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1. 发明授权

US08261617B2 Micro piezoresistive pressure sensor and manufacturing method thereof 有权
标题翻译：微压阻式压力传感器及其制造方法
公开(公告)号：US08261617B2
公开(公告)日：2012-09-11
申请号：US12745745
申请日：2008-04-21
申请人： Chang Auck Choi , Chang Han Je , Gunn Hwang , Youn Tae Kim , Sung Hae Jung , Myung Lae Lee , Sung Sik Lee , Seok Hwan Moon
发明人： Chang Auck Choi , Chang Han Je , Gunn Hwang , Youn Tae Kim , Sung Hae Jung , Myung Lae Lee , Sung Sik Lee , Seok Hwan Moon
IPC分类号： G01L9/06 , B23P17/04
CPC分类号： G01L9/0042 , Y10T29/42 , Y10T29/49
摘要： A micro semiconductor-type pressure sensor and a manufacturing method thereof are provided. The micro semi-conductor-type pressure sensor is implemented by etching a cavity-formation region of a substrate to form a plurality of trenches, oxidizing the plurality of trenches through a thermal oxidation process to form a cavity-formation oxide layer, forming a membrane-formation material layer on upper portions of the cavity-formation oxide layer and the substrate, forming a plurality of etching holes in the membrane-formation material layer, removing the cavity-formation oxide layer through the plurality of etching holes to form a cavity buried in the substrate, forming a membrane reinforcing layer on an upper portion of the membrane-formation material layer to form a membrane for closing the cavity, and forming sensitive films made of a piezoresisive material on an upper portion of the membrane.
摘要翻译：提供一种微型半导体型压力传感器及其制造方法。微型半导体型压力传感器通过蚀刻衬底的空腔形成区域以形成多个沟槽来实现，通过热氧化工艺氧化多个沟槽以形成空腔形成氧化物层，形成膜在形成空腔的氧化物层和衬底的上部上形成一层形成材料层，在膜形成材料层中形成多个蚀刻孔，通过多个蚀刻孔去除腔形成氧化物层，以形成埋入腔在所述基板中，在所述膜形成材料层的上部形成膜增强层，以形成用于封闭所述空腔的膜，并且在所述膜的上部形成由压阻材料制成的敏感膜。

2. 发明授权

US08143579B2 Resistive material for bolometer, bolometer for infrared detector using the material, and method of manufacturing the bolometer 有权
标题翻译：辐射热测量仪的电阻材料，使用该材料的红外探测器的测辐射热仪，以及制造测辐射热计的方法
公开(公告)号：US08143579B2
公开(公告)日：2012-03-27
申请号：US12859466
申请日：2010-08-19
申请人： Woo Seok Yang , Sang Hoon Cheon , Seong Mok Cho , Ho Jun Ryu , Chang Auck Choi
发明人： Woo Seok Yang , Sang Hoon Cheon , Seong Mok Cho , Ho Jun Ryu , Chang Auck Choi
IPC分类号： G01J5/20
CPC分类号： G01J5/04 , G01J5/046
摘要： A resistive material for a bolometer, a bolometer for an infrared detector using the material, and a method of manufacturing the bolometer are provided. In the resistive material, at least one element selected from the group consisting of nitrogen (N), oxygen (O) and germanium (Ge) is included in antimony (Sb). The resistive material has superior properties such as high temperature coefficient of resistance (TCR), low resistivity, a low noise constant, and is easily formed in a thin film structure by sputtering typically used in a complementary metal-oxide semiconductor (CMOS) process, so that it can be used as a resistor for the bolometer for an uncooled infrared detector, and thus provide the infrared detector with superior temperature precision.
摘要翻译：提供了用于测辐射热力计的电阻材料，用于使用该材料的红外探测器的测辐射热计，以及制造测辐射热计的方法。在电阻材料中，选自氮（N），氧（O）和锗（Ge）中的至少一种元素包括在锑（Sb）中。电阻材料具有优异的性能，例如高温电阻系数（TCR），低电阻率，低噪声常数，并且易于通过通常用于互补金属氧化物半导体（CMOS）工艺中的溅射在薄膜结构中形成，因此它可以用作非制冷红外探测器的辐射热计的电阻器，从而为红外检测器提供出色的温度精度。

3. 发明申请

US20100050771A1 CAPACITIVE ACCELEROMETER 有权
标题翻译：电容式加速度计
公开(公告)号：US20100050771A1
公开(公告)日：2010-03-04
申请号：US12517068
申请日：2007-12-05
申请人： Chang-Han Je , Gunn Hwang , Sung-Hae Jung , Myung-Lae Lee , Chang-Auck Choi
发明人： Chang-Han Je , Gunn Hwang , Sung-Hae Jung , Myung-Lae Lee , Chang-Auck Choi
IPC分类号： G01P15/125
CPC分类号： G01P15/125 , G01P15/0802
摘要： A conventional capacitive accelerometer has a limitation in reducing a distance between a sensing electrode and a reference electrode, and requires a complex process and a separate method of correcting a clearance difference caused by a process error. However, the capacitive accelerometer of the present invention has high sensitivity, can be simply manufactured by maintaining a very narrow distance between a reference electrode and a sensing electrode, and can make it unnecessary to individually correct each manufactured accelerometer by removing or drastically reducing a functional difference due to a process error.
摘要翻译：常规的电容加速度计在减小感测电极和参考电极之间的距离方面具有局限性，并且需要一种复杂的过程和用于校正由过程误差引起的间隙差异的单独方法。然而，本发明的电容加速度计具有高的灵敏度，可以通过在参考电极和感测电极之间保持非常窄的距离来简单地制造，并且可以使得不需要通过去除或大幅度地减少功能性来单独校正每个制造的加速度计差异由于过程错误。

4. 发明申请

US20090308160A1 VERTICAL ACCELERATION MEASURING APPARATUS 审中-公开
标题翻译：垂直加速度测量装置
公开(公告)号：US20090308160A1
公开(公告)日：2009-12-17
申请号：US12355644
申请日：2009-01-16
申请人： Chang Han Je , Chang Kyu Kim , Chang Auck Choi
发明人： Chang Han Je , Chang Kyu Kim , Chang Auck Choi
IPC分类号： G01P15/125
CPC分类号： G01P15/125
摘要： Provided is a vertical acceleration measuring apparatus including a substrate; a plumb that is separated from the substrate to operate; a plurality of movable electrode plates that are formed at an upper end of the plumb in a predetermined direction; a movable electrode plate supporting portion that is formed at the upper end of the plumb and supports the movable electrode plates; a fixed body that is formed at an upper end of the substrate; a fixed electrode plate supporting portion that is coupled to the fixed body adjacent to the upper end of the plumb; a plurality of fixed electrode plates that are supported by the fixed electrode plate supporting portion and arranged to face the movable electrode plates in parallel; and a connection spring that connects the fixed body and the movable electrode plate supporting portion.
摘要翻译：提供一种包括基板的垂直加速度测量装置; 与基板分离的铅垂操作; 多个可动电极板，其沿预定方向形成在铅垂的上端; 可动电极板支撑部分，其形成在铅垂的上端并支撑可动电极板; 形成在所述基板的上端的固定体; 固定电极板支撑部，其与所述固定体联接，所述固定体邻近所述铅垂的上端; 多个固定电极板，由固定电极板支撑部支撑并平行地面对可动电极板; 以及连接固定体和可动电极板支撑部的连接弹簧。

5. 发明授权

US07012752B2 Tunable-wavelength optical filter and method of manufacturing the same 有权
标题翻译：可调谐波长光学滤波器及其制造方法
公开(公告)号：US07012752B2
公开(公告)日：2006-03-14
申请号：US11045554
申请日：2005-01-27
申请人： Chang Auck Choi , Myung Lae Lee , Chang Kyu Kim , Chi Hoon Jun , Youn Tae Kim
发明人： Chang Auck Choi , Myung Lae Lee , Chang Kyu Kim , Chi Hoon Jun , Youn Tae Kim
IPC分类号： G02B27/00
CPC分类号： G02B26/001 , G01J3/26 , G02B5/0833 , G02B6/29361 , G02B6/29389 , G02B6/29395
摘要： An active type tunable wavelength optical filter having a Fabry-Perot structure is disclosed. A tunable wavelength optical filter which comprises a lower mirror in which silicon films and oxide films are sequentially laminated in a multi-layer and the silicon film is laminated on the highest portion; an upper mirror in which silicon films and oxide films are sequentially laminated in a multi-layer and the silicon film is laminated on the highest portion and which is spaced away from the lower mirror by a predetermined distance; a connecting means for connecting and supporting the lower mirror and the upper mirror to a semiconductor substrate; and electrode pads for controlling the gap between the lower mirror and the upper mirror by an electrostatic force and the method of manufacturing the same are provided. Thereby, by finely driving the upper and lower mirrors composed of a multi-layer structure of the silicon film and the oxide film by the electrostatic force, the wavelength of the transmitted light with respect to the incident light can be selectively sent.
摘要翻译：公开了一种具有法布里 - 珀罗结构的有源型可调谐波长滤光器。一种可调波长滤光器，包括下反射镜，其中硅膜和氧化物膜顺次层叠在多层中，并且硅膜层压在最高部分上; 其中硅膜和氧化物膜顺次层叠在多层中并且硅膜层压在最高部分上并且与下反射镜间隔预定距离的上反射镜; 用于将下反射镜和上反射镜连接和支撑到半导体基板的连接装置; 以及用于通过静电力控制下反射镜和上反射镜之间的间隙的电极焊盘及其制造方法。由此，通过利用静电力微细地驱动由硅膜和氧化膜构成的上反射镜和下反射镜，可以选择性地发送透射光相对于入射光的波长。

6. 发明授权

US06531417B2 Thermally driven micro-pump buried in a silicon substrate and method for fabricating the same 有权
公开(公告)号：US06531417B2
公开(公告)日：2003-03-11
申请号：US09834586
申请日：2001-04-12
申请人： Chang-Auck Choi , Won-Ick Jang , Chi-Hoon Jun , Yun-Tae Kim
发明人： Chang-Auck Choi , Won-Ick Jang , Chi-Hoon Jun , Yun-Tae Kim
IPC分类号： H01L2100
CPC分类号： F04B53/1077 , F04B19/24 , F04B43/043
摘要： The present invention relates to a micro electro mechanical system (MEMS); and, more particularly, to a micro pump used in micro fluid transportation and control and a method for fabricating the same. The micro pump according to the present invention comprises: trenches formed in a silicon substrate in order to form a pumping region including a main pumping region and an auxiliary pumping region; channels formed on both sides of the pumping region; a flow prevention region having backward-flow preventing layers to resist a fluid flow; inlet/outlet regions formed at each of the channels which are disposed on both ends of the pumping region; an outer layer covering the trenches of the silicon substrate and opening portions of the inlet/outlet regions; and a thermal conducting layer formed on the outer layer and over the main pumping region so that a pressure of the fluid in the main pumping region is increased by the thermal conducting layer.

7. 发明授权

US6084656A Programmable mask for exposure apparatus 有权
标题翻译：曝光设备可编程掩模
公开(公告)号：US6084656A
公开(公告)日：2000-07-04
申请号：US141554
申请日：1998-08-28
申请人： Chang Auck Choi , Jong Hyun Lee , Won Ick Jang , Yong Il Lee , Jong Tae Baek , Bo Woo Kim
发明人： Chang Auck Choi , Jong Hyun Lee , Won Ick Jang , Yong Il Lee , Jong Tae Baek , Bo Woo Kim
IPC分类号： G03F7/20 , G03B27/72 , G03B27/42 , G03F9/00
CPC分类号： G03F7/70291
摘要： This invention discloses a programmable mask for exposure apparatus which is formed by an integrated pixels of a micro-devices which shut or open a light by an electrical signal. This invention provides a photolithography method by projecting on a silicon wafer a directly designed circuit pattern which is made on a programmable mask fabricated by an integration of many a micro optical shutter devices as a pixels.
摘要翻译：本发明公开了一种曝光装置的可编程掩模，其由通过电信号关闭或打开光的微器件的集成像素形成。本发明提供了一种通过在硅晶片上投影直接设计的电路图案的光刻方法，该电路图案是通过将许多微型光学快门器件集成为像素而制造的可编程掩模上制成的。

8. 发明授权

US08047074B2 Humidity sensor and method of manufacturing the same 有权
标题翻译：湿度传感器及其制造方法
公开(公告)号：US08047074B2
公开(公告)日：2011-11-01
申请号：US12617701
申请日：2009-11-12
申请人： Chi Hoon Jun , Sang Choon Ko , Chang Auck Choi , Byoung Gon Yu
发明人： Chi Hoon Jun , Sang Choon Ko , Chang Auck Choi , Byoung Gon Yu
IPC分类号： G01N27/12
CPC分类号： G01N27/121
摘要： Provided are a humidity sensor and a method of manufacturing the same. The humidity sensor has high sensitivity, quick response time, improved temperature characteristics, low hysteresis and excellent durability. Moreover, for the humidity sensor, a humidity sensitive layer may be formed of various materials. The humidity sensor may be manufactured in a small size on a large scale.The humidity sensor includes a substrate, an open cavity with an open upper portion formed to have a depth and a width in the substrate, a plurality of electrode pads formed on the substrate, a heater connected to one pad of the electrode pads at one end, and connected to another pad of the electrode pads at the other end to be suspended over the open cavity, a plurality of sensing electrodes formed on the same plane as the heater, and suspended over the open cavity to output a sensed signal to the electrode pads, a humidity sensitive layer formed on the heater and the sensing electrodes, suspended over the open cavity, and changed in characteristic according to the humidity, and an ambient temperature measurement part configured to measure the temperature around the humidity sensor, wherein the temperature is used as a reference temperature to control a heating temperature of the heater.
摘要翻译：提供了一种湿度传感器及其制造方法。湿度传感器灵敏度高，响应时间快，温度特性好，滞后小，耐久性好。此外，对于湿度传感器，湿度敏感层可以由各种材料形成。湿度传感器可以大规模制造。湿度传感器包括基底，具有形成为在基底中具有深度和宽度的敞开上部的开口腔，形成在基底上的多个电极垫，一端连接到电极垫的一个垫并且在另一端连接到电极焊盘的另一焊盘以悬挂在开放空腔上，多个感测电极形成在与加热器相同的平面上，并且悬挂在开放空腔上以将感测到的信号输出到电极衬垫，形成在加热器上的湿度敏感层和悬挂在开放空腔上的感测电极，并且根据湿度改变特性;以及环境温度测量部件，被配置为测量湿度传感器周围的温度，其中温度为用作参考温度来控制加热器的加热温度。

9. 发明授权

US07997137B2 Bidirectional readout circuit for detecting direction and amplitude of capacitive MEMS accelerometers 有权
标题翻译：用于检测电容MEMS加速度计的方向和振幅的双向读出电路
公开(公告)号：US07997137B2
公开(公告)日：2011-08-16
申请号：US12168025
申请日：2008-07-03
申请人： Sung Sik Lee , Ji Man Park , Myung Lae Lee , Sung Hae Jung , Chang Han Je , Gunn Hwang , Chang Auck Choi
发明人： Sung Sik Lee , Ji Man Park , Myung Lae Lee , Sung Hae Jung , Chang Han Je , Gunn Hwang , Chang Auck Choi
IPC分类号： G01P15/08
CPC分类号： G01P15/125 , G01P13/04
摘要： There is provided a bidirectional readout circuit for detecting direction and amplitude of an oscillation sensed at a capacitive microelectromechanical system (MEMS) accelerometer, the bidirectional readout circuit converting capacitance changes of the capacitive MEMS accelerometer into a time change amount by using high resolution capacitance-to-time conversion technology and outputting the time change amount as the direction and the amplitude of the oscillation by using time-to-digital conversion (TDC) technology, thereby detecting not only the amplitude of the oscillation but also the direction thereof, which is capable of being applied to various MEMS sensors.
摘要翻译：提供了一种用于检测在电容式微机电系统（MEMS）加速度计处感测的振荡的方向和振幅的双向读出电路，双向读出电路通过使用高分辨率电容 - 电容将电容式MEMS加速度计的电容变化转换为时变量时间转换技术，并且通过使用时间 - 数字转换（TDC）技术输出时间变化量作为振荡的方向和振幅，从而不仅检测振荡的振幅，而且检测其方向，这是能够被应用于各种MEMS传感器。

10. 发明申请

US20110192040A1 CIRCUIT FOR CALCULATING A THREE-DIMENSIONAL INCLINATION ANGLE 有权
标题翻译：用于计算三维内插角的电路
公开(公告)号：US20110192040A1
公开(公告)日：2011-08-11
申请号：US12672997
申请日：2008-04-15
申请人： Sung Sik Lee , Myung Lae Lee , Chang Han Je , Gunn Hwang , Chang Auck Choi
发明人： Sung Sik Lee , Myung Lae Lee , Chang Han Je , Gunn Hwang , Chang Auck Choi
IPC分类号： G01C9/06
CPC分类号： G01C9/00 , G01C9/06
摘要： A three-dimensional inclination angle calculation circuit is provided. The three-dimensional inclination angle calculation circuit includes: X-axis, Y-axis, and Z-axis vibration sensors which change X-axis, Y-axis, and Z-axis electrostatic capacitances according to three-dimensional positions of a measured plane with respect to a reference plane, respectively; X-axis, Y-axis, and Z-axis position value acquisition units which acquire X-axis, Y-axis, and Z-axis position values corresponding to the X-axis, Y-axis, and Z-axis electrostatic capacitances, respectively; and an inclination angle calculation unit which calculates an inclination angle of the measured plane with respect to the reference plane based on the X-axis, Y-axis, and Z-axis position values. Accordingly, it is possible to very easily calculate an inclination angle according to a three-dimensional position of a to-be-measured apparatus by using an existing vibration sensor.
摘要翻译：提供三维倾斜角计算电路。三维倾斜角计算电路包括：根据测量平面的三维位置改变X轴，Y轴和Z轴静电电容的X轴，Y轴和Z轴振动传感器分别相对于参考平面; 获取对应于X轴，Y轴和Z轴静电电容的X轴，Y轴和Z轴位置值的X轴，Y轴和Z轴位置值获取单元，分别; 以及倾斜角计算单元，其基于X轴，Y轴和Z轴位置值计算测量平面相对于参考平面的倾斜角度。因此，通过使用现有的振动传感器，可以非常容易地计算出被测量装置的三维位置的倾斜角度。

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