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    • 2. 发明授权
    • Method for analysis of three organic additives in an acid copper plating bath
    • 在酸性镀铜浴中分析三种有机添加剂的方法
    • US06572753B2
    • 2003-06-03
    • US09968202
    • 2001-10-01
    • Gene ChalytPeter BratinMichael PavlovAlex KoganMichael James Perpich
    • Gene ChalytPeter BratinMichael PavlovAlex KoganMichael James Perpich
    • G01N2726
    • C25D21/12C25D3/38
    • Acid copper electroplating baths used to form ultra-fine circuitry features on semiconductor chips contain suppressor, anti-suppressor and leveler additives that must be closely controlled in order to obtain acceptable copper deposits. Cyclic voltammetric stripping (CVS) methods are available to measure the concentrations of the suppressor and anti-suppressor based on the effects of these additives on the copper electrodeposition rate. The present invention is a method that also uses measurements of the copper electrodeposition rate to determine the concentration of the leveler additive. The other two additives are included in the measurement solution at concentrations determined to provide the optimum compromise between minimal interference, high sensitivity and good reproducibility for the leveler analysis. In this case, measurement precision is greatly improved compared to that provided by inclusion of the interfering additives in the measurement solution at their concentrations in the bath sample at the time of the analysis, which would be the standard analytical procedure.
    • 用于在半导体芯片上形成超细电路特征的酸性铜电镀浴包含必须严密控制的抑制剂,抗抑制剂和矫味剂添加剂,以获得可接受的铜沉积物。 基于这些添加剂对铜电沉积速率的影响,循环伏安法(CVS)方法可用于测量抑制剂和抗抑制剂的浓度。 本发明是还使用铜电沉积速率的测量来确定矫光添加剂的浓度的方法。 其他两种添加剂被包括在测量溶液中,其浓度被确定为在矫正剂分析的最小干扰,高灵敏度和良好的再现性之间提供最佳折中。 在这种情况下,与在分析时在浴样品中浓度测定溶液中包含干扰添加剂所提供的测量精度相比,测量精度大大提高,这将是标准分析程序。
    • 3. 发明授权
    • Financial reporting and auditing agent with net knowledge for extensible business reporting language
    • 具有可扩展业务报告语言知识的财务报告和审计代理
    • US07856388B1
    • 2010-12-21
    • US10914619
    • 2004-08-09
    • Rajendra P. SrivastavaMiklos VasarhelyiAlex Kogan
    • Rajendra P. SrivastavaMiklos VasarhelyiAlex Kogan
    • G06Q40/00
    • G06F17/30569G06Q40/00G06Q40/02G06Q40/06
    • A system and method utilizes intelligent agents for searching, analyzing, and reporting business, financial, or non-financial information available through communication networks, particularly the Internet, regardless of inconsistencies in formats and granularity of that information. This information may then be used by users for financial and non-financial information for business decisions, developing risk profiles and credit worthiness. The intelligent agent may search Internet resources for business information of companies upon a user's request. The intelligent agent parses the retrieved information consisted with series of texts and identifies tables containing various financial statements. Each extracted table may be parsed into line items and every line item may be identified by matching to the appropriate XBRL taxonomy. Finally, the intelligent agent tags the information using XBRL taxonomy and generates financial statements in XBRL. The intelligent agent may be utilized to search through the internet for financial and non-financial information for business decisions, developing risk profiles and credit worthiness.
    • 一种系统和方法利用智能代理来搜索,分析和报告通过通信网络,特别是因特网可用的业务,财务或非财务信息,而不管信息的格式和粒度不一致。 然后,用户可以将这些信息用于财务和非财务信息的业务决策,开发风险简介和信用价值。 智能代理可以根据用户的要求搜索公司的商业信息。 智能代理解析检索到的信息,包括一系列文本,并识别包含各种财务报表的表。 每个提取的表可以被解析成行项目,并且可以通过匹配适当的XBRL分类来识别每个行项目。 最后,智能代理使用XBRL分类标记信息,并在XBRL中生成财务报表。 智能代理可用于通过互联网搜索财务和非财务信息以进行业务决策,开发风险简介和信用价值。
    • 9. 发明授权
    • Detection of suppressor breakdown contaminants in a plating bath
    • 检测镀浴中的抑制分解污染物
    • US06749739B2
    • 2004-06-15
    • US10266006
    • 2002-10-07
    • Gene ChalytPeter BratinMichael PavlovAlex KoganMichael James Perpich
    • Gene ChalytPeter BratinMichael PavlovAlex KoganMichael James Perpich
    • G01N2726
    • G01N27/42C25D21/12
    • Relative concentrations of active suppressor additive species and suppressor breakdown contaminants in an acid copper electroplating bath are determined by cyclic voltammetric stripping (CVS) dilution titration analysis using two negative electrode potential limits. The analysis results for the more negative potential limit provide a measure of the suppressor additive concentration alone since the suppressor breakdowvn contaminants are not effective at suppressing the copper deposition rate at the more negative potentials. The analysis results for the less negative potential limit provide a measure of the combined concentrations of the suppressor additive and the suppressor breakdown contaminants. Comparison of the results for the two analyses yields a measure of the concentration of the suppressor breakdown contaminants relative to the suppressor additive concentration.
    • 通过使用两个负极电位极限的循环伏安法汽提(CVS)稀释滴定法测定酸性铜电镀浴中的活性抑制剂添加物种类和抑制分解污染物的相对浓度。 由于抑制剂破坏污染物在抑制更多负电位下的铜沉积速率方面无效,所以对负电位极限的分析结果提供了单独的抑制添加剂浓度的量度。 阴极电位极限的分析结果提供了抑制剂添加剂和抑制分解污染物的组合浓度的量度。 两个分析结果的比较产生了抑制剂击穿污染物相对于抑制剂添加剂浓度的浓度的量度。