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1. 发明授权

US07701693B2 Electrostatic chuck with heater and manufacturing method thereof 有权
标题翻译：带加热器的静电吸盘及其制造方法
公开(公告)号：US07701693B2
公开(公告)日：2010-04-20
申请号：US11854071
申请日：2007-09-12
申请人： Akiyoshi Hattori , Kazuhiro Nobori
发明人： Akiyoshi Hattori , Kazuhiro Nobori
IPC分类号： H01L21/683
CPC分类号： B29C67/04 , B29C43/006 , B32B18/00 , C04B35/111 , C04B35/505 , C04B35/5626 , C04B35/62695 , C04B35/645 , C04B37/001 , C04B2235/3217 , C04B2235/6562 , C04B2235/6584 , C04B2235/721 , C04B2235/77 , C04B2235/96 , C04B2235/9607 , C04B2237/34 , C04B2237/343 , H01L21/6831
摘要： An electrostatic chuck includes a base. The base has a support portion made of alumina ceramics, and a surface portion made of yttria ceramics. The surface portion forms at least a substrate mounting surface and side surface of the base on a surface of the support portion. Carbon contents in alumina ceramics of the support portion and yttria ceramics of the surface portion are 0.05 wt % or less.
摘要翻译：静电卡盘包括底座。基体具有由氧化铝陶瓷制成的支撑部分和由氧化钇陶瓷制成的表面部分。所述表面部分至少在所述支撑部分的表面上形成所述基底的基板安装表面和侧表面。表面部分的支撑部分的氧化铝陶瓷和氧化钇陶瓷中的碳含量为0.05重量％以下。

2. 发明申请

US20090242101A1 BONDING AGENT, ALUMINUM NITRIDE COMPOSITE BODY, AND MANUFACTURING METHOD OF THE SAME 有权
标题翻译：粘结剂，氮化铝复合体及其制造方法
公开(公告)号：US20090242101A1
公开(公告)日：2009-10-01
申请号：US12434069
申请日：2009-05-01
申请人： Akiyoshi HATTORI , Takahiro Takahashi
发明人： Akiyoshi HATTORI , Takahiro Takahashi
IPC分类号： B29C65/02
CPC分类号： C04B37/005 , B32B18/00 , B32B2315/02 , C04B35/581 , C04B35/62665 , C04B35/645 , C04B2235/3206 , C04B2235/3208 , C04B2235/3217 , C04B2235/3222 , C04B2235/3225 , C04B2235/3418 , C04B2235/3865 , C04B2235/77 , C04B2235/94 , C04B2235/96 , C04B2235/963 , C04B2235/9692 , C04B2237/062 , C04B2237/064 , C04B2237/08 , C04B2237/704
摘要： A bonding agent is provided which includes a flux containing either calcium aluminate or calcium oxide and aluminum oxide and aluminum nitride powder.
摘要翻译：提供了一种粘合剂，其包括含有铝酸钙或氧化钙和氧化铝和氮化铝粉末的助熔剂。

3. 发明授权

US07354652B2 Corrosion-resistant member and producing method thereof 有权
标题翻译：耐腐蚀构件及其制造方法
公开(公告)号：US07354652B2
公开(公告)日：2008-04-08
申请号：US11503807
申请日：2006-08-14
申请人： Akiyoshi Hattori
发明人： Akiyoshi Hattori
IPC分类号： B32B9/00
CPC分类号： C04B41/87 , C04B35/117 , C04B35/581 , C04B35/62615 , C04B41/009 , C04B41/5032 , C04B2235/3208 , C04B2235/3865 , C04B2235/9684 , C04B41/4539 , C04B41/455
摘要： A corrosion-resistant member, which is exposed to a corrosive environment is provided. The corrosion-resistant member is made of a corrosion-resistant material that contains at least one of an oxide of calcium and aluminum, and a calcium aluminum oxide. The corrosion-resistant material includes a rare earth element in an amount of less than 5 wt %.
摘要翻译：提供暴露于腐蚀性环境的耐腐蚀构件。耐腐蚀构件由含有钙和铝的氧化物和氧化钙铝中的至少一种的耐腐蚀材料制成。耐腐蚀材料包括少于5重量％的稀土元素。

4. 发明申请

US20080047952A1 Electrostatic chuck heater 有权
标题翻译：静电卡盘加热器
公开(公告)号：US20080047952A1
公开(公告)日：2008-02-28
申请号：US11879740
申请日：2007-07-18
申请人： Yutaka Mori , Akiyoshi Hattori , Takeru Torigoe
发明人： Yutaka Mori , Akiyoshi Hattori , Takeru Torigoe
IPC分类号： H05B3/06 , B23B31/02 , H05B3/03
CPC分类号： H01L21/6831 , C04B35/111 , C04B35/645 , C04B2235/662 , C04B2235/72 , C04B2235/721 , C04B2235/77 , H01L21/67103
摘要： An electrostatic chuck heater including a base which is formed by: applying conductive paste containing a binder to upper and lower surfaces of an alumina sintered body to print an electrostatic electrode and heater electrode; calcining the alumina sintered body; arranging alumina powder above the electrostatic electrode and alumina powder below the heater electrode; and pressing the alumina powder and alumina sintered body in the above state for pressure sintering. The diffusion area ratio of the conductive material near the electrostatic electrode in the dielectric layer is set not more.
摘要翻译：一种静电卡盘加热器，包括基底，该基底通过以下步骤形成：将含有粘合剂的导电膏施加到氧化铝烧结体的上表面和下表面以印刷静电电极和加热器电极; 煅烧氧化铝烧结体; 将氧化铝粉末放置在加热器电极下方的静电电极和氧化铝粉末上方; 并在上述状态下压制氧化铝粉末和氧化铝烧结体进行加压烧结。介电层中的静电电极附近的导电材料的扩散面积比不设定。

5. 发明申请

US20070144667A1 ALUMINUM NITRIDE BONDED BODY, AND MANUFACTURING METHOD OF THE SAME 审中-公开
标题翻译：氮化铝粘合体及其制造方法
公开(公告)号：US20070144667A1
公开(公告)日：2007-06-28
申请号：US11616434
申请日：2006-12-27
申请人： Akiyoshi HATTORI
发明人： Akiyoshi HATTORI
IPC分类号： B32B37/00
CPC分类号： C04B37/005 , C04B35/44 , C04B35/581 , C04B35/645 , C04B2235/3208 , C04B2235/3217 , C04B2235/3218 , C04B2235/3222 , C04B2235/3224 , C04B2235/3225 , C04B2235/3229 , C04B2235/3865 , C04B2235/6562 , C04B2235/94 , C04B2235/96 , C04B2235/963 , C04B2237/064 , C04B2237/08 , C04B2237/10 , C04B2237/366 , C04B2237/62 , C04B2237/80
摘要： An aluminum nitride bonded body includes: a stick-like attaching body containing aluminum nitride; an attached body containing aluminum nitride, in which a tip end portion of the attaching body is screwed to a support hole; and a bonding layer for bonding the attaching body and the attached body to each other.
摘要翻译：氮化铝接合体包括：包含氮化铝的棒状附着体; 包括氮化铝的附接体，其中所述附接体的末端部分螺合到支撑孔; 以及用于将安装体和附接体彼此接合的接合层。

6. 发明申请

US20070042203A1 Corrosion-resistant member and producing method thereof 有权
标题翻译：耐腐蚀构件及其制造方法
公开(公告)号：US20070042203A1
公开(公告)日：2007-02-22
申请号：US11503807
申请日：2006-08-14
申请人： Akiyoshi Hattori
发明人： Akiyoshi Hattori
IPC分类号： B32B15/04 , B32B19/00 , B32B9/00 , B05D3/02
CPC分类号： C04B41/87 , C04B35/117 , C04B35/581 , C04B35/62615 , C04B41/009 , C04B41/5032 , C04B2235/3208 , C04B2235/3865 , C04B2235/9684 , C04B41/4539 , C04B41/455
摘要： In a corrosion-resistant member, at least a portion thereof exposed to a corrosive environment is formed of a corrosion-resistant material that contains calcium oxide and aluminum oxide, and of calcium aluminum oxide, in which a rare earth element is less than 5 wt %.
摘要翻译：在耐腐蚀构件中，暴露于腐蚀环境的至少一部分由含有氧化钙和氧化铝的耐腐蚀材料以及稀土元素小于5wt ％。

7. 发明申请

US20050211703A1 Ceramic susceptor and a method of cleaning the same 有权
标题翻译：陶瓷感受器及其清洗方法
公开(公告)号：US20050211703A1
公开(公告)日：2005-09-29
申请号：US11087094
申请日：2005-03-22
申请人： Taiji Kiku , Akiyoshi Hattori
发明人： Taiji Kiku , Akiyoshi Hattori
IPC分类号： B08B7/00 , B08B3/08 , H01L21/00 , H01L21/02 , H01L21/205 , H01L21/3065 , H01L21/68 , H01L21/683 , H05B3/14 , H05B6/80
CPC分类号： H05B3/143 , H01L21/67103 , H05B6/806 , Y10S134/902
摘要： An object of the present invention is to provide a ceramic susceptor for considerably reducing the count number of metal atoms on the surface of a semiconductor after the semiconductor is treated, specifically to 1×1010 atoms/cm2 or lower. It is provided a ceramic susceptor 2 having a face for mounting semiconductor 2a wherein each of metal elements other than metal element(s) constituting the ceramic material has a count number of 1×1011 atoms/cm2 or lower. It is further provided a method of cleaning a ceramic susceptor 2 having a face 2a for mounting semiconductor, wherein the susceptor is cleaned using a complexing agent capable of forming a complex with a metal element.
摘要翻译：本发明的一个目的是提供一种用于在半导体被处理之后，显着地减少半导体表面上的金属原子计数的陶瓷基座，特别是1×10 10原子/ 2 或更低。提供了一种具有用于安装半导体2a的面的陶瓷基座2，其中除了构成陶瓷材料的金属元素之外的金属元素中的每一个具有1×10 11原子/ cm 2的计数 > 2 或更低。还提供了一种清洁具有用于安装半导体的面2a的陶瓷基座2的方法，其中使用能够与金属元素形成络合物的络合剂清洁基座。

8. 发明授权

US06796799B1 Behavior determining apparatus, care system, care residence and behavior information specifying apparatus and system 失效
标题翻译：行为确定装置，护理系统，护理居留和行为信息指定装置和系统
公开(公告)号：US06796799B1
公开(公告)日：2004-09-28
申请号：US09621688
申请日：2000-07-21
申请人： Nobuyuki Yoshiike , Akiyoshi Hattori , Katsuya Morinaka , Shigeyuki Inoue , Shinji Tanaka
发明人： Nobuyuki Yoshiike , Akiyoshi Hattori , Katsuya Morinaka , Shigeyuki Inoue , Shinji Tanaka
IPC分类号： G09B1900
CPC分类号： G08B21/0423 , G06F19/00 , G06F19/3418 , G08B21/0446 , G08B21/0453 , G08B21/0469 , G08B21/0476 , G08B21/0484 , G08B21/0492 , G16H50/20
摘要： A behavior determining apparatus, has first detective means for detecting the behavior of a given subject person; second detective means for detecting the operation of a given appliance; recording means for recording one or more combined patterns of behavior of said subject person and operation of said appliance; determining means for comparing the behavior of said subject person detected by said first detective means and the operation of said appliance detected by said second detective means with patterns recorded in said recording means to determine whether or not a combination of behavior of said subject person and operation of said appliance substantially accords with any of said patterns; and output means for outputting the determined results of the said determining means.
摘要翻译：一种行为确定装置，具有用于检测给定主体的行为的第一检测装置;用于检测给定装置的操作的第二检测装置;用于记录所述对象人的行为的一个或多个组合模式的记录装置和所述用于将由所述第一检测装置检测到的所述被摄体人的行为与由所述第二检测装置检测的所述设备的操作与记录在所述记录装置中的图案进行比较的确定装置，以确定所述被摄体人的行为的组合并且所述设备的操作基本上符合任何所述图案; 以及用于输出所述确定装置的确定结果的输出装置。

9. 发明授权

US5998011A Composition for use in a transparent and electrically conductive film and a method for making the film 失效
标题翻译：用于透明导电膜的组合物和制备该膜的方法
公开(公告)号：US5998011A
公开(公告)日：1999-12-07
申请号：US697512
申请日：1996-08-26
申请人： Akiyoshi Hattori , Akihiko Yoshida , Atsushi Nishino
发明人： Akiyoshi Hattori , Akihiko Yoshida , Atsushi Nishino
IPC分类号： C03C17/25 , C23C18/12 , B32B17/00
CPC分类号： C03C17/253 , C23C18/1216 , C23C18/1283 , C03C2217/231 , C03C2218/11 , Y10T428/252
摘要： [Purpose] An object of the present invention is to provide a composition for use in a formation of transparent and electrically conductive film having a low electric resistance and a high transmittance and a method for making the film mentioned above.[Composition] A mixture of inorganic indium compound and organic tin compound is combined with organic compound capable of coordinating with either of indium and tin to form an organic solution. When the mixture is heated, the inorganic indium compound and the organic tin compound coordinating partially with the organic compound react with water of crystallization of inorganic indium compound. The organic tin compound is partially subjected to hydrolysis to form an intermediate complex compound including indium and tin. This suppresses the evaporation of tin and generates a uniform film having a high transmittance and a low electric resistance. An addition of polyhydric alcohol increases the viscosity of the solution and gives a high stability to a resultant film obtained by applying the composition to the substrate and firing.
摘要翻译： [目的]本发明的目的是提供一种用于形成具有低电阻和高透射率的透明导电膜的组合物和制备上述膜的方法。 [组成]将无机铟化合物和有机锡化合物的混合物与能够与铟和锡中的任一种配位的有机化合物组合以形成有机溶液。当加热混合物时，与有机化合物部分配位的无机铟化合物和有机锡化合物与无机铟化合物的结晶水反应。有机锡化合物部分进行水解以形成包括铟和锡的中间络合物。这抑制了锡的蒸发，并产生具有高透射率和低电阻的均匀的膜。多元醇的添加增加了溶液的粘度，并且通过将该组合物施加到基材上并进行烧制而获得的所得膜具有高的稳定性。

10. 外观设计

USD328300S Extension ringing console apparatus for telephone sets 失效
公开(公告)号：USD328300S
公开(公告)日：1992-07-28
申请号：US603856
申请日：1990-10-26
申请人： Akiyoshi Hattori , Masanori Suzuki
设计人： Akiyoshi Hattori , Masanori Suzuki

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