染物粘附到内表面。加湿气体中的水也可能将附着在样品管线表面的任何污染物推回出样品管线。在第二模式中，在先前通过加湿气体通过导管之后，监测系统通过导管将含有污染物的气体样品的流量控制到气体分析器。导管内表面上的一层或多层水可防止或减少在输送气体样品的导管的内表面上积聚不需要的污染物。

4. 发明授权

US08449850B2 Method and apparatus for the extraction and processing of molybdenum-99 有权
标题翻译：钼-99提取和处理方法和设备
公开(公告)号：US08449850B2
公开(公告)日：2013-05-28
申请号：US13029332
申请日：2011-02-17
申请人： Daniel E. Glenn , Scott B. Aase , William R. Stagg
发明人： Daniel E. Glenn , Scott B. Aase , William R. Stagg
IPC分类号： C01G3/00
CPC分类号： C01G39/003 , G21C19/46 , Y02W30/883
摘要： A method for the extraction and purification of molybdenum, the method comprising the steps of: transferring an irradiated fuel solution to an extraction system, the irradiated fuel solution comprising iodine and molybdenum and other fission products, the extraction system comprising at least one sorbent column; passing the irradiated fuel solution upwards through the at least one sorbent-containing extraction column; directing the irradiated fuel solution towards a fuel management system by means of at least one discharge alignment valve; directing the extraction column eluate towards an iodine removal system; removing the iodine from the extraction column eluate; purifying the extraction column eluate; and collecting the purified eluate. Also disclosed is an apparatus for accomplishing the aforementioned method.
摘要翻译：一种提取和纯化钼的方法，所述方法包括以下步骤：将辐射的燃料溶液转移到萃取系统中，所述辐射的包含碘和钼和其它裂变产物的燃料溶液，所述萃取系统包含至少一个吸附塔; 使被辐射的燃料溶液向上通过至少一个含吸附剂的萃取塔; 通过至少一个排出对准阀将照射的燃料溶液引向燃料管理系统; 将萃取柱洗脱液导向碘去除系统; 从提取塔中除去碘液洗脱液; 纯化萃取柱洗脱液; 并收集纯化的洗脱液。还公开了一种用于实现上述方法的装置。

5. 发明授权

US6010538A In situ technique for monitoring and controlling a process of chemical-mechanical-polishing via a radiative communication link 失效
标题翻译：用于通过辐射通信链路监测和控制化学机械抛光过程的原位技术
公开(公告)号：US6010538A
公开(公告)日：2000-01-04
申请号：US585164
申请日：1996-01-11
申请人： Mei H. Sun , Herbert E. Litvak , Huey M. Tzeng , Daniel E. Glenn , Earl M. Jensen , Frank J. Hausman , Lin Jun Zhou
发明人： Mei H. Sun , Herbert E. Litvak , Huey M. Tzeng , Daniel E. Glenn , Earl M. Jensen , Frank J. Hausman , Lin Jun Zhou
IPC分类号： B24B37/013 , B24B49/04 , B24B49/12 , G05B19/4065 , H05K3/04 , B24B7/04
CPC分类号： B24B37/013 , B24B49/04 , B24B49/12 , G05B19/4065
摘要： In an apparatus for removing material from an article, such as an exposed surface of an intermediate integrated circuit structure, by planarizing, polishing, etching or the like, a sensor is mechanically coupled to a moving carrier of the article for directing through the article to its first side an electromagnetic radiation beam having a wavelength band to which the structure is substantially transparent. The beam is detected after interacting with the article, such as being reflected from its exposed surface, and resulting information of the state of the processing of the exposed surface is transmitted from the moving carrier to a stationary receiver by radiation without the use of any physical transmission media such as wires or optical fibers. Multiple sensors mounted on the moving article carrier provide information of the uniformity of the processing across the exposed article surface. The radiation signal received by the stationary receiver is used to monitor or control the processing, such as by determining an endpoint thereof.
摘要翻译：在用于从诸如中间集成电路结构的暴露表面的物品去除材料的设备中，通过平面化，抛光，蚀刻等，将传感器机械耦合到物品的移动载体上，以引导物品引导到物品其第一面是具有该结构基本上透明的波长带的电磁辐射束。在与物品相互作用之后检测到光束，例如从其暴露的表面反射，并且通过辐射将暴露表面的处理状态的结果信息从运动载体传输到固定的接收器，而不使用任何物理传输介质如电线或光纤。安装在移动物品载体上的多个传感器提供跨过暴露的物品表面的处理的均匀性的信息。由固定接收机接收的辐射信号用于监视或控制处理，例如通过确定其端点。

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