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    • 2. 发明申请
    • PLASMA PROCESSING APPARATUS
    • 等离子体加工设备
    • US20130256129A1
    • 2013-10-03
    • US13876133
    • 2010-12-22
    • Peng ChenMengxin ZhaoGang WeiLiang ZhangBai YangGuilong WuPeijun Ding
    • Peng ChenMengxin ZhaoGang WeiLiang ZhangBai YangGuilong WuPeijun Ding
    • C23C14/35
    • A plasma processing apparatus includes a chamber (20) and a target (25) above the chamber (20). The surface of the target (25) contacts the processing area of the chamber (20). The chamber (20) includes an insulating sub-chamber (21) and a first conductive sub-chamber (22), which are superposed. The first conductive sub-chamber (22) is provided under the insulating sub-chamber (21). The insulating sub-chamber (21) is made of insulating material, and the first conductive sub-chamber (22) is made of metal material. A Faraday shield component (10) which is made of metal material or insulating material electroplated with conductive coatings and includes at least one slit is provided in the insulating sub-chamber (21). An inductance coil (13) surrounds the exterior of the insulating sub-chamber (21). The problem about the wafer contamination due to particles formed on the surface of the coil during the sputtering process can be solved by using the plasma processing apparatus.
    • 等离子体处理装置包括在室(20)上方的室(20)和目标(25)。 靶(25)的表面与腔室(20)的处理区域接触。 所述腔室(20)包括叠置的绝缘子室(21)和第一导电子室(22)。 第一导电子室(22)设置在绝缘子室(21)的下方。 绝缘子室(21)由绝缘材料制成,第一导电子室(22)由金属材料制成。 在绝缘子室(21)中设置由金属材料制成的法拉第屏蔽部件(10)或电镀有导电涂层并且包括至少一个狭缝的绝缘材料。 电感线圈(13)围绕绝缘子室(21)的外部。 通过使用等离子体处理装置可以解决由于在溅射过程中在线圈表面上形成的颗粒导致的晶片污染的问题。
    • 4. 发明申请
    • COMPOSITE SOFT MAGNETIC POWDER, COMPOSITE SOFT MAGNETIC POWDER CORE, AND PREPARATION METHOD THEREFOR
    • 复合软磁粉,复合软磁粉及其制备方法
    • US20140104023A1
    • 2014-04-17
    • US13825856
    • 2011-09-23
    • Bai YangRonghai YuSatoshi OkochiDaisuke Okamoto
    • Bai YangRonghai YuSatoshi OkochiDaisuke Okamoto
    • H01F1/26
    • H01F1/26B22F1/02C22C2202/02H01F1/33H01F41/0246Y10T428/2998
    • The present invention discloses a composite soft magnetic powder core and a preparation method therefor, which belong to the technical fields of soft magnetic materials and preparation thereof. An Fe/Fe3O4 shell layer is generated in situ on surfaces of iron powder particles through a controlled oxidation process, to prepare Fe/Fe3O4 composite soft magnetic powder having a uniform structure. The Fe/Fe3O4 composite soft magnetic powder is mixed with suitable amount of silicone resin, and prepared into a high-performance Fe/Fe3O4 composite soft magnetic powder core by using a powder metallurgy compaction process. Such magnetic powder core has a high density, a high magnetic conductivity, a high magnetic flux density, a low loss, and a high breaking strength, and is useful in a large-power and low-loss application scenario. The present invention has the advantages of being rich in raw material resources, simple in process and environmentally friendly, and being suitable for industrial production.
    • 本发明公开了一种复合软磁粉芯及其制备方法,属于软磁材料及其制备技术领域。 通过控制氧化工艺在铁粉颗粒的表面上原位产生Fe / Fe 3 O 4壳层,制备具有均匀结构的Fe / Fe 3 O 4复合软磁粉末。 将Fe / Fe 3 O 4复合软磁粉与适量的硅树脂混合,通过粉末冶金压实法制备成高性能Fe / Fe3O4复合软磁粉末芯。 这种磁粉芯具有高密度,高导磁率,高磁通密度,低损耗和高断裂强度,并且在大功率和低损耗应用场景中是有用的。 本发明具有原料资源丰富,工艺简单,环保,适用于工业生产的优点。
    • 5. 发明申请
    • METHOD FOR PRODUCING FULLY AQUEOUS PHASE-SYNTHESIZED NANOCRYSTALS/CONDUCTING POLYMER HYRID SOLAR CELL
    • 生产完全水相合成纳米晶体/导电聚合物高分子太阳能电池的方法
    • US20130164881A1
    • 2013-06-27
    • US13813628
    • 2011-05-13
    • Bai YangWeili YuHao ZhangJunhu ZhangHaotong WeiZhanxi Fan
    • Bai YangWeili YuHao ZhangJunhu ZhangHaotong WeiZhanxi Fan
    • H01L51/42
    • H01L51/426H01L51/0003H01L51/0038H01L51/4213Y02E10/549
    • Provided is a method for producing a highly efficient organic/inorganic hybrid solar cell using fully aqueous phase-synthesized semiconductor nanocrystals and conducting polymer. The method mainly includes three steps: synthesizing nanocrystals in an aqueous phase, synthesizing a conjugated polymer precursor in an aqueous phase, and producing a device of solar cell. The nanocrystal material required for producing a solar cell by the method is widely available, diversified and size-controlled, and the used conjugated polymer has regulated molecular structure and molecular weight, which contributes to increase the absorption of sunlight. The processing of cell device can be performed at room temperature in air, and has advantages of no pollution, short processing period, and low cost. A method for producing an organic/inorganic hybrid solar cell is developed, which succeeds in introducing the high quality nanocrystals synthesized in an aqueous phase and is an eco-friendly and pollution-free technology for producing a solar cell.
    • 提供一种使用完全水相合成的半导体纳米晶体和导电聚合物制造高效的有机/无机混合太阳能电池的方法。 该方法主要包括在水相中合成纳米晶体,在水相中合成共轭聚合物前体,制备太阳能电池的装置。 通过该方法生产太阳能电池所需的纳米晶体材料广泛可用,多样化和尺寸控制,并且所使用的共轭聚合物具有调节的分子结构和分子量,这有助于增加阳光的吸收。 电池装置的处理可以在室温下在空气中进行,具有无污染,加工周期短,成本低的优点。 开发有机/无机混合太阳能电池的制造方法,其成功地引入了在水相中合成的高品质纳米晶体,并且是生产太阳能电池的环保无污染的技术。
    • 8. 发明申请
    • METHOD FOR APPLYING POWER TO TARGET MATERIAL, POWER SUPPLY FOR TARGET MATERIAL, AND SEMICONDUCTOR PROCESSING APPARATUS
    • 将电力应用于目标材料的方法,目标材料的电源和半导体处理装置
    • US20130256119A1
    • 2013-10-03
    • US13378936
    • 2010-12-17
    • Bai YangWei Xia
    • Bai YangWei Xia
    • C23C14/34
    • C23C14/3485C23C14/35H01J37/3408H01J37/3467
    • A method for applying power to target material in a magnetron sputtering process is provided. The method includes: 10) connecting a main power supply and a maintaining power supply to the target material (2) respectively; 20) applying a particular main power in the form of pulses to the target material (2) by the main power supply; applying a particular maintaining power which is smaller than the main power to the target material (2) by the maintaining power supply at least during the pulse interval time (t2) of the main power supply, so as to maintain a glow discharge procedure of the sputtering process during the purse interval time (t2) of the main power supply. The method for applying power to target material can obviously enhance the metal ionization rate while the process stability and controllability are guaranteed. A power supply for target material (8) which includes a main power module (81) and a maintaining power module (82), and a semiconductor processing apparatus using the method for applying power to target material or the power supply for target material are also provided.
    • 提供了一种在磁控溅射工艺中对靶材施加功率的方法。 该方法包括:10)分别将主电源和维持电源连接到目标材料(2); 20)通过主电源向目标材料(2)施加脉冲形式的特定主电源; 至少在主电源的脉冲间隔时间(t2)期间,通过保持电源向目标材料(2)施加小于主功率的特定维持功率,以保持主电源的辉光放电过程 在主电源的钱包间隔时间(t2)期间进行溅射处理。 对目标材料施加电力的方法可以显着提高金属电离率,同时保证工艺的稳定性和可控性。 包括主电源模块(81)和保持功率模块(82)的目标材料(8)的电源,以及使用将目标材料或目标材料的电源供电的方法的半导体处理装置也是 提供。