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    • 6. 发明授权
    • Method for reducing contact resistance of CMOS image sensor
    • 降低CMOS图像传感器接触电阻的方法
    • US08586404B2
    • 2013-11-19
    • US13556869
    • 2012-07-24
    • Kuan-Chieh HuangChih-Jen WuChen-Ming HuangDun-Nian YaungAn-Chun Tu
    • Kuan-Chieh HuangChih-Jen WuChen-Ming HuangDun-Nian YaungAn-Chun Tu
    • H01L21/00
    • H01L27/14689H01L21/28518
    • This description relates to a method for reducing CMOS Image Sensor (CIS) contact resistance, the CIS having a pixel array and a periphery. The method includes performing Physical Vapor Deposition (PVD) at a pixel contact hole area, annealing for silicide formation at the pixel contact hole area and performing contact filling. This description also relates to a method for reducing CMOS Image Sensor (CIS) contact resistance, the CIS having a pixel array and a periphery. The method includes implanting N+ or P+ for pixel contact plugs at a pixel contact hole area, performing Physical Vapor Deposition (PVD) at pixel contact hole area, annealing for silicide formation at the pixel contact hole area, performing contact filling and depositing a first metal film layer, wherein the first metal film layer links contact holes for a source, a drain, or a poly gate of a CMOS device.
    • 本说明书涉及用于降低CMOS图像传感器(CIS)接触电阻的方法,CIS具有像素阵列和周边。 该方法包括在像素接触孔区域进行物理气相沉积(PVD),在像素接触孔区域进行硅化物形成退火并进行接触填充。 该描述还涉及用于减小CMOS图像传感器(CIS)接触电阻的方法,CIS具有像素阵列和周边。 该方法包括在像素接触孔区域处对像素接触插塞注入N +或P +,在像素接触孔区域进行物理气相沉积(PVD),在像素接触孔区域进行硅化物形成退火,执行接触填充和沉积第一金属 膜层,其中所述第一金属膜层连接CMOS器件的源极,漏极或多晶硅栅极的接触孔。