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    • 2. 发明授权
    • ESD structure without ballasting resistors
    • ESD结构,无镇流电阻
    • US07566935B2
    • 2009-07-28
    • US11713193
    • 2007-03-01
    • Shu Huei LinJian Hsing LeeShao Chang HuangCheng Hsu WuChuan Ying Lee
    • Shu Huei LinJian Hsing LeeShao Chang HuangCheng Hsu WuChuan Ying Lee
    • H01L23/62
    • H01L27/0266H01L2924/0002H01L2924/00
    • An electrostatic discharge (ESD) structure connected to a bonding pad in an integrated circuit comprising: a P-type substrate with one or more first P+ regions connected to a low voltage supply (GND), a first Nwell formed in the P-type substrate, one or more second P+ regions disposed inside the first Nwell and connected to the bonding pad, at least one first N+ region disposed outside the first Nwell but in the P-type substrate and connected to the GND, at least one second N+ region disposed outside the first Nwell but in the P-type substrate and connected to the bonding pad, wherein the second N+ region is farther away from the first Nwell than the first N+ region, and at least one conductive material disposed above the P-type substrate between the first and second N+ regions and coupled to the GND, wherein the first N+ region, the second N+ region and the conductive material form the source, drain and gate of an NMOS transistor, respectively, and the first P+ region is farther away from the first Nwell than the NMOS transistor.
    • 一种连接到集成电路中的接合焊盘的静电放电(ESD)结构,包括:具有连接到低电压源(GND)的一个或多个第一P +区的P型衬底,形成在P型衬底中的第一Nwell 设置在所述第一Nwell内并连接到所述接合焊盘的一个或多个第二P +区域,设置在所述第一N阱之外但在所述P型衬底中并连接到所述GND的至少一个第一N +区域,设置至少一个第二N +区域 在第一N阱之外,但是在P型衬底中并连接到焊盘,其中第二N +区域比第一N +区域远离第一Nwell区域,并且至少一个导电材料设置在P型衬底之上 第一N +区和第二N +区,并且耦合到GND,其中第一N +区,第二N +区和导电材料分别形成NMOS晶体管的源极,漏极和栅极,并且第一P +区域更远 从第一个Nwell比NMOS晶体管。
    • 4. 发明授权
    • Method for fabricating an isolation trench applied in BiCMOS processes
    • 用于制造应用于BiCMOS工艺中的隔离沟槽的方法
    • US06281061B1
    • 2001-08-28
    • US09575566
    • 2000-05-22
    • Cheng-Hsu WuChin Liang Chen
    • Cheng-Hsu WuChin Liang Chen
    • H01L218238
    • H01L21/8249H01L21/76224
    • The present invention discloses a method for fabricating isolation trenches applied in BiCMOS processes. The isolation trenches are formed initially by defining an oxide layer formed on a semiconductor substrate. Then an epitaxy layer is formed on the substrate and a polysilicon layer is formed on the oxide layer by selective epitaxial growth (SEG). After forming well regions and a collector region in the epitaxy layer, the polysilicon layer is etched and stopped at the oxide layer such that trenches are formed. Subsequently, an isolating material is filled into the trenches to form isolation trenches. It is noted that the oxide layer definition, the epitaxy layer and the polysilicon layer growth by SEG, and the polysilicon etching processes simplify the process of forming isolation trenches. In addition, the integration of the semiconductor is increased, and the isolating effect is good.
    • 本发明公开了一种用于制造应用于BiCMOS工艺的隔离沟槽的方法。 首先通过限定形成在半导体衬底上的氧化物层来形成隔离沟槽。 然后在衬底上形成外延层,并通过选择性外延生长(SEG)在氧化物层上形成多晶硅层。 在外延层中形成阱区域和集电极区域之后,在氧化物层处蚀刻并停止多晶硅层,从而形成沟槽。 随后,将隔离材料填充到沟槽中以形成隔离沟槽。 应注意,通过SEG的氧化物层定义,外延层和多晶硅层生长以及多晶硅蚀刻工艺简化了形成隔离沟槽的工艺。 此外,半导体的集成增加,隔离效果良好。
    • 6. 发明申请
    • ESD structure without ballasting resistors
    • ESD结构,无镇流电阻
    • US20080211027A1
    • 2008-09-04
    • US11713193
    • 2007-03-01
    • Shu Huei LinJian-Hsing LeeShao-Chang HuangCheng Hsu WuChuan Ying Lee
    • Shu Huei LinJian-Hsing LeeShao-Chang HuangCheng Hsu WuChuan Ying Lee
    • H01L23/62
    • H01L27/0266H01L2924/0002H01L2924/00
    • An electrostatic discharge (ESD) structure connected to a bonding pad in an integrated circuit comprising: a P-type substrate with one or more first P+ regions connected to a low voltage supply (GND), a first Nwell formed in the P-type substrate, one or more second P+ regions disposed inside the first Nwell and connected to the bonding pad, at least one first N+ region disposed outside the first Nwell but in the P-type substrate and connected to the GND, at least one second N+ region disposed outside the first Nwell but in the P-type substrate and connected to the bonding pad, wherein the second N+ region is farther away from the first Nwell than the first N+ region, and at least one conductive material disposed above the P-type substrate between the first and second N+ regions and coupled to the GND, wherein the first N+ region, the second N+ region and the conductive material form the source, drain and gate of an NMOS transistor, respectively, and the first P+ region is farther away from the first Nwell than the NMOS transistor.
    • 一种连接到集成电路中的接合焊盘的静电放电(ESD)结构,包括:具有连接到低电压源(GND)的一个或多个第一P +区的P型衬底,形成在P型衬底中的第一Nwell 设置在所述第一Nwell内并连接到所述接合焊盘的一个或多个第二P +区域,设置在所述第一N阱之外但在所述P型衬底中并连接到所述GND的至少一个第一N +区域,设置至少一个第二N +区域 在第一N阱之外,但在P型衬底中并连接到焊盘,其中第二N +区域比第一N +区域远离第一Nwell区域,并且至少一个导电材料设置在P型衬底之上 第一N +区和第二N +区,并且耦合到GND,其中第一N +区,第二N +区和导电材料分别形成NMOS晶体管的源极,漏极和栅极,并且第一P +区域更远 从第一个Nwell比NMOS晶体管。