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1. 发明授权

US3948564A Fluid bearing apparatus and method utilizing selective turntable diverter structure 失效
标题翻译：流体轴承装置和方法利用选择性转盘分流器结构
公开(公告)号：US3948564A
公开(公告)日：1976-04-06
申请号：US578550
申请日：1975-05-19
申请人： Alan G. Flint
发明人： Alan G. Flint
IPC分类号： B65G51/03 , H01L21/677 , B65G51/00
CPC分类号： H01L21/67784 , B65G51/03
摘要： Apparatus and method for handling articles, such as silicon and like wafers used in producing electronic devices. Articles are transferred between two predetermined stations on a fluid bearing track structure and may be selectively diverted in sequence into a storage magazine which defines a buffer station so that articles to be handled or treated in adjacent associated apparatus may be maintained in readily available supply to satisfy the needs of the associated apparatus. When such needs may be satisfied by direct transfer of articles into the associated apparatus the storage buffer zone is bypassed. A selectively actuated fluid bearing turntable directs articles into or from the storage magazine as operating conditions require. All handling of articles is automatically effected on fluid bearings and requires no direct manual participation.
摘要翻译：用于处理物品的设备和方法，例如用于生产电子设备的硅等晶片。物品在流体轴承轨道结构上的两个预定站之间转移，并且可以被顺序地转移到限定缓冲站的存储仓库中，使得在相邻的相关设备中待处理或处理的物品可以被保持在容易获得的供应中以满足相关设备的需要。当通过将物品直接转移到相关联的装置中可以满足这种需要时，旁路存储缓冲区。选择性致动的流体轴承转盘根据操作条件要求将物品引入或从储存仓中引导。对流体轴承自动进行所有物品处理，不需要直接手动参与。

2. 发明授权

US4457661A Wafer loading apparatus 失效
标题翻译：晶圆装载装置
公开(公告)号：US4457661A
公开(公告)日：1984-07-03
申请号：US328408
申请日：1981-12-07
申请人： Alan G. Flint , William G. Jacobs
发明人： Alan G. Flint , William G. Jacobs
IPC分类号： B65G49/07 , B65G65/00 , H01L21/67
CPC分类号： H01L21/67 , B65G65/00 , Y10S414/138
摘要： Apparatus for transferring wafers between storage magazines and processing trays. The trays are mounted on a generally cylindrical carousel which is rotated about its axis to bring successive ones of the trays into position for loading wafers on to the trays and unloading wafers from the trays. An elevator assembly is mounted within the carousel and is moveable in an axial direction for alignment with different wafer holding positions which are spaced along the trays. The storage magazines are mounted on the elevator assembly, and wafer transfer blades transfer the wafers between the magazines and radially moveable chucks which carry the wafers to and from the wafer holding positions in the trays.
摘要翻译：用于在存储杂志和处理盘之间传送晶片的装置。托盘安装在大致圆柱形的转盘上，该转盘绕其轴线旋转，以将连续的托盘放入位置，以将晶片装载到托盘上，并从托盘卸载晶片。电梯组件安装在转盘内，并可在轴向方向上移动，以便与沿托盘间隔开的不同晶片保持位置对准。存储杂志安装在电梯组件上，并且晶片传送叶片将晶片转移到杂志和径向可移动的卡盘之间，这些卡盘将晶片运送到托盘中的晶片保持位置和从晶片保持位置。

3. 发明授权

US4315705A Apparatus for handling and treating wafers 失效
标题翻译：用于处理和处理晶片的设备
公开(公告)号：US4315705A
公开(公告)日：1982-02-16
申请号：US779075
申请日：1977-03-18
申请人： Alan G. Flint
发明人： Alan G. Flint
IPC分类号： B65G51/03 , H01L21/677 , H05K13/02 , B65G51/02
CPC分类号： H01L21/6779 , B65G51/03 , H05K13/022
摘要： A wafer processing system for spin processing photoresist liquid on a silicon wafer and automatically sequencing them through the processor includes a shuttle having upper and lower air bearing slides. The upper slide receives the wafer from a supply magazine and centers it on a rotating chuck and the lower slide of the shuttle receives the wafer from the chuck and allows it to be transferred to a receive track.
摘要翻译：用于在硅晶片上旋转处理光致抗蚀剂液体并通过处理器自动对它们进行排序的晶片处理系统包括具有上部和下部空气轴承滑块的梭子。上滑块从供应盒接收晶片并将其集中在旋转卡盘上，并且梭子的下滑动件从卡盘接收晶片并允许其转移到接收轨道。

4. 发明授权

US4047627A Mask plate handling method 失效
标题翻译：面膜处理方法
公开(公告)号：US4047627A
公开(公告)日：1977-09-13
申请号：US652514
申请日：1976-01-26
申请人： Alan G. Flint
发明人： Alan G. Flint
IPC分类号： B65G47/91 , H01L21/00
CPC分类号： H01L21/67138 , B65G47/918
摘要： Apparatus and method for handling articles, such as glass or ceramic plates, commonly referred to as masks, employed in the manufacture of semi-conductor devices. The masks are transported between two predetermined stations with a treating operation being performed thereon at an intermediate station. The subject apparatus utilizes a fluid bearing for removing a plurality of masks in sequence from an indexable carrier and for accurately positioning the masks in sequence relative to a vacuum transfer arm. The transfer arm positions the masks in a precisely oriented location on a rotatable vacuum chuck so that a predtermined operation may be formed thereon. Another vacuum transfer arm then moves the treated masks in sequence from the vacuum chuck and places the same onto another fluid bearing for introduction thereby into another indexable carrier. Specially designed vacuum transfer arms, and means for accurately positioning masks in sequence relative to an infeed transfer arm for precise positioning thereby on the vacuum chuck, are employed so that damage to the relatively fragile masks during transfer to and from, and spinning at, the treating station is obviated.
摘要翻译：用于制造半导体器件的用于处理诸如玻璃或陶瓷板（通常被称为掩模）的物品的设备和方法。掩模在两个预定站之间传送，其中在中间站执行处理操作。主体装置利用流体轴承来从可转位的载体上依次去除多个掩模，并且相对于真空传送臂依次精确地定位掩模。传送臂将掩模定位在可旋转的真空卡盘上的精确取向的位置，从而可以在其上形成预先操作的操作。然后另一个真空传送臂将处理的掩模从真空吸盘顺序移动，并将其放置到另一个流体轴承上，从而引入另一个可转位的载体。专门设计的真空传送臂和用于相对于进料传送臂依次准确定位掩模的装置，由此在真空吸盘上进行精确定位的装置被采用，以便在传送到和从中移动时对相对脆弱的掩模的损坏治疗台被免除。

5. 发明授权

US3960277A Mask plate handling apparatus 失效
标题翻译：面罩板处理装置
公开(公告)号：US3960277A
公开(公告)日：1976-06-01
申请号：US510284
申请日：1974-09-30
申请人： Alan G. Flint
发明人： Alan G. Flint
IPC分类号： H01L21/027 , B65G47/91 , G03F7/004 , G03F9/00 , H01L21/683 , B65G51/02
CPC分类号： B65G47/918
摘要： Apparatus and method for handling articles, such as glass or ceramic plates, commonly referred to as masks, employed in the manufacture of semi-conductor devices. The masks are transported between two predetermined stations with a treating operation being performed thereon at an intermediate station. The subject apparatus utilizes a fluid bearing for removing a plurality of masks in sequence from an indexable carrier and for accurately positioning the masks in sequence relative to a vacuum transfer arm. The transfer arm positions the masks in a precisely oriented location on a rotatable vacuum chuck so that a predetermined treating operation may be formed thereon. Another vacuum transfer arm then moves the treated masks in sequence from the vacuum chuck and places the same onto another fluid bearing for introduction thereby into another indexable carrier. Specially designed vacuum transfer arms, and means for accurately positioning masks in sequence relative to an infeed transfer arm for precise positioning thereby on the vacuum chuck, are employed so that damage to the relatively fragile masks during transfer to and from, and spinning at, the treating station is obviated.
摘要翻译：用于制造半导体器件的用于处理诸如玻璃或陶瓷板（通常被称为掩模）的物品的设备和方法。掩模在两个预定站之间传送，其中在中间站执行处理操作。主体装置利用流体轴承来从可转位的载体上依次去除多个掩模，并且相对于真空传送臂依次准确地定位掩模。传送臂将掩模定位在可旋转的真空吸盘上的精确取向的位置，使得可以在其上形成预定的处理操作。然后另一个真空传送臂将处理的掩模从真空吸盘顺序移动，并将其放置到另一个流体轴承上，从而引入另一个可转位的载体。专门设计的真空传送臂和用于相对于进料传送臂依次准确定位掩模的装置，由此在真空吸盘上进行精确定位的装置被采用，以便在传送到和从中移动时对相对脆弱的掩模的损坏治疗台被免除。

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