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    • 1. 发明授权
    • 1200° C. film resistor
    • 1200°C薄膜电阻
    • US08183974B2
    • 2012-05-22
    • US12237742
    • 2008-09-25
    • Karlheinz WienandThomas LooseMargit Sander
    • Karlheinz WienandThomas LooseMargit Sander
    • H01C7/02
    • G01K7/183G01K1/10H01C17/02H01C17/06526
    • For production of a high-temperature sensor, in which a platinum resistance film is applied on a metal-oxide substrate, in particular sapphire or a ceramic plate, and a ceramic intermediate layer is laid on the resistance film, a self-supporting cover, in particular a ceramic or glass-ceramic cover, is bonded on the ceramic intermediate layer or a glass ceramic is mounted on the intermediate layer over its entire surface. Advantageously, the glass ceramic is electrically conductive or an ion conductor above 750° C. and is laid on up to the cathode of the resistance film up to beyond the intermediate layer. In particular, the cover is bonded with a metal-doped glass ceramic, which is laid on the cathode of the resistance film up to beyond the intermediate layer. Preferably, the electrically insulating intermediate layer is coated with a glass ceramic or a glass ceramic doped with metal, which coating has a resistance of at most one megaohm per square at 850° C. or above.
    • 为了制造其中在金属氧化物基板上特别是蓝宝石或陶瓷板上施加铂电阻膜的高温传感器,并且在电阻膜上铺设陶瓷中间层,自支撑盖, 特别是陶瓷或玻璃陶瓷覆盖层结合在陶瓷中间层上,或玻璃陶瓷安装在其整个表面上的中间层上。 有利地,玻璃陶瓷是导电的或离子导体高于750℃,并且被放置在直到电阻膜的阴极直到超过中间层。 特别地,覆盖物与掺入金属的玻璃陶瓷结合,该玻璃陶瓷铺设在电阻膜的阴极上,直到超过中间层。 优选地,电绝缘中间层涂覆有掺杂有金属的玻璃陶瓷或玻璃陶瓷,该涂层在850℃或更高温度下具有至多1兆欧每平方厘米的电阻。
    • 4. 发明授权
    • Electrical resistance with at least two contact fields on a ceramic
substrate and process for manufacturing the same
    • 在陶瓷基板上具有至少两个接触场的电阻及其制造方法
    • US6159386A
    • 2000-12-12
    • US329561
    • 1999-06-10
    • Karlheinz WienandKarlheinz UllrichMargit SanderStefan Dietmann
    • Karlheinz WienandKarlheinz UllrichMargit SanderStefan Dietmann
    • G01K7/18H01C1/014H01C7/02H01C7/22H01C13/00H01C17/00H01C17/06
    • G01K7/183H01C17/06H01C7/008H01C7/06H01C7/22H05K1/167H05K2201/0394H05K3/0029
    • A temperature-dependent measuring resistance with rapid response time is at least partially arranged on an electrically insulating surface of a ceramic substrate, wherein a portion of the conductor path spans a recess situated in the substrate in a bridge-like manner, and the remaining portion of the conductor path in the edge area of the substrate adjacent to the recess is provided with connection contact fields. The conductor path comprises a platinum or gold layer, wherein the conductor path is partially provided with a cover layer of glass, and wherein the connection contact fields are exposed. In a further embodiment, the conductor path is arranged together with the connection contact fields either on a screen-printed glass membrane or on a thin film membrane applied in a PVD process, which covers the surface of the ceramic substrate and spans the recess. The cover layer is likewise selectively applied by screen printing in case there is a glass membrane. In the case of a thin film membrane, the cover layer is also applied selectively by a PVD process and can be the same material as the thin film membrane. The ceramic substrate preferably comprises aluminum oxide.
    • 具有快速响应时间的温度依赖测量电阻至少部分地布置在陶瓷衬底的电绝缘表面上,其中导体路径的一部分以桥状方式跨越位于衬底中的凹部,其余部分 在与凹部相邻的基板的边缘区域中的导体路径设置有连接接触区域。 导体路径包括铂或金层,其中导体路径部分地设置有玻璃覆盖层,并且其中暴露连接接触区域。 在另一个实施例中,导体路径与丝网印刷玻璃膜上的连接接触区域或涂覆在PVD工艺中的薄膜上一起布置,该薄膜膜覆盖陶瓷基板的表面并跨越凹部。 在有玻璃膜的情况下,也可以通过丝网印刷选择性地施加覆盖层。 在薄膜膜的情况下,覆盖层也通过PVD工艺选择性地施加,并且可以是与薄膜膜相同的材料。 陶瓷基板优选包含氧化铝。
    • 6. 发明授权
    • Flow sensors having a flow duct in the cover, and sensor tip as intermediate product
    • 流量传感器在盖中具有流动通道,传感器尖端作为中间产品
    • US08943913B2
    • 2015-02-03
    • US13356967
    • 2012-01-24
    • Matthias MuziolKarlheinz Wienand
    • Matthias MuziolKarlheinz Wienand
    • G01D11/24G01F1/69G01F1/684G01F1/692
    • G01F1/684G01F1/692Y10T29/49124
    • For mass production of anemometers for EGR systems with hot exhaust gas streams having temperatures up to 200° C. or 300° C., conductors and film resistors are placed onto a bed, and are covered on this bed, e.g. A sensor tip of the flow sensor of the anemometer is made of inorganic materials up to the housing cover. A cable is led into a housing and self-supporting electrical conductors are led through the housing cover. In the housing, leads of the cable are connected to the self-supporting electrical conductors. Using bed profiles passing through the cover, the film resistors are spaced from the housing sufficiently far that the film resistors and the housing are largely thermally decoupled. As an intermediate product, a measurement tip or a sensor bar as part of a sensor tip is made of purely inorganic components, in order to make the mass production efficient.
    • 对于具有温度高达200℃或300℃的热废气流的EGR系统的大规模生产,将导体和薄膜电阻器放置在床上,并且覆盖在该床上,例如, 风速计的流量传感器的传感器尖端由无机材料制成,直到外壳盖。 电缆被引入壳体,并且自支撑电导体被引导通过壳体盖。 在外壳中,电缆的引线连接到自支撑电导体。 使用通过盖子的床型材,薄膜电阻器与外壳隔开足够远,膜电阻器和壳体在很大程度上被热分离。 作为中间产品,作为传感器尖端的一部分的测量尖端或传感器棒由纯无机组分制成,以使批量生产效率高。
    • 9. 发明授权
    • High temperature-stable sensor
    • 高温稳定传感器
    • US07893510B2
    • 2011-02-22
    • US11179109
    • 2005-07-12
    • Karlheinz WienandKarlheinz Ullrich
    • Karlheinz WienandKarlheinz Ullrich
    • H01L21/76
    • G01N27/4075
    • A high temperature-stable sensor is provided in which electrodes on a substrate or an insulation layer are in contact with a sensitive layer, wherein the electrodes have platinum, rhodium, or iridium or an electrically conductive oxide layer. For this purpose, an intermediate product is provided as a platform chip, which has a deposited layer made of platinum, rhodium, or iridium or an alloy of platinum, rhodium, or iridium and is covered by an electrically conductive oxide. From the deposited layer, a conductive structure is formed and thus a platform chip is created with an electrically conductive structure subject to external influences. This structure has an electrically conductive oxide and/or its parts have long-term, stable characteristic resistance curves under high-temperature loading above about 500° C., especially between about 600° C. and 950° C. A sensor with a gas-sensitive layer formed as a gas-sensitive sensor is preferred.
    • 提供了一种高温度稳定的传感器,其中基板或绝缘层上的电极与敏感层接触,其中电极具有铂,铑或铱或导电氧化物层。 为此,提供了作为平台芯片的中间产品,其具有由铂,铑或铱制成的沉积层或铂,铑或铱的合金,并被导电氧化物覆盖。 从沉积层形成导电结构,因此产生具有外部影响的导电结构的平台芯片。 该结构具有导电氧化物和/或其部件在高于500℃,特别是约600℃至950℃的高温负载下具有长期稳定的特性电阻曲线。具有气体的传感器 作为气敏传感器形成的敏感层是优选的。
    • 10. 发明申请
    • Film Resistor in Exhaust-gas Pipe
    • 排气管中的膜电阻
    • US20090282909A1
    • 2009-11-19
    • US12307024
    • 2007-06-29
    • Karlheinz WienandKarlheinz UllrichMatthias Muziol
    • Karlheinz WienandKarlheinz UllrichMatthias Muziol
    • G01F1/692H01C17/00
    • G01F1/684G01F1/6845G01F1/692G01F1/6983G01P5/12Y10T29/49082
    • A measurement device, in particular anemometric measurement device of a flow sensor, contains film resistors in one or more opening(s) of a cover or a hollow body. The film resistors are fastened according to the invention in the opening(s). Two film resistors differ with respect to their resistance by one to three orders of magnitude.In an anemometric measurement device of a flow sensor according to the invention, a temperature sensor and a heating capacity sensor are placed in a carrier element. The temperature sensor has a temperature-measuring resistor and a heat conductor as platinum thin-film or thick-film resistors on a ceramic substrate.For self-cleaning of an anemometric measurement device of a flow sensor, in which a temperature-measuring element and a heating element are placed in a carrier element, the temperature-measuring element has a platinum thin-film resistor on a ceramic substrate for temperature measurement and is heated with an additional platinum thin-film resistor.For production of an anemometric measurement device of a flow sensor made of film resistors and a cover or a hollow body, two film resistors differing by one to two orders of magnitude are placed in openings of the cover or hollow body and are fastened in the openings.
    • 测量装置,特别是流量传感器的气流测量装置,在盖或中空体的一个或多个开口中包含薄膜电阻。 薄膜电阻器根据本发明被固定在开口中。 两个薄膜电阻器的电阻相差一到三个数量级。 在根据本发明的流量传感器的风速测量装置中,将温度传感器和加热能力传感器放置在载体元件中。 温度传感器在陶瓷基板上具有温度测量电阻器和作为铂薄膜或厚膜电阻器的导热体。 为了自动清洁温度测量元件和加热元件放置在载体元件中的流量传感器的电流测量装置,该温度测量元件在陶瓷基板上具有用于温度的铂薄膜电阻器 并用附加的铂薄膜电阻加热。 为了制造由薄膜电阻器和盖子或中空体制成的流量传感器的电流测量装置,将两个不同于一个数量级的薄膜电阻器放置在盖子或中空体的开口中并且紧固在开口 。