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    • 1. 发明授权
    • Vacuum vapor processing apparatus
    • 真空蒸气处理装置
    • US08375891B2
    • 2013-02-19
    • US12440635
    • 2007-09-10
    • Hiroshi NagataKyuzo NakamuraTakeo KatouAtsushi NakatsukaIchirou MukaeMasami ItouRyou YoshiizumiYoshinori Shingaki
    • Hiroshi NagataKyuzo NakamuraTakeo KatouAtsushi NakatsukaIchirou MukaeMasami ItouRyou YoshiizumiYoshinori Shingaki
    • C23C16/448C23C16/455C23C16/458C23C16/46C23F1/00H01L21/306C23C16/06C23C16/22
    • C23C14/24H01F41/0293
    • There is provided a vacuum evaporating apparatus which is suitable for performing a process in which a metal vapor atmosphere is formed in a processing chamber, the metal atoms in this metal vapor atmosphere are caused to be adhered to the surface of an object to be processed, and the metal atoms adhered to the surface of the object to be processed are diffused into grain boundary phases thereof. The apparatus comprises: a processing furnace (11); at least one processing box (4) disposed inside the processing furnace; and a heating means (2) provided inside the processing furnace so as to enclose the processing box. An evacuating means is provided which, after housing the processing box inside the processing furnace in a state in which the object to be processed (S) and the metal evaporating material (V) are disposed in the processing box, reduces the processing furnace and the processing box to a predetermined pressure and keep them at that pressure. The heating means is operated in the reduced pressure to evaporate the metal evaporating material while increasing the object to be processed to a predetermined temperature. The evaporated metal atoms are supplied to the surface of the object to be processed.
    • 提供了一种真空蒸发装置,其适于进行在处理室中形成金属蒸汽气氛的过程,使金属蒸气气氛中的金属原子粘附到待处理物体的表面, 并且附着在待处理物体表面的金属原子扩散到其晶界相。 该装置包括:加工炉(11); 设置在处理炉内的至少一个处理箱(4) 以及设置在处理炉内部以包围处理盒的加热装置(2)。 本发明提供一种排气装置,其特征在于,处理炉内处理箱内处理箱体(S)和金属蒸发材料(V)的状态被设置在处理箱内时,将加工炉和 处理箱到预定的压力并保持在该压力下。 加热装置在减压下操作以蒸发金属蒸发材料,同时将待处理物体增加到预定温度。 蒸发的金属原子被供应到待处理物体的表面。
    • 9. 发明授权
    • Vacuum deposition apparatus of the winding type
    • 卷绕式真空沉积设备
    • US07670433B2
    • 2010-03-02
    • US11630761
    • 2006-02-14
    • Nobuhiro HayashiShin YokoiIsao TadaAtsushi Nakatsuka
    • Nobuhiro HayashiShin YokoiIsao TadaAtsushi Nakatsuka
    • C23C16/00C23C14/00
    • C23C14/042C23C14/54C23C14/562
    • The problem solved by this Invention is to provide a vacuum evaporation deposition method of the winding type and a vacuum evaporation deposition apparatus of the winding type which can form a metal film on a base film made of single layer plastic film without thermal deformation and with superior productivity. To solve the above problem, there are provided an electron beam irradiator 21 for irradiating an electron beam onto a film material 12 arranged between an unwinding roller 13 and a deposition source 16; an auxiliary roller 18 for guiding the film 12 in contact with the deposited metal layer and arranged between a can roller 14 and a winding roller 15; a DC bias power source 22 for applying a DC voltage between the auxiliary roller 18 and the can roller 14; electricity removing unit 23 for removing electricity from the film 12 and arranged between the can roller 14 and the winding roller 15. The electricity removing unit 23 is a plasma generating source of the DC dipolar discharge type wherein one of its electrodes is earthed.
    • 本发明解决的问题是提供一种绕线式真空蒸发沉积方法和一种可在无热变形的单层塑料薄膜制成的基膜上形成金属薄膜的卷绕型真空蒸镀装置, 生产率。 为了解决上述问题,提供了一种用于将电子束照射到布置在退绕辊13和沉积源16之间的薄膜材料12上的电子束照射器21; 用于引导与沉积的金属层接触并且布置在罐辊14和卷绕辊15之间的膜12的辅助辊18; 用于在辅助辊18和罐辊14之间施加DC电压的DC偏压电源22; 电力去除单元23,用于从膜12移除电力并且布置在罐辊14和卷绕辊15之间。除电单元23是其中一个电极接地的直流偶极放电类型的等离子体发生源。
    • 10. 发明申请
    • Vacuum Deposition Apparatus of the Winding Type
    • 绕线式真空沉积设备
    • US20070259105A1
    • 2007-11-08
    • US11630761
    • 2006-02-14
    • Nobuhiro HayashiShin YokiIsao TadaAtsushi Nakatsuka
    • Nobuhiro HayashiShin YokiIsao TadaAtsushi Nakatsuka
    • C23C14/56
    • C23C14/042C23C14/54C23C14/562
    • The problem solved by this Invention is to provide a vacuum evaporation deposition method of the winding type and a vacuum evaporation deposition apparatus of the winding type which can form a metal film on a base film made of single layer plastic film without thermal deformation and with superior productivity. To solve the above problem, there are provided an electron beam irradiator 21 for irradiating an electron beam onto a film material 12 arranged between an unwinding roller 13 and a deposition source 16; an auxiliary roller 18 for guiding the film 12 in contact with the deposited metal layer and arranged between a can roller 14 and a winding roller 15; a DC bias power source 22 for applying a DC voltage between the auxiliary roller 18 and the can roller 14; electricity removing unit 23 for removing electricity from the film 12 and arranged between the can roller 14 and the winding roller 15. The electricity removing unit 23 is a plasma generating source of the DC dipolar discharge type wherein one of its electrodes is earthed.
    • 本发明解决的问题是提供一种绕线式真空蒸发沉积方法和一种可在无热变形的单层塑料薄膜制成的基膜上形成金属薄膜的卷绕型真空蒸镀装置, 生产率。 为了解决上述问题,提供了一种用于将电子束照射到布置在退绕辊13和沉积源16之间的薄膜材料12上的电子束照射器21; 用于引导与沉积的金属层接触并且布置在罐辊14和卷绕辊15之间的膜12的辅助辊18; 用于在辅助辊18和罐辊14之间施加DC电压的DC偏压电源22; 电除去单元23,用于从薄膜12移除电力并且布置在罐辊14和卷绕辊15之间。 除电单元23是其中一个电极接地的直流偶极放电类型的等离子体发生源。