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1. 发明授权

US5663854A Prebent ceramic suspension 失效
标题翻译：预浸陶瓷悬浮液
公开(公告)号：US5663854A
公开(公告)日：1997-09-02
申请号：US474616
申请日：1995-06-07
申请人： Alfred Grill , Michael Anthony Moser , Vishnubhai Vitthalbhai Patel , Clinton Davis Snyder , Celia E. Yeack-Scranton, deceased
发明人： Alfred Grill , Michael Anthony Moser , Vishnubhai Vitthalbhai Patel , Clinton Davis Snyder , Celia E. Yeack-Scranton, deceased
IPC分类号： G11B5/48
CPC分类号： G11B5/4833
摘要： The present invention provides a prebent ceramic suspension which includes a ceramic load beam which is bent by a stress patch. With thin film techniques the stress patch is formed on top of the load beam. In the preferred embodiment the patch is amorphous hydrogenated diamond-like carbon. When the suspension is on a wafer the carbon patch exerts a compressive stress on a top surface of the load beam just under the patch. When the suspension is released from the wafer the compressive patch exerts tensile forces on the top surface of the load beam causing an end of the load beam to bend toward the wafer. The amount of bending of the suspension can be accurately controlled by the cross sections of the load beam and the patch as well as the lateral dimensions of the patch. Further control can be achieved by controlling the hydrogen, nitrogen and other additive components of the carbon patch. After fabrication bending can be lessened by machining portions of the patch with a laser beam to effectively negate the stress of these portions. Still further, the patch can be laterally configured so that the suspension forms an arc when preloaded on a disk. During fabrication various layers can be formed by thin film deposition to form an integrated magnetic head-slider-suspension. A pair of prebent ceramic suspensions can be preloaded on adjacent magnetic disks by a single actuator arm.
摘要翻译：本发明提供了一种前置陶瓷悬架，其包括由应力块弯曲的陶瓷载荷梁。利用薄膜技术，应力贴片形成在负载梁的顶部。在优选的实施方案中，贴剂是无定形氢化金刚石样碳。当悬浮液在晶片上时，碳贴片在正好在补片下方的负载梁的顶表面上施加压应力。当悬浮液从晶片释放时，压片在载荷梁的顶表面上施加拉力，使载荷梁的一端向晶片弯曲。可以通过负载梁和贴片的横截面以及贴片的横向尺寸精确地控制悬架的弯曲量。通过控制碳补片的氢，氮和其他添加剂组分可以进一步控制。通过利用激光束加工贴片的部分可以减少制造弯曲之后，有效地消除这些部分的应力。此外，补片可以横向配置，使得悬挂在预先装载在盘上时形成弧。在制造期间，可以通过薄膜沉积形成各种层以形成集成的磁头 - 滑块 - 悬架。一对预制陶瓷悬架可以通过单个执行器臂预载在相邻的磁盘上。

2. 发明授权

US6049443A Suspension bent by stressed patch 失效
标题翻译：暂停弯曲受压力补丁
公开(公告)号：US6049443A
公开(公告)日：2000-04-11
申请号：US281208
申请日：1999-03-30
申请人： Alfred Grill , Michael Anthony Moser , Vishnubhai Vitthalbhai Patel , Clinton David Snyder , Celia E. Yeack-Scranton, deceased
发明人： Alfred Grill , Michael Anthony Moser , Vishnubhai Vitthalbhai Patel , Clinton David Snyder , Celia E. Yeack-Scranton, deceased
IPC分类号： C08K3/08 , C08K3/38 , C09J183/10 , C09J183/14 , G11B5/48
CPC分类号： C09J183/10 , C08K3/08 , C08K3/38 , C09J183/14 , C08K2003/0806
摘要： The present invention provides a prebent ceramic suspension which includes a ceramic load beam which is bent by a stress patch. With thin film techniques the stress patch is formed on top of the load beam. In the preferred embodiment the patch is amorphous hydrogenated diamond-like carbon. When the suspension is on a wafer the carbon patch exerts a compressive stress on a top surface of the load beam just under the patch. When the suspension is released from the wafer the compressive patch exerts tensile forces on the top surface of the load beam causing an end of the load beam to bend toward the wafer. The amount of bending of the suspension can be accurately controlled by the cross sections of the load beam and the patch as well as the lateral dimensions of the patch. Further control can be achieved by controlling the hydrogen, nitrogen and other additive components of the carbon patch. After fabrication bending can be lessened by machining portions of the patch with a laser beam to effectively negate the stress of these portions. Still further, the patch can be laterally configured so that the suspension forms an arc when preloaded on a disk During fabrication various layers can be formed by thin film deposition to form an integrated magnetic head-slider-suspension. A pair of prebent ceramic suspensions can be preloaded on adjacent magnetic disks by a single actuator arm.
摘要翻译：本发明提供了一种前置陶瓷悬架，其包括由应力块弯曲的陶瓷载荷梁。利用薄膜技术，应力贴片形成在负载梁的顶部。在优选的实施方案中，贴剂是无定形氢化金刚石样碳。当悬浮液在晶片上时，碳贴片在正好在补片下方的负载梁的顶表面上施加压应力。当悬浮液从晶片释放时，压片在载荷梁的顶表面上施加拉力，使载荷梁的一端向晶片弯曲。可以通过负载梁和贴片的横截面以及贴片的横向尺寸精确地控制悬架的弯曲量。通过控制碳补片的氢，氮和其他添加剂组分可以进一步控制。通过利用激光束加工贴片的部分可以减少制造弯曲之后，有效地消除这些部分的应力。此外，贴片可以横向配置，使得当预先装载在盘上时悬架形成电弧。在制造期间，可以通过薄膜沉积形成各种层，以形成集成的磁头 - 滑块 - 悬架。一对预制陶瓷悬架可以通过单个执行器臂预载在相邻的磁盘上。

3. 发明授权

US5963397A Ceramic suspension bent by stressed patch 失效
标题翻译：陶瓷悬挂由应力补片弯曲
公开(公告)号：US5963397A
公开(公告)日：1999-10-05
申请号：US798684
申请日：1997-02-12
申请人： Alfred Grill , Michael Anthony Moser , Vishnubhai Vitthalbhai Patel , Clinton David Snyder , Celia E. Yeack-Scranton, deceased
发明人： Alfred Grill , Michael Anthony Moser , Vishnubhai Vitthalbhai Patel , Clinton David Snyder , Celia E. Yeack-Scranton, deceased
IPC分类号： G11B5/48
CPC分类号： G11B5/4833
摘要： The present invention provides a prebent ceramic suspension which includes a ceramic load beam which is bent by a stress patch. With thin film techniques the stress patch is formed on top of the load beam. In the preferred embodiment the patch is amorphous hydrogenated diamond-like carbon. When the suspension is on a wafer the carbon patch exerts a compressive stress on a top surface of the load beam just under the patch. When the suspension is released from the wafer the compressive patch exerts tensile forces on the top surface of the load beam causing an end of the load beam to bend toward the wafer. The amount of bending of the suspension can be accurately controlled by the cross sections of the load beam and the patch as well as the lateral dimensions of the patch. Further control can be achieved by controlling the hydrogen, nitrogen and other additive components of the carbon patch. After fabrication bending can be lessened by machining portions of the patch with a laser beam to effectively negate the stress of these portions. Still further, the patch can be laterally configured so that the suspension forms an arc when preloaded on a disk. During fabrication various layers can be formed by thin film deposition to form an integrated magnetic head-slider-suspension. A pair of prebent ceramic suspensions can be preloaded on adjacent magnetic disks by a single actuator arm.
摘要翻译：本发明提供了一种前置陶瓷悬架，其包括由应力块弯曲的陶瓷载荷梁。利用薄膜技术，应力贴片形成在负载梁的顶部。在优选的实施方案中，贴剂是无定形氢化金刚石样碳。当悬浮液在晶片上时，碳贴片在正好在补片下方的负载梁的顶表面上施加压应力。当悬浮液从晶片释放时，压片在载荷梁的顶表面上施加拉力，使载荷梁的一端向晶片弯曲。可以通过负载梁和贴片的横截面以及贴片的横向尺寸精确地控制悬架的弯曲量。通过控制碳补片的氢，氮和其他添加剂组分可以进一步控制。通过利用激光束加工贴片的部分可以减少制造弯曲之后，有效地消除这些部分的应力。此外，补片可以横向配置，使得悬挂在预先装载在盘上时形成弧。在制造期间，可以通过薄膜沉积形成各种层以形成集成的磁头 - 滑块 - 悬架。一对预制陶瓷悬架可以通过单个执行器臂预载在相邻的磁盘上。

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