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    • 5. 发明申请
    • Method of Fabricating Flash Memory Device
    • 制造闪存设备的方法
    • US20100167490A1
    • 2010-07-01
    • US12629920
    • 2009-12-03
    • Jong-wan ChoiYong-soon ChoiBo-young LeeEunkee HongEun-kyung BaekJu-seon Goo
    • Jong-wan ChoiYong-soon ChoiBo-young LeeEunkee HongEun-kyung BaekJu-seon Goo
    • H01L21/762
    • H01L27/11521H01L27/11524
    • Provided are methods of fabricating flash memory devices that may prevent a short circuit from occurring between cell gate lines. Methods of fabricating such flash memory devices may include forming gate lines including a series of multiple cell gate lines and multiple selection gate lines. Each gate line may include a stacked structure of a tunnel insulating layer, a floating gate, a gate insulating layer, and/or a polysilicon layer operable to be a control gate, all formed on a semiconductor substrate. Methods may include forming a first insulating layer that selectively fills gaps between the cell gate lines from the bottom up and between adjacent ones of the cell gate lines and the selection gate lines, and does not fill a space located on outer sides of the selection gate lines that are opposite the plurality of cell gate lines. A spacer may be formed on the outer sides of the selection gate lines that are opposite to the cell gate lines, after forming the first insulating layer. A second insulating layer may be formed in a space where the spacer is formed.
    • 提供了制造闪存器件的方法,其可以防止在单元栅极线之间发生短路。 制造这种闪存器件的方法可以包括形成包括一系列多单元栅极线和多个选择栅极线的栅极线。 每个栅极线可以包括全部形成在半导体衬底上的隧道绝缘层,浮动栅极,栅极绝缘层和/或可操作为控制栅极的多晶硅层的堆叠结构。 方法可以包括形成第一绝缘层,其选择性地从底部向上和相邻的单元栅极线和选择栅极线之间填充单元栅极线之间的间隙,并且不填充位于选择栅极的外侧的空间 与多个单元栅极线相对的线。 在形成第一绝缘层之后,可以在选择栅极线的与单元栅极线相对的外侧上形成间隔物。 可以在形成间隔物的空间中形成第二绝缘层。
    • 6. 发明申请
    • APPARATUS FOR FORMING LONGITUDINAL THERMAL-FATIGUE CRACKS
    • 形成长期热疲劳裂纹的装置
    • US20100109211A1
    • 2010-05-06
    • US12325726
    • 2008-12-01
    • Bo Young LEEJae Seong KIMWoong Ki HWANG
    • Bo Young LEEJae Seong KIMWoong Ki HWANG
    • C21D1/78
    • G01N3/60G01N2203/0062
    • An apparatus for forming longitudinal thermal fatigue cracks. A heating unit has an induction coil disposed adjacent to an outer circumference of one side of a tubular test piece, on an inner surface of which a notch is formed. A cooling unit has a cooling water pump and a cooling water hose which forcibly injects cooling water from a cooling water storage source into an inner circumference of the tubular test piece. A control unit controls operation of the heating and cooling units. A cooling block partially encloses the outer circumference of the tubular test piece so as to control a magnitude of y-axial stress, is supplied with a cooling source of fluid or gas from an outside so as to repetitively cool the tubular test piece heated by the heating unit to adjust a temperature gradient, and has a longitudinal slit for controlling crack positions.
    • 一种用于形成纵向热疲劳裂纹的装置。 加热单元具有与管状试验片的一侧的外周相邻配置的感应线圈,其内表面形成有切口。 冷却单元具有冷却水泵和冷却水软管,其将冷却水从冷却水存储源强制地注入到管状试验片的内周。 控制单元控制加热和冷却单元的操作。 冷却块部分地包围管状试件的外周,以便控制y轴向应力的大小,从外部向流体或气体供给冷却源,以便重复地冷却由 加热单元来调节温度梯度,并且具有用于控制裂纹位置的纵向狭缝。
    • 7. 发明申请
    • APPARATUS FOR FORMING STRESS CORROSION CRACKS
    • 形成应力腐蚀裂缝的装置
    • US20100091930A1
    • 2010-04-15
    • US12325877
    • 2008-12-01
    • Bo Young LEEJae Seong KIMWoong Ki HWANG
    • Bo Young LEEJae Seong KIMWoong Ki HWANG
    • G21C9/00
    • G01N17/00G21C17/00
    • An apparatus for forming stress corrosion cracks comprises a heating unit which includes a conductive member and a heating coil disposed adjacent to the conductive member to generate steam pressure in the tube specimen, an end holding unit, and a control unit for controlling the heating unit and the end holding unit. The stress corrosion cracks occurring in the equipment of nuclear power plants or apparatus industries during operation can be directly formed in a tube specimen using steam pressure under conditions similar to those of the actual environment of nuclear power plants, thus increasing accuracy for analysis of properties of stress corrosion cracks which are in actuality generated, thereby improving reliability of nuclear power plants or apparatus industries and effectively assuring nondestructive testing capability, resulting in very useful industrial applicability.
    • 用于形成应力腐蚀裂纹的装置包括加热单元,其包括导电构件和邻近导电构件设置的加热线圈,以在管样本中产生蒸汽压力,端部保持单元和用于控制加热单元的控制单元, 末端保持单元。 核电站或设备工业设备在运行过程中产生的应力腐蚀裂纹,可以直接在管状试样上形成,在与核电厂实际环境条件相似的条件下,采用蒸汽压力,从而提高分析性能的准确性 实际产生的应力腐蚀裂纹,从而提高核电厂或设备行业的可靠性,有效保证无损检测能力,从而产生非常有用的工业应用。
    • 8. 发明申请
    • APPARATUS FOR FORMING THERMAL FATIGUE CRACKS
    • 形成热疲劳裂纹的装置
    • US20070295099A1
    • 2007-12-27
    • US11625706
    • 2007-01-22
    • Bo-Young LEEDuck Hee RyuJae Seong KimYong KimDae Hwan An
    • Bo-Young LEEDuck Hee RyuJae Seong KimYong KimDae Hwan An
    • G01N3/32
    • G01N3/60G01N2203/0066G01N2203/0073G01N2203/027
    • Disclosed is an apparatus and method for forming thermal fatigue cracks in a test piece for performance demonstration of nondestructive testing. The apparatus for forming thermal fatigue cracks includes a heating unit, having a conductive member attached around the outer surface of a pipe test piece and an induction heating coil disposed adjacent to the conductive member; a cooling unit, having a cooling water pump for forcibly supplying cooling water to the inner surface of the pipe test piece from a cooling water storage source and a cooling water hose; and a control unit for controlling operation of the heating unit and the cooling unit. Accordingly, thermal fatigue cracks similar to actual thermal fatigue cracks occurring during the operation of nuclear power plants or processing industry equipment are formed in a test piece, thereby assuring effective performance demonstration of nondestructive testing.
    • 公开了一种用于在无损检测的性能演示中形成试验片中的热疲劳裂纹的装置和方法。 用于形成热疲劳裂纹的装置包括加热单元,其具有附接在管道试件的外表面上的导电构件和邻近导电构件设置的感应加热线圈; 冷却单元,具有冷却水泵,用于从冷却水存储源和冷却水软管向管道试件的内表面强制供给冷却水; 以及用于控制加热单元和冷却单元的操作的控制单元。 因此,在试验片中形成类似于在核电厂或加工工业设备运行期间发生的实际热疲劳裂纹的热疲劳裂纹,从而确保了非破坏性试验的有效性能演示。