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    • 1. 发明授权
    • Photolithographic structured thick layer sensor
    • 光刻结构厚层传感器
    • US09068913B2
    • 2015-06-30
    • US13319767
    • 2010-05-06
    • Karlheinz WienandTim AsmusAngela MaierKarlheinz Ullrich
    • Karlheinz WienandTim AsmusAngela MaierKarlheinz Ullrich
    • G01N15/00G01N15/06
    • G01N15/0656Y10T29/49002
    • A sensor, particularly an impedance sensor, for example a soot sensor, is provided which has two mutually electrically insulated electrodes, wherein at least one external electrode is formed from a composite of metal and inorganic oxide as a film pattern having a film thickness of 0.5 to 20 μm. The trace width of the film pattern and the spacing between the traces is 5 to 70 μm and the border region around the conductor trace edge varies less than 10 μm. Both electrodes can be arranged adjacent to each other as a film pattern in a plane. Preferably, the sensor has a heater. For mass production, electrodes are produced as a film pattern having a film thickness of 0.5 to 20 μm on electrically insulating oxide bases and, following full-surface imprinting of a metal powder and oxide-containing paste, the electrodes are structured particularly accurately as traces from the printed film. In particular, the film thickness of the printed film is reduced.
    • 提供了一种传感器,特别是阻抗传感器,例如烟灰传感器,其具有两个相互电绝缘的电极,其中至少一个外部电极由金属和无机氧化物的复合物形成,膜厚度为0.5 至20μm。 膜图案的迹线宽度和迹线之间的间距为5〜70μm,导体迹线边缘周围的边界区域变化小于10μm。 两个电极可以彼此相邻地布置为平面中的膜图案。 优选地,传感器具有加热器。 为了大规模生产,电极在电绝缘氧化物基底上作为膜厚度为0.5至20μm的膜图案生产,并且在金属粉末和含氧化物浆料的全表面压印之后,电极被特别精确地构造为痕迹 从印刷电影。 特别地,印刷膜的膜厚减小。
    • 2. 发明申请
    • PHOTOLITHOGRAPHIC STRUCTURED THICK LAYER SENSOR
    • 光刻结构厚层传感器
    • US20120062254A1
    • 2012-03-15
    • US13319767
    • 2010-05-06
    • Karlheinz WienandTim AsmusAngela MaierKarlheinz Ullrich
    • Karlheinz WienandTim AsmusAngela MaierKarlheinz Ullrich
    • G01R27/00H01F41/00G01M15/10
    • G01N15/0656Y10T29/49002
    • A sensor, particularly an impedance sensor, for example a soot sensor, is provided which has two mutually electrically insulated electrodes, wherein at least one external electrode is formed from a composite of metal and inorganic oxide as a film pattern having a film thickness of 0.5 to 20 μm. The trace width of the film pattern and the spacing between the traces is 5 to 70 μm and the border region around the conductor trace edge varies less than 10 μm. Both electrodes can be arranged adjacent to each other as a film pattern in a plane. Preferably, the sensor has a heater. For mass production, electrodes are produced as a film pattern having a film thickness of 0.5 to 20 μm on electrically insulating oxide bases and, following full-surface imprinting of a metal powder and oxide-containing paste, the electrodes are structured particularly accurately as traces from the printed film. In particular, the film thickness of the printed film is reduced.
    • 提供了一种传感器,特别是阻抗传感器,例如烟灰传感器,其具有两个相互电绝缘的电极,其中至少一个外部电极由金属和无机氧化物的复合物形成,膜厚度为0.5 至20μm。 膜图案的迹线宽度和迹线之间的间距为5〜70μm,导体迹线边缘周围的边界区域变化小于10μm。 两个电极可以彼此相邻地布置为平面中的膜图案。 优选地,传感器具有加热器。 为了大规模生产,电极在电绝缘氧化物基底上作为膜厚度为0.5至20μm的膜图案生产,并且在金属粉末和含氧化物浆料的全表面压印之后,电极被特别精确地构造为痕迹 从印刷电影。 特别地,印刷膜的膜厚减小。