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    • 2. 发明授权
    • Apparatus and method for fabricating flat workpieces
    • 用于制造扁平工件的装置和方法
    • US06822734B1
    • 2004-11-23
    • US09807680
    • 2001-09-04
    • Doron EidelmanDavid FischAmir NoyAvi Gross
    • Doron EidelmanDavid FischAmir NoyAvi Gross
    • G01N2188
    • G01N21/8806G01N2021/9513G02F1/1309
    • Method and apparatus for manufacture and inspection of flat articles, such as flat planel display substrates, that are manufactured in a contamination-sensitive environment. In particular, a manufacturing step such as applying coatings to the article is performed in a self-contained micro-environment, typically characterized by an airborn particulate concentration which is substantially lower than its surroundings. Automated inspection apparatus is provided inside the self-contained micro-environment of the fabrication equipment to inspect the article after completion of the fabrication step and before transfer of the article to other fabrication equipment. The inspection apparatus includes an illumination subsystem illuminating the article with various configurations of dark field and bright field illumination, a staring array sensor capturing images of the article under various illumination configurations and a computer that analyzes the images to automatically detect defects.
    • 用于制造和检查在污染敏感环境中制造的扁平制品(例如扁平平面显示基板)的方法和装置。 特别地,诸如在制品上施加涂层的制造步骤在独立的微环境中进行,其通常特征在于气氛颗粒浓度远低于其周围环境。 在制造设备的独立的微环境内提供自动检查装置,以在制造步骤完成之后并且将物品转移到其他制造设备之前检查制品。 检查装置包括照明子系统,其具有暗场和明场照明的各种配置,在各种照明配置下拍摄物品的图像的凝视阵列传感器和分析图像以自动检测缺陷的计算机。