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1. 发明授权

US09053390B2 Automated inspection scenario generation 有权
标题翻译：自动检测场景生成
公开(公告)号：US09053390B2
公开(公告)日：2015-06-09
申请号：US13585115
申请日：2012-08-14
申请人： Mohan Mahadevan , Govind Thattaisundaram , Ajay Gupta , Chien-Huei (Adam) Chen , Jason Kirkwood , Ashok Kulkarni , Songnian Rong , Ernesto Escorcia , Eugene Shifrin
发明人： Mohan Mahadevan , Govind Thattaisundaram , Ajay Gupta , Chien-Huei (Adam) Chen , Jason Kirkwood , Ashok Kulkarni , Songnian Rong , Ernesto Escorcia , Eugene Shifrin
IPC分类号： G06K9/00 , G06K9/62 , G06T7/00
CPC分类号： G06K9/6254 , G06T7/0004 , G06T2207/30148
摘要： Methods and systems for determining inspection scenarios without input from a user are presented. Inspection scenarios include at least one acquisition mode, defect detection parameter values, and classification parameter values. In one example, a number of defect events are determined by a hot inspection of a wafer surface. The defect events are classified and attributes associated with each defect event are identified. The defect events are labeled with this information. Based on the identified attributes and classification, inspection scenarios are determined. The inspection scenarios are solutions in a mathematical space formed by the identified attributes. In some examples, a plurality of inspection scenarios are determined and a desired inspection scenario is selected from the plurality based on the number of defects of interest and the number of nuisance events captured by the selected inspection scenario.
摘要翻译：提出了用于确定用户无需输入的检测情景的方法和系统。检查场景包括至少一个采集模式，缺陷检测参数值和分类参数值。在一个示例中，通过晶片表面的热检查来确定多个缺陷事件。对缺陷事件进行分类，并识别与每个缺陷事件相关的属性。缺陷事件用此信息标记。根据确定的属性和分类，确定检验情况。检查方案是由所识别的属性形成的数学空间中的解决方案。在一些示例中，确定多个检查情景，并且基于感兴趣的缺陷的数量和由所选择的检查情景捕获的滋扰事件的数量，从多个中选择期望的检查情景。

2. 发明授权

US08139843B2 Methods and systems for utilizing design data in combination with inspection data 有权
标题翻译：利用设计数据结合检验数据的方法和系统
公开(公告)号：US08139843B2
公开(公告)日：2012-03-20
申请号：US13115957
申请日：2011-05-25
申请人： Ashok Kulkarni , Brian Duffy , Kais Maayah , Gordon Rouse
发明人： Ashok Kulkarni , Brian Duffy , Kais Maayah , Gordon Rouse
IPC分类号： G06K9/00
CPC分类号： G06F17/5045 , H01L21/67005
摘要： Various methods and systems for utilizing design data in combination with inspection data are provided. One computer-implemented method for binning defects detected on a wafer includes comparing portions of design data proximate positions of the defects in design data space. The method also includes determining if the design data in the portions is at least similar based on results of the comparing step. In addition, the method includes binning the defects in groups such that the portions of the design data proximate the positions of the defects in each of the groups are at least similar. The method further includes storing results of the binning step in a storage medium.
摘要翻译：提供了与检测数据结合使用设计数据的各种方法和系统。用于对在晶片上检测到的缺陷进行合并的计算机实现的方法包括将设计数据的部分靠近设计数据空间中的缺陷的位置进行比较。该方法还包括基于比较步骤的结果确定部分中的设计数据是否至少相似。此外，该方法包括将组中的缺陷合并成使得设计数据中靠近每个组中的缺陷的位置的部分至少相似。该方法还包括将合并步骤的结果存储在存储介质中。

3. 发明申请

US20110286656A1 METHODS AND SYSTEMS FOR UTILIZING DESIGN DATA IN COMBINATION WITH INSPECTION DATA 有权
标题翻译：与检验数据组合使用设计数据的方法和系统
公开(公告)号：US20110286656A1
公开(公告)日：2011-11-24
申请号：US13115957
申请日：2011-05-25
申请人： Ashok Kulkarni , Brian Duffy , Kais Maayah , Gordon Rouse
发明人： Ashok Kulkarni , Brian Duffy , Kais Maayah , Gordon Rouse
IPC分类号： G06K9/00
CPC分类号： G06F17/5045 , H01L21/67005
摘要： Various methods and systems for utilizing design data in combination with inspection data are provided. One computer-implemented method for binning defects detected on a wafer includes comparing portions of design data proximate positions of the defects in design data space. The method also includes determining if the design data in the portions is at least similar based on results of the comparing step. In addition, the method includes binning the defects in groups such that the portions of the design data proximate the positions of the defects in each of the groups are at least to similar. The method further includes storing results of the binning step in a storage medium.
摘要翻译：提供了与检测数据结合使用设计数据的各种方法和系统。用于对在晶片上检测到的缺陷进行合并的计算机实现的方法包括将设计数据的部分靠近设计数据空间中的缺陷的位置进行比较。该方法还包括基于比较步骤的结果确定部分中的设计数据是否至少相似。此外，该方法包括将组中的缺陷合并，使得接近每个组中的缺陷的位置的设计数据的部分至少相似。该方法还包括将合并步骤的结果存储在存储介质中。

4. 发明申请

US20110109105A1 ENERGY ABSORBER WITH LOBES PROVIDING UNIFORM PEDESTRIAN IMPACT 有权
标题翻译：能量吸收器具有提供均匀PEDESTRIAN影响的叶片
公开(公告)号：US20110109105A1
公开(公告)日：2011-05-12
申请号：US12940680
申请日：2010-11-05
申请人： Daniel Ralston , Vidya Revankar , Amit Ashok Kulkarni , Darin Evans , Olaf Insel , Yassine Ghozzi , Alexander Besch , Oliver Knoke , Ngoc-Dang Nguyen
发明人： Daniel Ralston , Vidya Revankar , Amit Ashok Kulkarni , Darin Evans , Olaf Insel , Yassine Ghozzi , Alexander Besch , Oliver Knoke , Ngoc-Dang Nguyen
IPC分类号： B60R19/34
CPC分类号： B60R19/18 , B60R2019/1873 , B60R2019/1893 , B60R2021/343
摘要： A bumper system includes an injection molded energy absorber of polymeric material having hollow longitudinally-spaced lobes configured to crush and absorb energy during a pedestrian impact, and straps interconnecting adjacent lobes. The lobes are particularly sized and dimensioned, including potentially external ribs and/or apertures in corners, to provide a relatively uniform impact energy absorption during an impact stroke during crush of the shear walls of the lobes, such as within +/−30% or more preferably within +/−20% of a desired amount regardless of a specific location of impact, along a selected center portion of the energy absorber. A reason for the uniformity is to promote pedestrian safety regardless of the specific location where a pedestrian's leg strikes the energy absorber.
摘要翻译：保险杠系统包括聚合材料的注射成型能量吸收器，其具有中空的纵向间隔的凸角，其构造成在行人冲击期间压碎和吸收能量，以及互连相邻凸角的带。凸角的尺寸和尺寸特别大，包括角部中的潜在的外部肋和/或孔，以在冲击冲击冲击期间在冲击冲程期间提供相对均匀的冲击能量吸收，例如+/- 30％更优选在所需量的+/- 20％内，而不管冲击的特定位置如何，沿能量吸收体的选定中心部分。一致的原因是为了促进行人安全，而不管行人的脚撞击能量吸收器的具体位置。

5. 发明申请

US20060116522A1 Process for the preparation of 5-substituted-1-(4-fluorophenyl)-1,3-dihydroisobenzofurans 审中-公开
标题翻译：制备5-取代-1-（4-氟苯基）-1,3-二氢异苯并呋喃的方法
公开(公告)号：US20060116522A1
公开(公告)日：2006-06-01
申请号：US10526302
申请日：2003-08-28
申请人： Ambati Narahari Babu , Vaddamari Goud , Santhosh Gaonkar , Sulur Manjunatha , Ashok Kulkarni
发明人： Ambati Narahari Babu , Vaddamari Goud , Santhosh Gaonkar , Sulur Manjunatha , Ashok Kulkarni
IPC分类号： C07D307/87
CPC分类号： C07D307/87
摘要： The present invention provides a process for the preparation of a 5-substituted-1-(4-fluorophenyl)-1,3-dihydro-isoben-zofuran of Formula (2), an intermediate for the manufacture of citalopram, which process comprises: (a) carrying out a Grignard reaction on a corresponding 5-substituted phthalide of Formula (3) in a co-solvent system, comprising adding (i) prepared 4-fluorophenyl magnesium halide in an ether solvent to (ii) the 5-substituted phthalide in a suitable organic co-solvent to the ether solvent, to form a corresponding 4-substituted-2-hydroxymethyl-4′-fluorobenzophenone of Formula (4); (b) carrying out a ketone reduction of the 4-substituted-2-hydroxymethyl-4′-fluorobenzophenone of Formula (4) following the Grignard reaction, to form a corresponding 4-substituted-2-hydroxymethylphenyl-1-(4-fluorophenyl) methanol of Formula (5); and (c) carrying out a cyclisation reaction on the 4-substituted-2 hydroxymethylphenyl-1-(4-fluorophenyl) methanol of Formula (5) following the reduction reaction, to form said intermediate of Formula (2); wherein R represents Br or CN.
摘要翻译：本发明提供了制备式（2）的5-取代-1-（4-氟苯基）-1,3-二氢 - 异辛氧氟尿苷的方法，该方法是制备西酞普兰的中间体，该方法包括：（a）在共溶剂系统中在相应的式（3）的5-取代的苯并菲酮上进行格氏反应，其包括将（i）制备的4-氟苯基卤化镁在醚溶剂中加入（ii）5-取代的在合适的有机共溶剂中与醚溶剂反应，形成相应的式（4）的4-取代-2-羟甲基-4'-氟二苯甲酮; （b）在格利雅反应之后进行式（4）的4-取代-2-羟甲基-4'-氟二苯酮的酮还原反应，形成相应的4-取代-2-羟甲基苯基-1-（4-氟苯基）甲醇; 和（c）在还原反应后对式（5）的4-取代-2-羟甲基苯基-1-（4-氟苯基）甲醇进行环化反应，形成式（2）的所述中间体; 其中R表示Br或CN。

6. 发明授权

US09360863B2 Data perturbation for wafer inspection or metrology setup using a model of a difference 有权
标题翻译：使用差异模型进行晶圆检测或计量设置的数据扰动
公开(公告)号：US09360863B2
公开(公告)日：2016-06-07
申请号：US13258441
申请日：2011-06-09
申请人： Govind Thattaisundaram , Mohan Mahadevan , Ajay Gupta , Chien-Huei Adam Chen , Ashok Kulkarni , Jason Kirkwood , Kenong Wu , Songnian Rong
发明人： Govind Thattaisundaram , Mohan Mahadevan , Ajay Gupta , Chien-Huei Adam Chen , Ashok Kulkarni , Jason Kirkwood , Kenong Wu , Songnian Rong
IPC分类号： G06F17/50 , G05B19/418
CPC分类号： G05B19/41875 , G05B2219/32182 , G05B2219/45031 , Y02P90/22
摘要： Various embodiments for determining parameters for wafer inspection and/or metrology are provided.
摘要翻译：提供了用于确定晶片检查和/或度量的参数的各种实施例。

7. 发明申请

US20120061978A9 ENERGY ABSORBER WITH LOBES PROVIDING UNIFORM PEDESTRIAN IMPACT 有权
标题翻译：能量吸收器具有提供均匀PEDESTRIAN影响的叶片
公开(公告)号：US20120061978A9
公开(公告)日：2012-03-15
申请号：US12940680
申请日：2010-11-05
申请人： Daniel Ralston , Vidya Revankar , Amit Ashok Kulkarni , Darin Evans , Olaf Insel , Yassine Ghozzi , Alexander Besch , Oliver Knoke , Ngoc-Dang Nguyen
发明人： Daniel Ralston , Vidya Revankar , Amit Ashok Kulkarni , Darin Evans , Olaf Insel , Yassine Ghozzi , Alexander Besch , Oliver Knoke , Ngoc-Dang Nguyen
IPC分类号： B60R19/34
CPC分类号： B60R19/18 , B60R2019/1873 , B60R2019/1893 , B60R2021/343
摘要： A bumper system includes an injection molded energy absorber of polymeric material having hollow longitudinally-spaced lobes configured to crush and absorb energy during a pedestrian impact, and straps interconnecting adjacent lobes. The lobes are particularly sized and dimensioned, including potentially external ribs and/or apertures in corners, to provide a relatively uniform impact energy absorption during an impact stroke during crush of the shear walls of the lobes, such as within +/−30% or more preferably within +/−20% of a desired amount regardless of a specific location of impact, along a selected center portion of the energy absorber. A reason for the uniformity is to promote pedestrian safety regardless of the specific location where a pedestrian's leg strikes the energy absorber.
摘要翻译：保险杠系统包括聚合材料的注射成型能量吸收器，其具有中空的纵向间隔的凸角，其构造成在行人冲击期间压碎和吸收能量，以及互连相邻凸角的带。凸角的尺寸和尺寸特别大，包括角部中的潜在的外部肋和/或孔，以在冲击冲击冲击期间在冲击冲程期间提供相对均匀的冲击能量吸收，例如+/- 30％更优选在所需量的+/- 20％内，而不管冲击的特定位置如何，沿能量吸收体的选定中心部分。一致的原因是为了促进行人安全，而不管行人的脚撞击能量吸收器的具体位置。

8. 发明授权

US07756658B2 Systems and methods for detecting defects on a wafer and generating inspection results for the wafer 有权
标题翻译：用于检测晶片上的缺陷并产生晶片检查结果的系统和方法
公开(公告)号：US07756658B2
公开(公告)日：2010-07-13
申请号：US12120574
申请日：2008-05-14
申请人： Ashok Kulkarni , Santosh Bhattacharyya
发明人： Ashok Kulkarni , Santosh Bhattacharyya
IPC分类号： G01N37/00
CPC分类号： G05B19/41875 , G05B2219/37224 , G05B2219/45031 , H01L22/12 , H01L22/20 , H01L2924/0002 , Y02P90/22 , H01L2924/00
摘要： Systems and methods for detecting defects on a wafer and generating inspection results for the wafer are provided. One method includes detecting defects on a wafer by comparing output generated by scanning of the wafer performed by an inspection system to one or more defect detection thresholds. The method also includes sampling outliers in the output by selecting the output having the highest values from bins defined based on one or more predetermined criteria. In addition, the method includes selecting a portion of the sampled outliers based on wafer-level analysis of the sampled outliers. The method further includes generating inspection results for the wafer by combining information about the selected portion of the sampled outliers with information about the defects detected using the one or more defect detection thresholds.
摘要翻译：提供了用于检测晶片上的缺陷并产生晶片的检查结果的系统和方法。一种方法包括通过将由检查系统执行的晶片的扫描产生的输出与一个或多个缺陷检测阈值进行比较来检测晶片上的缺陷。该方法还包括通过从基于一个或多个预定标准定义的箱中选择具有最高值的输出来对输出中的异常值进行采样。此外，该方法包括基于采样异常值的晶片级分析来选择一部分采样异常值。该方法还包括通过将关于所选择的采样异常值的部分的信息与关于使用一个或多个缺陷检测阈值检测到的缺陷的信息组合来产生晶片的检查结果。

9. 发明申请

US20100119144A1 METHODS AND SYSTEMS FOR UTILIZING DESIGN DATA IN COMBINATION WITH INSPECTION DATA 审中-公开
标题翻译：与检验数据组合使用设计数据的方法和系统
公开(公告)号：US20100119144A1
公开(公告)日：2010-05-13
申请号：US12692018
申请日：2010-01-22
申请人： Ashok Kulkarni , Brian Duffy , Kais Maayah , Gordon Rouse
发明人： Ashok Kulkarni , Brian Duffy , Kais Maayah , Gordon Rouse
IPC分类号： G06K9/00
CPC分类号： G06F17/5045 , H01L21/67005
摘要： Various methods and systems for utilizing design data in combination with inspection data are provided. One computer-implemented method for binning defects detected on a wafer includes comparing portions of design data proximate positions of the defects in design data space. The method also includes determining if the design data in the portions is at least similar based on results of the comparing step. In addition, the method includes binning the defects in groups such that the portions of the design data proximate the positions of the defects in each of the groups are at least similar. The method further includes storing results of the binning step in a storage medium.
摘要翻译：提供了与检测数据结合使用设计数据的各种方法和系统。用于对在晶片上检测到的缺陷进行合并的计算机实现的方法包括将设计数据的部分靠近设计数据空间中的缺陷的位置进行比较。该方法还包括基于比较步骤的结果确定部分中的设计数据是否至少相似。此外，该方法包括将组中的缺陷合并成使得设计数据中靠近每个组中的缺陷的位置的部分至少相似。该方法还包括将合并步骤的结果存储在存储介质中。

10. 发明申请

US20080250384A1 SYSTEMS AND METHODS FOR CREATING INSPECTION RECIPES 有权
标题翻译：用于创建检验录像的系统和方法
公开(公告)号：US20080250384A1
公开(公告)日：2008-10-09
申请号：US11960157
申请日：2007-12-19
申请人： Brian Duffy , Ashok Kulkarni
发明人： Brian Duffy , Ashok Kulkarni
IPC分类号： G06F17/50
CPC分类号： G03F7/7065 , G03F7/70525
摘要： Systems and methods for creating inspection recipes are provided. One computer-implemented method for creating an inspection recipe includes acquiring a first design and one or more characteristics of output of an inspection system for a wafer on which the first design is printed using a manufacturing process. The method also includes creating an inspection recipe for a second design using the first design and the one or more characteristics of the output acquired for the wafer on which the first design is printed. The first and second designs are different. The inspection recipe will be used for inspecting wafers after the second design is printed on the wafers using the manufacturing process.
摘要翻译：提供了用于创建检查配方的系统和方法。用于创建检查配方的一种计算机实现的方法包括采用制造过程获取第一设计和用于印刷第一设计的晶片的检查系统的输出的一个或多个特性。该方法还包括使用第一设计和为其上印刷有第一设计的晶片获取的输出的一个或多个特性来创建用于第二设计的检查配方。第一和第二种设计是不同的。在使用制造工艺将第二设计印刷在晶片上之后，检查配方将用于检查晶片。

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