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    • 6. 发明申请
    • Sputter target monitoring system
    • 溅射目标监测系统
    • US20050236266A1
    • 2005-10-27
    • US10518293
    • 2003-06-10
    • John PooleCharles Wickersham
    • John PooleCharles Wickersham
    • C23C14/32C23C14/34C23C14/54H01J37/34
    • H01J37/32935C23C14/34C23C14/54H01J37/34H01J37/3444H01J37/3482
    • A sputtering target monitoring system (20) for monitoring the status of a sputtering source target (22) during the sputtering process. The collection of data is initiated based on measured voltages in the sputtering source target (22), whereas the arcing count is determined based on current spikes or interruptions to the current in the sputtering source target (22) during the sputtering process. The real time data collected during the sputtering process is recorded and displayed in table or graphical format at any time during the sputtering process. Thus, problems in the sputtering process, or in the sputtering source (22), including an approaching end of life of the target may be easily ascertained. Alarms, messages or other indicators may be used to alert operators to problems or conditions during the sputtering process.
    • 一种用于在溅射过程中监测溅射源靶(22)的状态的溅射靶监测系统(20)。 基于溅射源目标(22)中的测量电压来启动数据的收集,而基于溅射过程期间溅射源目标(22)中的电流的电流尖峰或中断来确定电弧计数。 在溅射过程中随时记录和显示溅射过程中收集的实时数据,并以表格或图形格式显示。 因此,可以容易地确定溅射工艺或溅射源(22)中包括目标寿命终止的问题。 报警,消息或其他指示器可用于提醒操作员在溅射过程中的问题或条件。