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1. 发明授权

US06548797B1 Apparatus and method for measuring a wavefront using a screen with apertures adjacent to a multi-lens array 失效
标题翻译：使用具有与多透镜阵列相邻的孔的屏幕来测量波前的装置和方法
公开(公告)号：US06548797B1
公开(公告)日：2003-04-15
申请号：US09692180
申请日：2000-10-20
申请人： Chia-Yu Ai
发明人： Chia-Yu Ai
IPC分类号： G01J120
CPC分类号： G01J9/00
摘要： A wavefront sensor is provided to determine characteristics of an incoming distorted energy beam, such as a tilt angle and/or a degree of focus. The sensor includes a multi-lens array, a screen, and a beam detector. The multi-lens array focuses the energy beam to a multiple focal points. The screen, positioned adjacent to the multi-lens array, has at least one aperture to allow a portion of the energy beam to pass, while blocking the remainder of the energy beam from arriving at the multi-lens array. Each aperture is aligned with a lens of the multi-lens array. The beam detector detects the resulted focal point(s) of the energy beam passing through the corresponding aperture(s) and determines the characteristics of the passing energy beam. The screen may include a central aperture to measure a local tilt angle of a segment of incoming wavefront entering a lens of the lens array. The screen may also include a plurality sets of apertures configured to align in a plurality of directions, each set of apertures measuring a degree of focus of the incoming wavefront along the corresponding direction. The screen may further include a combination of central aperture and a plurality sets of apertures aligned in a plurality of directions to simultaneously measure the local tilt angle and degree of focus of the incoming wavefront.
摘要翻译：提供波前传感器以确定输入的失真能量束的特性，例如倾斜角和/或焦度。传感器包括多透镜阵列，屏幕和光束检测器。多透镜阵列将能量束聚焦到多个焦点。位于多透镜阵列附近的屏幕具有至少一个孔，以允许能量束的一部分通过，同时阻挡能量束的剩余部分到达多透镜阵列。每个孔径与多透镜阵列的透镜对准。光束检测器检测通过相应孔径的能量束的所得到的焦点，并确定通过的能量束的特性。屏幕可以包括中心孔径，以测量进入透镜阵列的透镜的入射波阵面的局部倾斜角度。屏幕还可以包括被配置为沿多个方向对齐的多组孔，每组孔径沿着相应的方向测量入射波前的焦距。屏幕还可以包括中心孔和在多个方向上排列的多组孔的组合，以同时测量入射波前的局部倾斜角和聚焦度。

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